12/16/2010	12:16:14 AM	H2 valve closed
12/16/2010	12:16:14 AM	BCl3 valve closed
12/16/2010	12:16:14 AM	PH3 valve closed
12/16/2010	12:16:14 AM	SiCl4 pre valve closed
12/16/2010	12:16:14 AM	SiCl4 post valve closed
12/16/2010	12:16:14 AM	Main Vac valve closed
12/16/2010	12:16:14 AM	Bypass valve closed
12/16/2010	12:16:14 AM	Helium valve opened
12/16/2010	12:16:14 AM	Bubbler valve opened
12/16/2010	12:16:14 AM	Helium MFC set to  500.000000
12/16/2010	12:16:14 AM	H2 MFC set to  0.000000
12/16/2010	12:16:14 AM	BCl3 MFC set to  0.000000
12/16/2010	12:16:14 AM	PHl3 MFC set to  0.000000
12/16/2010	12:16:14 AM	SiCl4 MFC set to  0.000000
12/16/2010	12:16:14 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:16:15 AM	Tube furnace set to 0
12/16/2010	12:36:15 AM	Helium valve closed
12/16/2010	12:36:15 AM	H2 valve closed
12/16/2010	12:36:15 AM	BCl3 valve closed
12/16/2010	12:36:15 AM	PH3 valve closed
12/16/2010	12:36:15 AM	SiCl4 pre valve closed
12/16/2010	12:36:15 AM	SiCl4 post valve closed
12/16/2010	12:36:15 AM	Main Vac valve closed
12/16/2010	12:36:15 AM	Bypass valve closed
12/16/2010	12:36:15 AM	Bubbler valve closed
12/16/2010	12:36:15 AM	Helium MFC set to  0.000000
12/16/2010	12:36:15 AM	H2 MFC set to  0.000000
12/16/2010	12:36:15 AM	BCl3 MFC set to  0.000000
12/16/2010	12:36:15 AM	PHl3 MFC set to  0.000000
12/16/2010	12:36:15 AM	SiCl4 MFC set to  0.000000
12/16/2010	12:36:15 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:36:15 AM	Tube furnace set to 0
12/16/2010	12:36:15 AM	Run finished at 12:36 AM
12/16/2010	12:54:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	12:54:01 AM	Recipe started at 12:54 AM
12/16/2010	12:54:01 AM	H2 valve closed
12/16/2010	12:54:01 AM	BCl3 valve closed
12/16/2010	12:54:01 AM	PH3 valve closed
12/16/2010	12:54:01 AM	SiCl4 pre valve closed
12/16/2010	12:54:01 AM	SiCl4 post valve closed
12/16/2010	12:54:01 AM	Main Vac valve closed
12/16/2010	12:54:01 AM	Bypass valve closed
12/16/2010	12:54:01 AM	Bubbler valve closed
12/16/2010	12:54:01 AM	Helium valve opened
12/16/2010	12:54:01 AM	Helium MFC set to  500.000000
12/16/2010	12:54:01 AM	H2 MFC set to  0.000000
12/16/2010	12:54:01 AM	BCl3 MFC set to  0.000000
12/16/2010	12:54:01 AM	PHl3 MFC set to  0.000000
12/16/2010	12:54:01 AM	SiCl4 MFC set to  0.000000
12/16/2010	12:54:01 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:54:01 AM	Tube furnace set to 0
12/16/2010	12:54:08 AM	Helium valve closed
12/16/2010	12:54:08 AM	H2 valve closed
12/16/2010	12:54:08 AM	BCl3 valve closed
12/16/2010	12:54:08 AM	PH3 valve closed
12/16/2010	12:54:08 AM	SiCl4 pre valve closed
12/16/2010	12:54:08 AM	SiCl4 post valve closed
12/16/2010	12:54:08 AM	Main Vac valve closed
12/16/2010	12:54:08 AM	Bypass valve closed
12/16/2010	12:54:08 AM	Bubbler valve closed
12/16/2010	12:54:08 AM	Helium MFC set to  0.000000
12/16/2010	12:54:08 AM	H2 MFC set to  0.000000
12/16/2010	12:54:08 AM	BCl3 MFC set to  0.000000
12/16/2010	12:54:08 AM	PHl3 MFC set to  0.000000
12/16/2010	12:54:08 AM	SiCl4 MFC set to  0.000000
12/16/2010	12:54:08 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:54:09 AM	Tube furnace set to 0
12/16/2010	12:54:09 AM	Run finished at 12:54 AM
12/16/2010	12:54:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	1:10:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	1:10:34 AM	Recipe started at 1:10 AM
12/16/2010	1:10:34 AM	Helium valve closed
12/16/2010	1:10:34 AM	H2 valve closed
12/16/2010	1:10:34 AM	BCl3 valve closed
12/16/2010	1:10:34 AM	PH3 valve closed
12/16/2010	1:10:34 AM	SiCl4 pre valve closed
12/16/2010	1:10:34 AM	SiCl4 post valve closed
12/16/2010	1:10:34 AM	Main Vac valve closed
12/16/2010	1:10:34 AM	Bubbler valve closed
12/16/2010	1:10:34 AM	Bypass valve opened
12/16/2010	1:10:34 AM	Helium MFC set to  0.000000
12/16/2010	1:10:34 AM	H2 MFC set to  0.000000
12/16/2010	1:10:34 AM	BCl3 MFC set to  0.000000
12/16/2010	1:10:34 AM	PHl3 MFC set to  0.000000
12/16/2010	1:10:34 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:10:34 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:10:34 AM	Tube furnace set to 0
12/16/2010	1:11:34 AM	Helium valve closed
12/16/2010	1:11:34 AM	H2 valve closed
12/16/2010	1:11:34 AM	BCl3 valve closed
12/16/2010	1:11:34 AM	PH3 valve closed
12/16/2010	1:11:34 AM	SiCl4 pre valve closed
12/16/2010	1:11:34 AM	SiCl4 post valve closed
12/16/2010	1:11:34 AM	Bubbler valve closed
12/16/2010	1:11:34 AM	Main Vac valve opened
12/16/2010	1:11:34 AM	Bypass valve opened
12/16/2010	1:11:34 AM	Helium MFC set to  0.000000
12/16/2010	1:11:34 AM	H2 MFC set to  0.000000
12/16/2010	1:11:34 AM	BCl3 MFC set to  0.000000
12/16/2010	1:11:34 AM	PHl3 MFC set to  0.000000
12/16/2010	1:11:34 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:11:34 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:11:34 AM	Tube furnace set to 0
12/16/2010	1:12:34 AM	H2 valve closed
12/16/2010	1:12:34 AM	BCl3 valve closed
12/16/2010	1:12:34 AM	PH3 valve closed
12/16/2010	1:12:34 AM	SiCl4 pre valve closed
12/16/2010	1:12:34 AM	SiCl4 post valve closed
12/16/2010	1:12:34 AM	Bubbler valve closed
12/16/2010	1:12:34 AM	Helium valve opened
12/16/2010	1:12:34 AM	Main Vac valve opened
12/16/2010	1:12:34 AM	Bypass valve opened
12/16/2010	1:12:34 AM	Helium MFC set to  100.000000
12/16/2010	1:12:34 AM	H2 MFC set to  0.000000
12/16/2010	1:12:34 AM	BCl3 MFC set to  0.000000
12/16/2010	1:12:34 AM	PHl3 MFC set to  0.000000
12/16/2010	1:12:34 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:12:34 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:12:34 AM	Tube furnace set to 0
12/16/2010	1:13:34 AM	Helium valve closed
12/16/2010	1:13:34 AM	H2 valve closed
12/16/2010	1:13:34 AM	BCl3 valve closed
12/16/2010	1:13:34 AM	PH3 valve closed
12/16/2010	1:13:34 AM	SiCl4 pre valve closed
12/16/2010	1:13:34 AM	SiCl4 post valve closed
12/16/2010	1:13:34 AM	Bubbler valve closed
12/16/2010	1:13:34 AM	Main Vac valve opened
12/16/2010	1:13:34 AM	Bypass valve opened
12/16/2010	1:13:34 AM	Helium MFC set to  0.000000
12/16/2010	1:13:34 AM	H2 MFC set to  0.000000
12/16/2010	1:13:34 AM	BCl3 MFC set to  0.000000
12/16/2010	1:13:34 AM	PHl3 MFC set to  0.000000
12/16/2010	1:13:34 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:13:34 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:13:35 AM	Tube furnace set to 0
12/16/2010	1:14:35 AM	H2 valve closed
12/16/2010	1:14:35 AM	BCl3 valve closed
12/16/2010	1:14:35 AM	PH3 valve closed
12/16/2010	1:14:35 AM	SiCl4 pre valve closed
12/16/2010	1:14:35 AM	SiCl4 post valve closed
12/16/2010	1:14:35 AM	Bubbler valve closed
12/16/2010	1:14:35 AM	Helium valve opened
12/16/2010	1:14:35 AM	Main Vac valve opened
12/16/2010	1:14:35 AM	Bypass valve opened
12/16/2010	1:14:35 AM	Helium MFC set to  100.000000
12/16/2010	1:14:35 AM	H2 MFC set to  0.000000
12/16/2010	1:14:35 AM	BCl3 MFC set to  0.000000
12/16/2010	1:14:35 AM	PHl3 MFC set to  0.000000
12/16/2010	1:14:35 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:14:35 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:14:35 AM	Tube furnace set to 0
12/16/2010	1:15:35 AM	Helium valve closed
12/16/2010	1:15:35 AM	H2 valve closed
12/16/2010	1:15:35 AM	BCl3 valve closed
12/16/2010	1:15:35 AM	PH3 valve closed
12/16/2010	1:15:35 AM	SiCl4 pre valve closed
12/16/2010	1:15:35 AM	SiCl4 post valve closed
12/16/2010	1:15:35 AM	Bubbler valve closed
12/16/2010	1:15:35 AM	Main Vac valve opened
12/16/2010	1:15:35 AM	Bypass valve opened
12/16/2010	1:15:35 AM	Helium MFC set to  0.000000
12/16/2010	1:15:35 AM	H2 MFC set to  0.000000
12/16/2010	1:15:35 AM	BCl3 MFC set to  0.000000
12/16/2010	1:15:35 AM	PHl3 MFC set to  0.000000
12/16/2010	1:15:35 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:15:35 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:15:35 AM	Tube furnace set to 0
12/16/2010	1:16:35 AM	H2 valve closed
12/16/2010	1:16:35 AM	BCl3 valve closed
12/16/2010	1:16:35 AM	PH3 valve closed
12/16/2010	1:16:35 AM	SiCl4 pre valve closed
12/16/2010	1:16:35 AM	SiCl4 post valve closed
12/16/2010	1:16:35 AM	Bubbler valve closed
12/16/2010	1:16:35 AM	Helium valve opened
12/16/2010	1:16:35 AM	Main Vac valve opened
12/16/2010	1:16:35 AM	Bypass valve opened
12/16/2010	1:16:35 AM	Helium MFC set to  100.000000
12/16/2010	1:16:35 AM	H2 MFC set to  0.000000
12/16/2010	1:16:35 AM	BCl3 MFC set to  0.000000
12/16/2010	1:16:35 AM	PHl3 MFC set to  0.000000
12/16/2010	1:16:35 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:16:35 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:16:35 AM	Tube furnace set to 0
12/16/2010	1:17:35 AM	Helium valve closed
12/16/2010	1:17:35 AM	H2 valve closed
12/16/2010	1:17:35 AM	BCl3 valve closed
12/16/2010	1:17:35 AM	PH3 valve closed
12/16/2010	1:17:35 AM	SiCl4 pre valve closed
12/16/2010	1:17:35 AM	SiCl4 post valve closed
12/16/2010	1:17:35 AM	Bubbler valve closed
12/16/2010	1:17:35 AM	Main Vac valve opened
12/16/2010	1:17:35 AM	Bypass valve opened
12/16/2010	1:17:35 AM	Helium MFC set to  0.000000
12/16/2010	1:17:35 AM	H2 MFC set to  0.000000
12/16/2010	1:17:35 AM	BCl3 MFC set to  0.000000
12/16/2010	1:17:35 AM	PHl3 MFC set to  0.000000
12/16/2010	1:17:35 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:17:35 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:17:35 AM	Tube furnace set to 0
12/16/2010	1:18:35 AM	H2 valve closed
12/16/2010	1:18:35 AM	BCl3 valve closed
12/16/2010	1:18:35 AM	PH3 valve closed
12/16/2010	1:18:35 AM	SiCl4 pre valve closed
12/16/2010	1:18:35 AM	SiCl4 post valve closed
12/16/2010	1:18:35 AM	Bubbler valve closed
12/16/2010	1:18:35 AM	Helium valve opened
12/16/2010	1:18:35 AM	Main Vac valve opened
12/16/2010	1:18:35 AM	Bypass valve opened
12/16/2010	1:18:35 AM	Helium MFC set to  100.000000
12/16/2010	1:18:35 AM	H2 MFC set to  0.000000
12/16/2010	1:18:35 AM	BCl3 MFC set to  0.000000
12/16/2010	1:18:35 AM	PHl3 MFC set to  0.000000
12/16/2010	1:18:35 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:18:35 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:18:36 AM	Tube furnace set to 0
12/16/2010	1:19:36 AM	Helium valve closed
12/16/2010	1:19:36 AM	H2 valve closed
12/16/2010	1:19:36 AM	BCl3 valve closed
12/16/2010	1:19:36 AM	PH3 valve closed
12/16/2010	1:19:36 AM	SiCl4 pre valve closed
12/16/2010	1:19:36 AM	SiCl4 post valve closed
12/16/2010	1:19:36 AM	Bubbler valve closed
12/16/2010	1:19:36 AM	Main Vac valve opened
12/16/2010	1:19:36 AM	Bypass valve opened
12/16/2010	1:19:36 AM	Helium MFC set to  0.000000
12/16/2010	1:19:36 AM	H2 MFC set to  0.000000
12/16/2010	1:19:36 AM	BCl3 MFC set to  0.000000
12/16/2010	1:19:36 AM	PHl3 MFC set to  0.000000
12/16/2010	1:19:36 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:19:36 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:19:36 AM	Tube furnace set to 0
12/16/2010	1:20:36 AM	H2 valve closed
12/16/2010	1:20:36 AM	BCl3 valve closed
12/16/2010	1:20:36 AM	PH3 valve closed
12/16/2010	1:20:36 AM	SiCl4 pre valve closed
12/16/2010	1:20:36 AM	SiCl4 post valve closed
12/16/2010	1:20:36 AM	Bubbler valve closed
12/16/2010	1:20:36 AM	Helium valve opened
12/16/2010	1:20:36 AM	Main Vac valve opened
12/16/2010	1:20:36 AM	Bypass valve opened
12/16/2010	1:20:36 AM	Helium MFC set to  100.000000
12/16/2010	1:20:36 AM	H2 MFC set to  0.000000
12/16/2010	1:20:36 AM	BCl3 MFC set to  0.000000
12/16/2010	1:20:36 AM	PHl3 MFC set to  0.000000
12/16/2010	1:20:36 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:20:36 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:20:36 AM	Tube furnace set to 0
12/16/2010	1:21:36 AM	Helium valve closed
12/16/2010	1:21:36 AM	H2 valve closed
12/16/2010	1:21:36 AM	BCl3 valve closed
12/16/2010	1:21:36 AM	PH3 valve closed
12/16/2010	1:21:36 AM	SiCl4 pre valve closed
12/16/2010	1:21:36 AM	SiCl4 post valve closed
12/16/2010	1:21:36 AM	Bubbler valve closed
12/16/2010	1:21:36 AM	Main Vac valve opened
12/16/2010	1:21:36 AM	Bypass valve opened
12/16/2010	1:21:36 AM	Helium MFC set to  0.000000
12/16/2010	1:21:36 AM	H2 MFC set to  0.000000
12/16/2010	1:21:36 AM	BCl3 MFC set to  0.000000
12/16/2010	1:21:36 AM	PHl3 MFC set to  0.000000
12/16/2010	1:21:36 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:21:36 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:21:36 AM	Tube furnace set to 0
12/16/2010	1:22:36 AM	H2 valve closed
12/16/2010	1:22:36 AM	BCl3 valve closed
12/16/2010	1:22:36 AM	PH3 valve closed
12/16/2010	1:22:36 AM	SiCl4 pre valve closed
12/16/2010	1:22:36 AM	SiCl4 post valve closed
12/16/2010	1:22:36 AM	Bubbler valve closed
12/16/2010	1:22:36 AM	Helium valve opened
12/16/2010	1:22:36 AM	Main Vac valve opened
12/16/2010	1:22:36 AM	Bypass valve opened
12/16/2010	1:22:36 AM	Helium MFC set to  100.000000
12/16/2010	1:22:36 AM	H2 MFC set to  0.000000
12/16/2010	1:22:36 AM	BCl3 MFC set to  0.000000
12/16/2010	1:22:36 AM	PHl3 MFC set to  0.000000
12/16/2010	1:22:36 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:22:36 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:22:36 AM	Tube furnace set to 0
12/16/2010	1:23:36 AM	Helium valve closed
12/16/2010	1:23:36 AM	H2 valve closed
12/16/2010	1:23:36 AM	BCl3 valve closed
12/16/2010	1:23:36 AM	PH3 valve closed
12/16/2010	1:23:36 AM	SiCl4 pre valve closed
12/16/2010	1:23:36 AM	SiCl4 post valve closed
12/16/2010	1:23:36 AM	Bubbler valve closed
12/16/2010	1:23:36 AM	Main Vac valve opened
12/16/2010	1:23:36 AM	Bypass valve opened
12/16/2010	1:23:36 AM	Helium MFC set to  0.000000
12/16/2010	1:23:36 AM	H2 MFC set to  0.000000
12/16/2010	1:23:36 AM	BCl3 MFC set to  0.000000
12/16/2010	1:23:36 AM	PHl3 MFC set to  0.000000
12/16/2010	1:23:36 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:23:36 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:23:37 AM	Tube furnace set to 0
12/16/2010	1:24:37 AM	H2 valve closed
12/16/2010	1:24:37 AM	BCl3 valve closed
12/16/2010	1:24:37 AM	PH3 valve closed
12/16/2010	1:24:37 AM	SiCl4 pre valve closed
12/16/2010	1:24:37 AM	SiCl4 post valve closed
12/16/2010	1:24:37 AM	Bubbler valve closed
12/16/2010	1:24:37 AM	Helium valve opened
12/16/2010	1:24:37 AM	Main Vac valve opened
12/16/2010	1:24:37 AM	Bypass valve opened
12/16/2010	1:24:37 AM	Helium MFC set to  100.000000
12/16/2010	1:24:37 AM	H2 MFC set to  0.000000
12/16/2010	1:24:37 AM	BCl3 MFC set to  0.000000
12/16/2010	1:24:37 AM	PHl3 MFC set to  0.000000
12/16/2010	1:24:37 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:24:37 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:24:37 AM	Tube furnace set to 0
12/16/2010	1:25:37 AM	Helium valve closed
12/16/2010	1:25:37 AM	H2 valve closed
12/16/2010	1:25:37 AM	BCl3 valve closed
12/16/2010	1:25:37 AM	PH3 valve closed
12/16/2010	1:25:37 AM	SiCl4 pre valve closed
12/16/2010	1:25:37 AM	SiCl4 post valve closed
12/16/2010	1:25:37 AM	Bubbler valve closed
12/16/2010	1:25:37 AM	Main Vac valve opened
12/16/2010	1:25:37 AM	Bypass valve opened
12/16/2010	1:25:37 AM	Helium MFC set to  0.000000
12/16/2010	1:25:37 AM	H2 MFC set to  0.000000
12/16/2010	1:25:37 AM	BCl3 MFC set to  0.000000
12/16/2010	1:25:37 AM	PHl3 MFC set to  0.000000
12/16/2010	1:25:37 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:25:37 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:25:37 AM	Tube furnace set to 0
12/16/2010	1:26:37 AM	H2 valve closed
12/16/2010	1:26:37 AM	BCl3 valve closed
12/16/2010	1:26:37 AM	PH3 valve closed
12/16/2010	1:26:37 AM	SiCl4 pre valve closed
12/16/2010	1:26:37 AM	SiCl4 post valve closed
12/16/2010	1:26:37 AM	Bubbler valve closed
12/16/2010	1:26:37 AM	Helium valve opened
12/16/2010	1:26:37 AM	Main Vac valve opened
12/16/2010	1:26:37 AM	Bypass valve opened
12/16/2010	1:26:37 AM	Helium MFC set to  100.000000
12/16/2010	1:26:37 AM	H2 MFC set to  0.000000
12/16/2010	1:26:37 AM	BCl3 MFC set to  0.000000
12/16/2010	1:26:37 AM	PHl3 MFC set to  0.000000
12/16/2010	1:26:37 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:26:37 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:26:37 AM	Tube furnace set to 0
12/16/2010	1:27:37 AM	Helium valve closed
12/16/2010	1:27:37 AM	H2 valve closed
12/16/2010	1:27:37 AM	BCl3 valve closed
12/16/2010	1:27:37 AM	PH3 valve closed
12/16/2010	1:27:37 AM	SiCl4 pre valve closed
12/16/2010	1:27:37 AM	SiCl4 post valve closed
12/16/2010	1:27:37 AM	Bubbler valve closed
12/16/2010	1:27:37 AM	Main Vac valve opened
12/16/2010	1:27:37 AM	Bypass valve opened
12/16/2010	1:27:37 AM	Helium MFC set to  0.000000
12/16/2010	1:27:37 AM	H2 MFC set to  0.000000
12/16/2010	1:27:37 AM	BCl3 MFC set to  0.000000
12/16/2010	1:27:37 AM	PHl3 MFC set to  0.000000
12/16/2010	1:27:37 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:27:37 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:27:37 AM	Tube furnace set to 0
12/16/2010	1:28:37 AM	H2 valve closed
12/16/2010	1:28:37 AM	BCl3 valve closed
12/16/2010	1:28:37 AM	PH3 valve closed
12/16/2010	1:28:37 AM	SiCl4 pre valve closed
12/16/2010	1:28:37 AM	SiCl4 post valve closed
12/16/2010	1:28:37 AM	Bubbler valve closed
12/16/2010	1:28:37 AM	Helium valve opened
12/16/2010	1:28:37 AM	Main Vac valve opened
12/16/2010	1:28:37 AM	Bypass valve opened
12/16/2010	1:28:37 AM	Helium MFC set to  100.000000
12/16/2010	1:28:37 AM	H2 MFC set to  0.000000
12/16/2010	1:28:37 AM	BCl3 MFC set to  0.000000
12/16/2010	1:28:37 AM	PHl3 MFC set to  0.000000
12/16/2010	1:28:37 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:28:37 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:28:38 AM	Tube furnace set to 0
12/16/2010	1:29:38 AM	Helium valve closed
12/16/2010	1:29:38 AM	H2 valve closed
12/16/2010	1:29:38 AM	BCl3 valve closed
12/16/2010	1:29:38 AM	PH3 valve closed
12/16/2010	1:29:38 AM	SiCl4 pre valve closed
12/16/2010	1:29:38 AM	SiCl4 post valve closed
12/16/2010	1:29:38 AM	Bubbler valve closed
12/16/2010	1:29:38 AM	Main Vac valve opened
12/16/2010	1:29:38 AM	Bypass valve opened
12/16/2010	1:29:38 AM	Helium MFC set to  0.000000
12/16/2010	1:29:38 AM	H2 MFC set to  0.000000
12/16/2010	1:29:38 AM	BCl3 MFC set to  0.000000
12/16/2010	1:29:38 AM	PHl3 MFC set to  0.000000
12/16/2010	1:29:38 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:29:38 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:29:38 AM	Tube furnace set to 0
12/16/2010	1:30:38 AM	H2 valve closed
12/16/2010	1:30:38 AM	BCl3 valve closed
12/16/2010	1:30:38 AM	PH3 valve closed
12/16/2010	1:30:38 AM	SiCl4 pre valve closed
12/16/2010	1:30:38 AM	SiCl4 post valve closed
12/16/2010	1:30:38 AM	Bubbler valve closed
12/16/2010	1:30:38 AM	Helium valve opened
12/16/2010	1:30:38 AM	Main Vac valve opened
12/16/2010	1:30:38 AM	Bypass valve opened
12/16/2010	1:30:38 AM	Helium MFC set to  100.000000
12/16/2010	1:30:38 AM	H2 MFC set to  0.000000
12/16/2010	1:30:38 AM	BCl3 MFC set to  0.000000
12/16/2010	1:30:38 AM	PHl3 MFC set to  0.000000
12/16/2010	1:30:38 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:30:38 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:30:38 AM	Tube furnace set to 0
12/16/2010	1:31:38 AM	Helium valve closed
12/16/2010	1:31:38 AM	H2 valve closed
12/16/2010	1:31:38 AM	BCl3 valve closed
12/16/2010	1:31:38 AM	PH3 valve closed
12/16/2010	1:31:38 AM	SiCl4 pre valve closed
12/16/2010	1:31:38 AM	SiCl4 post valve closed
12/16/2010	1:31:38 AM	Bubbler valve closed
12/16/2010	1:31:38 AM	Main Vac valve opened
12/16/2010	1:31:38 AM	Bypass valve opened
12/16/2010	1:31:38 AM	Helium MFC set to  0.000000
12/16/2010	1:31:38 AM	H2 MFC set to  0.000000
12/16/2010	1:31:38 AM	BCl3 MFC set to  0.000000
12/16/2010	1:31:38 AM	PHl3 MFC set to  0.000000
12/16/2010	1:31:38 AM	SiCl4 MFC set to  0.000000
12/16/2010	1:31:38 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:31:38 AM	Tube furnace set to 0
12/16/2010	1:31:39 AM	Run finished at 1:31 AM
12/16/2010	1:31:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	6:44:07 AM	Recipe started at 6:44 AM
12/16/2010	6:44:07 AM	Helium valve closed
12/16/2010	6:44:07 AM	BCl3 valve closed
12/16/2010	6:44:07 AM	PH3 valve closed
12/16/2010	6:44:07 AM	SiCl4 pre valve closed
12/16/2010	6:44:07 AM	SiCl4 post valve closed
12/16/2010	6:44:07 AM	Main Vac valve closed
12/16/2010	6:44:07 AM	Bypass valve closed
12/16/2010	6:44:07 AM	Bubbler valve closed
12/16/2010	6:44:07 AM	H2 valve opened
12/16/2010	6:44:07 AM	Helium MFC set to  0.000000
12/16/2010	6:44:07 AM	H2 MFC set to  500.000000
12/16/2010	6:44:07 AM	BCl3 MFC set to  0.000000
12/16/2010	6:44:07 AM	PHl3 MFC set to  0.000000
12/16/2010	6:44:07 AM	SiCl4 MFC set to  0.000000
12/16/2010	6:44:07 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:44:08 AM	Tube furnace set to 100
12/16/2010	6:45:30 AM	Helium valve closed
12/16/2010	6:45:30 AM	BCl3 valve closed
12/16/2010	6:45:30 AM	PH3 valve closed
12/16/2010	6:45:30 AM	SiCl4 pre valve closed
12/16/2010	6:45:30 AM	SiCl4 post valve closed
12/16/2010	6:45:30 AM	Main Vac valve closed
12/16/2010	6:45:30 AM	Bypass valve closed
12/16/2010	6:45:30 AM	H2 valve opened
12/16/2010	6:45:30 AM	Bubbler valve opened
12/16/2010	6:45:30 AM	Helium MFC set to  0.000000
12/16/2010	6:45:30 AM	H2 MFC set to  500.000000
12/16/2010	6:45:30 AM	BCl3 MFC set to  0.000000
12/16/2010	6:45:30 AM	PHl3 MFC set to  0.000000
12/16/2010	6:45:30 AM	SiCl4 MFC set to  0.000000
12/16/2010	6:45:30 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:45:31 AM	Tube furnace set to 1000
12/16/2010	7:05:31 AM	Helium valve closed
12/16/2010	7:05:31 AM	PH3 valve closed
12/16/2010	7:05:31 AM	Main Vac valve closed
12/16/2010	7:05:31 AM	Bypass valve closed
12/16/2010	7:05:31 AM	H2 valve opened
12/16/2010	7:05:31 AM	BCl3 valve opened
12/16/2010	7:05:31 AM	SiCl4 pre valve opened
12/16/2010	7:05:31 AM	SiCl4 post valve opened
12/16/2010	7:05:31 AM	Bubbler valve opened
12/16/2010	7:05:31 AM	Helium MFC set to  0.000000
12/16/2010	7:05:31 AM	H2 MFC set to  500.000000
12/16/2010	7:05:31 AM	BCl3 MFC set to  10.000000
12/16/2010	7:05:31 AM	PHl3 MFC set to  0.000000
12/16/2010	7:05:31 AM	SiCl4 MFC set to  50.000000
12/16/2010	7:05:31 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:05:31 AM	Tube furnace set to 1000
12/16/2010	7:17:31 AM	H2 valve closed
12/16/2010	7:17:31 AM	BCl3 valve closed
12/16/2010	7:17:31 AM	PH3 valve closed
12/16/2010	7:17:31 AM	SiCl4 pre valve closed
12/16/2010	7:17:31 AM	SiCl4 post valve closed
12/16/2010	7:17:31 AM	Main Vac valve closed
12/16/2010	7:17:31 AM	Bypass valve closed
12/16/2010	7:17:31 AM	Helium valve opened
12/16/2010	7:17:31 AM	Bubbler valve opened
12/16/2010	7:17:31 AM	Helium MFC set to  500.000000
12/16/2010	7:17:31 AM	H2 MFC set to  0.000000
12/16/2010	7:17:31 AM	BCl3 MFC set to  0.000000
12/16/2010	7:17:31 AM	PHl3 MFC set to  0.000000
12/16/2010	7:17:31 AM	SiCl4 MFC set to  0.000000
12/16/2010	7:17:31 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:17:31 AM	Tube furnace set to 0
12/16/2010	7:37:31 AM	Helium valve closed
12/16/2010	7:37:31 AM	H2 valve closed
12/16/2010	7:37:31 AM	BCl3 valve closed
12/16/2010	7:37:31 AM	PH3 valve closed
12/16/2010	7:37:31 AM	SiCl4 pre valve closed
12/16/2010	7:37:31 AM	SiCl4 post valve closed
12/16/2010	7:37:31 AM	Main Vac valve closed
12/16/2010	7:37:31 AM	Bypass valve closed
12/16/2010	7:37:31 AM	Bubbler valve closed
12/16/2010	7:37:31 AM	Helium MFC set to  0.000000
12/16/2010	7:37:31 AM	H2 MFC set to  0.000000
12/16/2010	7:37:31 AM	BCl3 MFC set to  0.000000
12/16/2010	7:37:31 AM	PHl3 MFC set to  0.000000
12/16/2010	7:37:31 AM	SiCl4 MFC set to  0.000000
12/16/2010	7:37:31 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:37:31 AM	Tube furnace set to 0
12/16/2010	7:37:31 AM	Run finished at 7:37 AM
12/16/2010	7:58:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	7:58:16 AM	Recipe started at 7:58 AM
12/16/2010	7:58:16 AM	H2 valve closed
12/16/2010	7:58:16 AM	BCl3 valve closed
12/16/2010	7:58:16 AM	PH3 valve closed
12/16/2010	7:58:16 AM	SiCl4 pre valve closed
12/16/2010	7:58:16 AM	SiCl4 post valve closed
12/16/2010	7:58:16 AM	Main Vac valve closed
12/16/2010	7:58:16 AM	Bypass valve closed
12/16/2010	7:58:16 AM	Bubbler valve closed
12/16/2010	7:58:16 AM	Helium valve opened
12/16/2010	7:58:16 AM	Helium MFC set to  500.000000
12/16/2010	7:58:16 AM	H2 MFC set to  0.000000
12/16/2010	7:58:16 AM	BCl3 MFC set to  0.000000
12/16/2010	7:58:16 AM	PHl3 MFC set to  0.000000
12/16/2010	7:58:16 AM	SiCl4 MFC set to  0.000000
12/16/2010	7:58:16 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:58:16 AM	Tube furnace set to 0
12/16/2010	7:58:21 AM	Helium valve closed
12/16/2010	7:58:21 AM	H2 valve closed
12/16/2010	7:58:21 AM	BCl3 valve closed
12/16/2010	7:58:21 AM	PH3 valve closed
12/16/2010	7:58:21 AM	SiCl4 pre valve closed
12/16/2010	7:58:21 AM	SiCl4 post valve closed
12/16/2010	7:58:21 AM	Main Vac valve closed
12/16/2010	7:58:21 AM	Bypass valve closed
12/16/2010	7:58:21 AM	Bubbler valve closed
12/16/2010	7:58:21 AM	Helium MFC set to  0.000000
12/16/2010	7:58:21 AM	H2 MFC set to  0.000000
12/16/2010	7:58:21 AM	BCl3 MFC set to  0.000000
12/16/2010	7:58:21 AM	PHl3 MFC set to  0.000000
12/16/2010	7:58:21 AM	SiCl4 MFC set to  0.000000
12/16/2010	7:58:21 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:58:21 AM	Tube furnace set to 0
12/16/2010	7:58:21 AM	Run finished at 7:58 AM
12/16/2010	7:58:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	8:00:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	8:00:20 AM	Recipe started at 8:00 AM
12/16/2010	8:00:20 AM	Helium valve closed
12/16/2010	8:00:20 AM	H2 valve closed
12/16/2010	8:00:20 AM	BCl3 valve closed
12/16/2010	8:00:20 AM	PH3 valve closed
12/16/2010	8:00:20 AM	SiCl4 pre valve closed
12/16/2010	8:00:20 AM	SiCl4 post valve closed
12/16/2010	8:00:20 AM	Main Vac valve closed
12/16/2010	8:00:20 AM	Bubbler valve closed
12/16/2010	8:00:20 AM	Bypass valve opened
12/16/2010	8:00:20 AM	Helium MFC set to  0.000000
12/16/2010	8:00:20 AM	H2 MFC set to  0.000000
12/16/2010	8:00:20 AM	BCl3 MFC set to  0.000000
12/16/2010	8:00:20 AM	PHl3 MFC set to  0.000000
12/16/2010	8:00:20 AM	SiCl4 MFC set to  0.000000
12/16/2010	8:00:20 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:00:20 AM	Tube furnace set to 0
12/16/2010	8:01:17 AM	Helium valve closed
12/16/2010	8:01:17 AM	H2 valve closed
12/16/2010	8:01:17 AM	BCl3 valve closed
12/16/2010	8:01:17 AM	PH3 valve closed
12/16/2010	8:01:17 AM	SiCl4 pre valve closed
12/16/2010	8:01:17 AM	SiCl4 post valve closed
12/16/2010	8:01:17 AM	Bubbler valve closed
12/16/2010	8:01:17 AM	Main Vac valve opened
12/16/2010	8:01:17 AM	Bypass valve opened
12/16/2010	8:01:17 AM	Helium MFC set to  0.000000
12/16/2010	8:01:17 AM	H2 MFC set to  0.000000
12/16/2010	8:01:17 AM	BCl3 MFC set to  0.000000
12/16/2010	8:01:17 AM	PHl3 MFC set to  0.000000
12/16/2010	8:01:17 AM	SiCl4 MFC set to  0.000000
12/16/2010	8:01:17 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:01:18 AM	Tube furnace set to 0
12/16/2010	8:01:18 AM	Run finished at 8:01 AM
12/16/2010	8:01:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:16:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	9:16:30 AM	Recipe started at 9:16 AM
12/16/2010	9:16:31 AM	H2 valve closed
12/16/2010	9:16:31 AM	BCl3 valve closed
12/16/2010	9:16:31 AM	PH3 valve closed
12/16/2010	9:16:31 AM	SiCl4 pre valve closed
12/16/2010	9:16:31 AM	SiCl4 post valve closed
12/16/2010	9:16:31 AM	Main Vac valve closed
12/16/2010	9:16:31 AM	Bypass valve closed
12/16/2010	9:16:31 AM	Bubbler valve closed
12/16/2010	9:16:31 AM	Helium valve opened
12/16/2010	9:16:31 AM	Helium MFC set to  500.000000
12/16/2010	9:16:31 AM	H2 MFC set to  0.000000
12/16/2010	9:16:31 AM	BCl3 MFC set to  0.000000
12/16/2010	9:16:31 AM	PHl3 MFC set to  0.000000
12/16/2010	9:16:31 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:16:31 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:16:31 AM	Tube furnace set to 0
12/16/2010	9:17:49 AM	Helium valve closed
12/16/2010	9:17:49 AM	H2 valve closed
12/16/2010	9:17:49 AM	BCl3 valve closed
12/16/2010	9:17:49 AM	PH3 valve closed
12/16/2010	9:17:49 AM	SiCl4 pre valve closed
12/16/2010	9:17:49 AM	SiCl4 post valve closed
12/16/2010	9:17:49 AM	Main Vac valve closed
12/16/2010	9:17:49 AM	Bypass valve closed
12/16/2010	9:17:49 AM	Bubbler valve closed
12/16/2010	9:17:49 AM	Helium MFC set to  0.000000
12/16/2010	9:17:49 AM	H2 MFC set to  0.000000
12/16/2010	9:17:49 AM	BCl3 MFC set to  0.000000
12/16/2010	9:17:49 AM	PHl3 MFC set to  0.000000
12/16/2010	9:17:49 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:17:49 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:17:49 AM	Tube furnace set to 0
12/16/2010	9:17:49 AM	Run finished at 9:17 AM
12/16/2010	9:17:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	9:30:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:30:19 AM	Recipe started at 9:30 AM
12/16/2010	9:30:19 AM	Helium valve closed
12/16/2010	9:30:19 AM	H2 valve closed
12/16/2010	9:30:19 AM	BCl3 valve closed
12/16/2010	9:30:19 AM	PH3 valve closed
12/16/2010	9:30:19 AM	SiCl4 pre valve closed
12/16/2010	9:30:19 AM	SiCl4 post valve closed
12/16/2010	9:30:19 AM	Main Vac valve closed
12/16/2010	9:30:19 AM	Bubbler valve closed
12/16/2010	9:30:19 AM	Bypass valve opened
12/16/2010	9:30:19 AM	Helium MFC set to  0.000000
12/16/2010	9:30:19 AM	H2 MFC set to  0.000000
12/16/2010	9:30:19 AM	BCl3 MFC set to  0.000000
12/16/2010	9:30:19 AM	PHl3 MFC set to  0.000000
12/16/2010	9:30:19 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:30:19 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:30:19 AM	Tube furnace set to 0
12/16/2010	9:31:16 AM	Helium valve closed
12/16/2010	9:31:16 AM	H2 valve closed
12/16/2010	9:31:16 AM	BCl3 valve closed
12/16/2010	9:31:16 AM	PH3 valve closed
12/16/2010	9:31:16 AM	SiCl4 pre valve closed
12/16/2010	9:31:16 AM	SiCl4 post valve closed
12/16/2010	9:31:16 AM	Bubbler valve closed
12/16/2010	9:31:16 AM	Main Vac valve opened
12/16/2010	9:31:16 AM	Bypass valve opened
12/16/2010	9:31:16 AM	Helium MFC set to  0.000000
12/16/2010	9:31:16 AM	H2 MFC set to  0.000000
12/16/2010	9:31:16 AM	BCl3 MFC set to  0.000000
12/16/2010	9:31:16 AM	PHl3 MFC set to  0.000000
12/16/2010	9:31:16 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:31:16 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:31:16 AM	Tube furnace set to 0
12/16/2010	9:31:16 AM	Run finished at 9:31 AM
12/16/2010	9:31:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:31:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:31:34 AM	Recipe started at 9:31 AM
12/16/2010	9:31:34 AM	Helium valve closed
12/16/2010	9:31:34 AM	H2 valve closed
12/16/2010	9:31:34 AM	BCl3 valve closed
12/16/2010	9:31:34 AM	PH3 valve closed
12/16/2010	9:31:34 AM	SiCl4 pre valve closed
12/16/2010	9:31:34 AM	SiCl4 post valve closed
12/16/2010	9:31:34 AM	Main Vac valve closed
12/16/2010	9:31:34 AM	Bubbler valve closed
12/16/2010	9:31:34 AM	Bypass valve opened
12/16/2010	9:31:34 AM	Helium MFC set to  0.000000
12/16/2010	9:31:34 AM	H2 MFC set to  0.000000
12/16/2010	9:31:34 AM	BCl3 MFC set to  0.000000
12/16/2010	9:31:34 AM	PHl3 MFC set to  0.000000
12/16/2010	9:31:34 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:31:34 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:31:34 AM	Tube furnace set to 0
12/16/2010	9:31:34 AM	Run aborted at 9:31 AM
12/16/2010	9:31:34 AM	Helium valve closed
12/16/2010	9:31:34 AM	H2 valve closed
12/16/2010	9:31:34 AM	BCl3 valve closed
12/16/2010	9:31:34 AM	PH3 valve closed
12/16/2010	9:31:34 AM	SiCl4 pre valve closed
12/16/2010	9:31:34 AM	SiCl4 post valve closed
12/16/2010	9:31:34 AM	Bypass valve closed
12/16/2010	9:31:34 AM	Main Vac valve closed
12/16/2010	9:31:34 AM	Bubbler valve closed
12/16/2010	9:31:34 AM	Helium MFC set to  0.000000
12/16/2010	9:31:34 AM	H2 MFC set to  0.000000
12/16/2010	9:31:34 AM	BCl3 MFC set to  0.000000
12/16/2010	9:31:34 AM	PHl3 MFC set to  0.000000
12/16/2010	9:31:34 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:31:34 AM	Tube furnace set to 0
12/16/2010	9:31:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:31:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:31:37 AM	Recipe started at 9:31 AM
12/16/2010	9:31:37 AM	Helium valve closed
12/16/2010	9:31:37 AM	H2 valve closed
12/16/2010	9:31:37 AM	BCl3 valve closed
12/16/2010	9:31:37 AM	PH3 valve closed
12/16/2010	9:31:37 AM	SiCl4 pre valve closed
12/16/2010	9:31:37 AM	SiCl4 post valve closed
12/16/2010	9:31:37 AM	Main Vac valve closed
12/16/2010	9:31:37 AM	Bubbler valve closed
12/16/2010	9:31:37 AM	Bypass valve opened
12/16/2010	9:31:37 AM	Helium MFC set to  0.000000
12/16/2010	9:31:37 AM	H2 MFC set to  0.000000
12/16/2010	9:31:37 AM	BCl3 MFC set to  0.000000
12/16/2010	9:31:37 AM	PHl3 MFC set to  0.000000
12/16/2010	9:31:37 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:31:37 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:31:37 AM	Tube furnace set to 0
12/16/2010	9:31:38 AM	Helium valve closed
12/16/2010	9:31:38 AM	H2 valve closed
12/16/2010	9:31:38 AM	BCl3 valve closed
12/16/2010	9:31:38 AM	PH3 valve closed
12/16/2010	9:31:38 AM	SiCl4 pre valve closed
12/16/2010	9:31:38 AM	SiCl4 post valve closed
12/16/2010	9:31:38 AM	Bubbler valve closed
12/16/2010	9:31:38 AM	Main Vac valve opened
12/16/2010	9:31:38 AM	Bypass valve opened
12/16/2010	9:31:38 AM	Helium MFC set to  0.000000
12/16/2010	9:31:38 AM	H2 MFC set to  0.000000
12/16/2010	9:31:38 AM	BCl3 MFC set to  0.000000
12/16/2010	9:31:38 AM	PHl3 MFC set to  0.000000
12/16/2010	9:31:38 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:31:38 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:31:38 AM	Tube furnace set to 0
12/16/2010	9:31:38 AM	Run finished at 9:31 AM
12/16/2010	9:31:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:32:10 AM	Bypass valve closed
12/16/2010	9:32:10 AM	Main Vac valve closed
12/16/2010	9:32:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:32:18 AM	Recipe started at 9:32 AM
12/16/2010	9:32:19 AM	Helium valve closed
12/16/2010	9:32:19 AM	H2 valve closed
12/16/2010	9:32:19 AM	BCl3 valve closed
12/16/2010	9:32:19 AM	PH3 valve closed
12/16/2010	9:32:19 AM	SiCl4 pre valve closed
12/16/2010	9:32:19 AM	SiCl4 post valve closed
12/16/2010	9:32:19 AM	Main Vac valve closed
12/16/2010	9:32:19 AM	Bubbler valve closed
12/16/2010	9:32:19 AM	Bypass valve opened
12/16/2010	9:32:19 AM	Helium MFC set to  0.000000
12/16/2010	9:32:19 AM	H2 MFC set to  0.000000
12/16/2010	9:32:19 AM	BCl3 MFC set to  0.000000
12/16/2010	9:32:19 AM	PHl3 MFC set to  0.000000
12/16/2010	9:32:19 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:32:19 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:32:19 AM	Tube furnace set to 0
12/16/2010	9:32:19 AM	Helium valve closed
12/16/2010	9:32:19 AM	H2 valve closed
12/16/2010	9:32:19 AM	BCl3 valve closed
12/16/2010	9:32:19 AM	PH3 valve closed
12/16/2010	9:32:19 AM	SiCl4 pre valve closed
12/16/2010	9:32:19 AM	SiCl4 post valve closed
12/16/2010	9:32:19 AM	Bubbler valve closed
12/16/2010	9:32:19 AM	Main Vac valve opened
12/16/2010	9:32:19 AM	Bypass valve opened
12/16/2010	9:32:19 AM	Helium MFC set to  0.000000
12/16/2010	9:32:19 AM	H2 MFC set to  0.000000
12/16/2010	9:32:19 AM	BCl3 MFC set to  0.000000
12/16/2010	9:32:19 AM	PHl3 MFC set to  0.000000
12/16/2010	9:32:19 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:32:19 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:32:19 AM	Tube furnace set to 0
12/16/2010	9:32:19 AM	Run finished at 9:32 AM
12/16/2010	9:32:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:33:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:34:09 AM	Recipe started at 9:34 AM
12/16/2010	9:34:09 AM	Helium valve closed
12/16/2010	9:34:09 AM	H2 valve closed
12/16/2010	9:34:09 AM	BCl3 valve closed
12/16/2010	9:34:09 AM	PH3 valve closed
12/16/2010	9:34:09 AM	SiCl4 pre valve closed
12/16/2010	9:34:09 AM	SiCl4 post valve closed
12/16/2010	9:34:09 AM	Main Vac valve closed
12/16/2010	9:34:09 AM	Bubbler valve closed
12/16/2010	9:34:09 AM	Bypass valve opened
12/16/2010	9:34:09 AM	Helium MFC set to  0.000000
12/16/2010	9:34:09 AM	H2 MFC set to  0.000000
12/16/2010	9:34:09 AM	BCl3 MFC set to  0.000000
12/16/2010	9:34:09 AM	PHl3 MFC set to  0.000000
12/16/2010	9:34:09 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:34:09 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:34:09 AM	Tube furnace set to 0
12/16/2010	9:34:09 AM	Helium valve closed
12/16/2010	9:34:09 AM	H2 valve closed
12/16/2010	9:34:09 AM	BCl3 valve closed
12/16/2010	9:34:09 AM	PH3 valve closed
12/16/2010	9:34:09 AM	SiCl4 pre valve closed
12/16/2010	9:34:09 AM	SiCl4 post valve closed
12/16/2010	9:34:09 AM	Bubbler valve closed
12/16/2010	9:34:09 AM	Main Vac valve opened
12/16/2010	9:34:09 AM	Bypass valve opened
12/16/2010	9:34:09 AM	Helium MFC set to  0.000000
12/16/2010	9:34:09 AM	H2 MFC set to  0.000000
12/16/2010	9:34:09 AM	BCl3 MFC set to  0.000000
12/16/2010	9:34:09 AM	PHl3 MFC set to  0.000000
12/16/2010	9:34:09 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:34:09 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:34:09 AM	Tube furnace set to 0
12/16/2010	9:35:09 AM	H2 valve closed
12/16/2010	9:35:09 AM	BCl3 valve closed
12/16/2010	9:35:09 AM	PH3 valve closed
12/16/2010	9:35:09 AM	SiCl4 pre valve closed
12/16/2010	9:35:09 AM	SiCl4 post valve closed
12/16/2010	9:35:09 AM	Bubbler valve closed
12/16/2010	9:35:09 AM	Helium valve opened
12/16/2010	9:35:09 AM	Main Vac valve opened
12/16/2010	9:35:09 AM	Bypass valve opened
12/16/2010	9:35:09 AM	Helium MFC set to  100.000000
12/16/2010	9:35:09 AM	H2 MFC set to  0.000000
12/16/2010	9:35:09 AM	BCl3 MFC set to  0.000000
12/16/2010	9:35:09 AM	PHl3 MFC set to  0.000000
12/16/2010	9:35:09 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:35:09 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:35:09 AM	Tube furnace set to 0
12/16/2010	9:36:10 AM	Helium valve closed
12/16/2010	9:36:10 AM	H2 valve closed
12/16/2010	9:36:10 AM	BCl3 valve closed
12/16/2010	9:36:10 AM	PH3 valve closed
12/16/2010	9:36:10 AM	SiCl4 pre valve closed
12/16/2010	9:36:10 AM	SiCl4 post valve closed
12/16/2010	9:36:10 AM	Bubbler valve closed
12/16/2010	9:36:10 AM	Main Vac valve opened
12/16/2010	9:36:10 AM	Bypass valve opened
12/16/2010	9:36:10 AM	Helium MFC set to  0.000000
12/16/2010	9:36:10 AM	H2 MFC set to  0.000000
12/16/2010	9:36:10 AM	BCl3 MFC set to  0.000000
12/16/2010	9:36:10 AM	PHl3 MFC set to  0.000000
12/16/2010	9:36:10 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:36:10 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:36:10 AM	Tube furnace set to 0
12/16/2010	9:37:10 AM	H2 valve closed
12/16/2010	9:37:10 AM	BCl3 valve closed
12/16/2010	9:37:10 AM	PH3 valve closed
12/16/2010	9:37:10 AM	SiCl4 pre valve closed
12/16/2010	9:37:10 AM	SiCl4 post valve closed
12/16/2010	9:37:10 AM	Bubbler valve closed
12/16/2010	9:37:10 AM	Helium valve opened
12/16/2010	9:37:10 AM	Main Vac valve opened
12/16/2010	9:37:10 AM	Bypass valve opened
12/16/2010	9:37:10 AM	Helium MFC set to  100.000000
12/16/2010	9:37:10 AM	H2 MFC set to  0.000000
12/16/2010	9:37:10 AM	BCl3 MFC set to  0.000000
12/16/2010	9:37:10 AM	PHl3 MFC set to  0.000000
12/16/2010	9:37:10 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:37:10 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:37:10 AM	Tube furnace set to 0
12/16/2010	9:38:10 AM	Helium valve closed
12/16/2010	9:38:10 AM	H2 valve closed
12/16/2010	9:38:10 AM	BCl3 valve closed
12/16/2010	9:38:10 AM	PH3 valve closed
12/16/2010	9:38:10 AM	SiCl4 pre valve closed
12/16/2010	9:38:10 AM	SiCl4 post valve closed
12/16/2010	9:38:10 AM	Bubbler valve closed
12/16/2010	9:38:10 AM	Main Vac valve opened
12/16/2010	9:38:10 AM	Bypass valve opened
12/16/2010	9:38:10 AM	Helium MFC set to  0.000000
12/16/2010	9:38:10 AM	H2 MFC set to  0.000000
12/16/2010	9:38:10 AM	BCl3 MFC set to  0.000000
12/16/2010	9:38:10 AM	PHl3 MFC set to  0.000000
12/16/2010	9:38:10 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:38:10 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:38:10 AM	Tube furnace set to 0
12/16/2010	9:39:10 AM	H2 valve closed
12/16/2010	9:39:10 AM	BCl3 valve closed
12/16/2010	9:39:10 AM	PH3 valve closed
12/16/2010	9:39:10 AM	SiCl4 pre valve closed
12/16/2010	9:39:10 AM	SiCl4 post valve closed
12/16/2010	9:39:10 AM	Bubbler valve closed
12/16/2010	9:39:10 AM	Helium valve opened
12/16/2010	9:39:10 AM	Main Vac valve opened
12/16/2010	9:39:10 AM	Bypass valve opened
12/16/2010	9:39:10 AM	Helium MFC set to  100.000000
12/16/2010	9:39:10 AM	H2 MFC set to  0.000000
12/16/2010	9:39:10 AM	BCl3 MFC set to  0.000000
12/16/2010	9:39:10 AM	PHl3 MFC set to  0.000000
12/16/2010	9:39:10 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:39:10 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:39:10 AM	Tube furnace set to 0
12/16/2010	9:40:10 AM	Helium valve closed
12/16/2010	9:40:10 AM	H2 valve closed
12/16/2010	9:40:10 AM	BCl3 valve closed
12/16/2010	9:40:10 AM	PH3 valve closed
12/16/2010	9:40:10 AM	SiCl4 pre valve closed
12/16/2010	9:40:10 AM	SiCl4 post valve closed
12/16/2010	9:40:10 AM	Bubbler valve closed
12/16/2010	9:40:10 AM	Main Vac valve opened
12/16/2010	9:40:10 AM	Bypass valve opened
12/16/2010	9:40:10 AM	Helium MFC set to  0.000000
12/16/2010	9:40:10 AM	H2 MFC set to  0.000000
12/16/2010	9:40:10 AM	BCl3 MFC set to  0.000000
12/16/2010	9:40:10 AM	PHl3 MFC set to  0.000000
12/16/2010	9:40:10 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:40:10 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:40:10 AM	Tube furnace set to 0
12/16/2010	9:41:10 AM	H2 valve closed
12/16/2010	9:41:10 AM	BCl3 valve closed
12/16/2010	9:41:10 AM	PH3 valve closed
12/16/2010	9:41:10 AM	SiCl4 pre valve closed
12/16/2010	9:41:10 AM	SiCl4 post valve closed
12/16/2010	9:41:10 AM	Bubbler valve closed
12/16/2010	9:41:10 AM	Helium valve opened
12/16/2010	9:41:10 AM	Main Vac valve opened
12/16/2010	9:41:10 AM	Bypass valve opened
12/16/2010	9:41:10 AM	Helium MFC set to  100.000000
12/16/2010	9:41:11 AM	H2 MFC set to  0.000000
12/16/2010	9:41:11 AM	BCl3 MFC set to  0.000000
12/16/2010	9:41:11 AM	PHl3 MFC set to  0.000000
12/16/2010	9:41:11 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:41:11 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:41:11 AM	Tube furnace set to 0
12/16/2010	9:42:11 AM	Helium valve closed
12/16/2010	9:42:11 AM	H2 valve closed
12/16/2010	9:42:11 AM	BCl3 valve closed
12/16/2010	9:42:11 AM	PH3 valve closed
12/16/2010	9:42:11 AM	SiCl4 pre valve closed
12/16/2010	9:42:11 AM	SiCl4 post valve closed
12/16/2010	9:42:11 AM	Bubbler valve closed
12/16/2010	9:42:11 AM	Main Vac valve opened
12/16/2010	9:42:11 AM	Bypass valve opened
12/16/2010	9:42:11 AM	Helium MFC set to  0.000000
12/16/2010	9:42:11 AM	H2 MFC set to  0.000000
12/16/2010	9:42:11 AM	BCl3 MFC set to  0.000000
12/16/2010	9:42:11 AM	PHl3 MFC set to  0.000000
12/16/2010	9:42:11 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:42:11 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:42:11 AM	Tube furnace set to 0
12/16/2010	9:43:11 AM	H2 valve closed
12/16/2010	9:43:11 AM	BCl3 valve closed
12/16/2010	9:43:11 AM	PH3 valve closed
12/16/2010	9:43:11 AM	SiCl4 pre valve closed
12/16/2010	9:43:11 AM	SiCl4 post valve closed
12/16/2010	9:43:11 AM	Bubbler valve closed
12/16/2010	9:43:11 AM	Helium valve opened
12/16/2010	9:43:11 AM	Main Vac valve opened
12/16/2010	9:43:11 AM	Bypass valve opened
12/16/2010	9:43:11 AM	Helium MFC set to  100.000000
12/16/2010	9:43:11 AM	H2 MFC set to  0.000000
12/16/2010	9:43:11 AM	BCl3 MFC set to  0.000000
12/16/2010	9:43:11 AM	PHl3 MFC set to  0.000000
12/16/2010	9:43:11 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:43:11 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:43:11 AM	Tube furnace set to 0
12/16/2010	9:44:11 AM	Helium valve closed
12/16/2010	9:44:11 AM	H2 valve closed
12/16/2010	9:44:11 AM	BCl3 valve closed
12/16/2010	9:44:11 AM	PH3 valve closed
12/16/2010	9:44:11 AM	SiCl4 pre valve closed
12/16/2010	9:44:11 AM	SiCl4 post valve closed
12/16/2010	9:44:11 AM	Bubbler valve closed
12/16/2010	9:44:11 AM	Main Vac valve opened
12/16/2010	9:44:11 AM	Bypass valve opened
12/16/2010	9:44:11 AM	Helium MFC set to  0.000000
12/16/2010	9:44:11 AM	H2 MFC set to  0.000000
12/16/2010	9:44:11 AM	BCl3 MFC set to  0.000000
12/16/2010	9:44:11 AM	PHl3 MFC set to  0.000000
12/16/2010	9:44:11 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:44:11 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:44:11 AM	Tube furnace set to 0
12/16/2010	9:45:11 AM	H2 valve closed
12/16/2010	9:45:11 AM	BCl3 valve closed
12/16/2010	9:45:11 AM	PH3 valve closed
12/16/2010	9:45:11 AM	SiCl4 pre valve closed
12/16/2010	9:45:11 AM	SiCl4 post valve closed
12/16/2010	9:45:11 AM	Bubbler valve closed
12/16/2010	9:45:11 AM	Helium valve opened
12/16/2010	9:45:11 AM	Main Vac valve opened
12/16/2010	9:45:11 AM	Bypass valve opened
12/16/2010	9:45:11 AM	Helium MFC set to  100.000000
12/16/2010	9:45:11 AM	H2 MFC set to  0.000000
12/16/2010	9:45:11 AM	BCl3 MFC set to  0.000000
12/16/2010	9:45:11 AM	PHl3 MFC set to  0.000000
12/16/2010	9:45:11 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:45:11 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:45:11 AM	Tube furnace set to 0
12/16/2010	9:46:11 AM	Helium valve closed
12/16/2010	9:46:11 AM	H2 valve closed
12/16/2010	9:46:11 AM	BCl3 valve closed
12/16/2010	9:46:11 AM	PH3 valve closed
12/16/2010	9:46:11 AM	SiCl4 pre valve closed
12/16/2010	9:46:11 AM	SiCl4 post valve closed
12/16/2010	9:46:11 AM	Bubbler valve closed
12/16/2010	9:46:11 AM	Main Vac valve opened
12/16/2010	9:46:11 AM	Bypass valve opened
12/16/2010	9:46:11 AM	Helium MFC set to  0.000000
12/16/2010	9:46:11 AM	H2 MFC set to  0.000000
12/16/2010	9:46:11 AM	BCl3 MFC set to  0.000000
12/16/2010	9:46:11 AM	PHl3 MFC set to  0.000000
12/16/2010	9:46:11 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:46:11 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:46:12 AM	Tube furnace set to 0
12/16/2010	9:47:12 AM	H2 valve closed
12/16/2010	9:47:12 AM	BCl3 valve closed
12/16/2010	9:47:12 AM	PH3 valve closed
12/16/2010	9:47:12 AM	SiCl4 pre valve closed
12/16/2010	9:47:12 AM	SiCl4 post valve closed
12/16/2010	9:47:12 AM	Bubbler valve closed
12/16/2010	9:47:12 AM	Helium valve opened
12/16/2010	9:47:12 AM	Main Vac valve opened
12/16/2010	9:47:12 AM	Bypass valve opened
12/16/2010	9:47:12 AM	Helium MFC set to  100.000000
12/16/2010	9:47:12 AM	H2 MFC set to  0.000000
12/16/2010	9:47:12 AM	BCl3 MFC set to  0.000000
12/16/2010	9:47:12 AM	PHl3 MFC set to  0.000000
12/16/2010	9:47:12 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:47:12 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:47:12 AM	Tube furnace set to 0
12/16/2010	9:48:12 AM	Helium valve closed
12/16/2010	9:48:12 AM	H2 valve closed
12/16/2010	9:48:12 AM	BCl3 valve closed
12/16/2010	9:48:12 AM	PH3 valve closed
12/16/2010	9:48:12 AM	SiCl4 pre valve closed
12/16/2010	9:48:12 AM	SiCl4 post valve closed
12/16/2010	9:48:12 AM	Bubbler valve closed
12/16/2010	9:48:12 AM	Main Vac valve opened
12/16/2010	9:48:12 AM	Bypass valve opened
12/16/2010	9:48:12 AM	Helium MFC set to  0.000000
12/16/2010	9:48:12 AM	H2 MFC set to  0.000000
12/16/2010	9:48:12 AM	BCl3 MFC set to  0.000000
12/16/2010	9:48:12 AM	PHl3 MFC set to  0.000000
12/16/2010	9:48:12 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:48:12 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:48:12 AM	Tube furnace set to 0
12/16/2010	9:49:12 AM	H2 valve closed
12/16/2010	9:49:12 AM	BCl3 valve closed
12/16/2010	9:49:12 AM	PH3 valve closed
12/16/2010	9:49:12 AM	SiCl4 pre valve closed
12/16/2010	9:49:12 AM	SiCl4 post valve closed
12/16/2010	9:49:12 AM	Bubbler valve closed
12/16/2010	9:49:12 AM	Helium valve opened
12/16/2010	9:49:12 AM	Main Vac valve opened
12/16/2010	9:49:12 AM	Bypass valve opened
12/16/2010	9:49:12 AM	Helium MFC set to  100.000000
12/16/2010	9:49:12 AM	H2 MFC set to  0.000000
12/16/2010	9:49:12 AM	BCl3 MFC set to  0.000000
12/16/2010	9:49:12 AM	PHl3 MFC set to  0.000000
12/16/2010	9:49:12 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:49:12 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:49:12 AM	Tube furnace set to 0
12/16/2010	9:50:12 AM	Helium valve closed
12/16/2010	9:50:12 AM	H2 valve closed
12/16/2010	9:50:12 AM	BCl3 valve closed
12/16/2010	9:50:12 AM	PH3 valve closed
12/16/2010	9:50:12 AM	SiCl4 pre valve closed
12/16/2010	9:50:12 AM	SiCl4 post valve closed
12/16/2010	9:50:12 AM	Bubbler valve closed
12/16/2010	9:50:12 AM	Main Vac valve opened
12/16/2010	9:50:12 AM	Bypass valve opened
12/16/2010	9:50:12 AM	Helium MFC set to  0.000000
12/16/2010	9:50:12 AM	H2 MFC set to  0.000000
12/16/2010	9:50:12 AM	BCl3 MFC set to  0.000000
12/16/2010	9:50:12 AM	PHl3 MFC set to  0.000000
12/16/2010	9:50:12 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:50:12 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:50:12 AM	Tube furnace set to 0
12/16/2010	9:50:50 AM	Run aborted at 9:50 AM
12/16/2010	9:50:50 AM	Helium valve closed
12/16/2010	9:50:50 AM	H2 valve closed
12/16/2010	9:50:50 AM	BCl3 valve closed
12/16/2010	9:50:50 AM	PH3 valve closed
12/16/2010	9:50:50 AM	SiCl4 pre valve closed
12/16/2010	9:50:50 AM	SiCl4 post valve closed
12/16/2010	9:50:50 AM	Bypass valve closed
12/16/2010	9:50:50 AM	Main Vac valve closed
12/16/2010	9:50:50 AM	Bubbler valve closed
12/16/2010	9:50:50 AM	Helium MFC set to  0.000000
12/16/2010	9:50:50 AM	H2 MFC set to  0.000000
12/16/2010	9:50:50 AM	BCl3 MFC set to  0.000000
12/16/2010	9:50:50 AM	PHl3 MFC set to  0.000000
12/16/2010	9:50:50 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:50:51 AM	Tube furnace set to 0
12/16/2010	9:50:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:50:53 AM	Bypass valve opened
12/16/2010	9:50:53 AM	Main Vac valve opened
12/16/2010	9:53:30 AM	Helium MFC set to  100.000000
12/16/2010	9:53:31 AM	Helium valve opened
12/16/2010	9:55:23 AM	Helium valve closed
12/16/2010	9:55:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:55:57 AM	Recipe started at 9:55 AM
12/16/2010	9:55:57 AM	Helium valve closed
12/16/2010	9:55:57 AM	H2 valve closed
12/16/2010	9:55:57 AM	BCl3 valve closed
12/16/2010	9:55:57 AM	PH3 valve closed
12/16/2010	9:55:57 AM	SiCl4 pre valve closed
12/16/2010	9:55:57 AM	SiCl4 post valve closed
12/16/2010	9:55:57 AM	Main Vac valve closed
12/16/2010	9:55:57 AM	Bubbler valve closed
12/16/2010	9:55:57 AM	Bypass valve opened
12/16/2010	9:55:57 AM	Helium MFC set to  0.000000
12/16/2010	9:55:57 AM	H2 MFC set to  0.000000
12/16/2010	9:55:57 AM	BCl3 MFC set to  0.000000
12/16/2010	9:55:57 AM	PHl3 MFC set to  0.000000
12/16/2010	9:55:57 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:55:57 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:55:57 AM	Tube furnace set to 0
12/16/2010	9:55:58 AM	Helium valve closed
12/16/2010	9:55:58 AM	H2 valve closed
12/16/2010	9:55:58 AM	BCl3 valve closed
12/16/2010	9:55:58 AM	PH3 valve closed
12/16/2010	9:55:58 AM	SiCl4 pre valve closed
12/16/2010	9:55:58 AM	SiCl4 post valve closed
12/16/2010	9:55:58 AM	Bubbler valve closed
12/16/2010	9:55:58 AM	Main Vac valve opened
12/16/2010	9:55:58 AM	Bypass valve opened
12/16/2010	9:55:58 AM	Helium MFC set to  0.000000
12/16/2010	9:55:58 AM	H2 MFC set to  0.000000
12/16/2010	9:55:58 AM	BCl3 MFC set to  0.000000
12/16/2010	9:55:58 AM	PHl3 MFC set to  0.000000
12/16/2010	9:55:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:55:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:55:58 AM	Tube furnace set to 0
12/16/2010	9:56:58 AM	H2 valve closed
12/16/2010	9:56:58 AM	BCl3 valve closed
12/16/2010	9:56:58 AM	PH3 valve closed
12/16/2010	9:56:58 AM	SiCl4 pre valve closed
12/16/2010	9:56:58 AM	SiCl4 post valve closed
12/16/2010	9:56:58 AM	Bubbler valve closed
12/16/2010	9:56:58 AM	Helium valve opened
12/16/2010	9:56:58 AM	Main Vac valve opened
12/16/2010	9:56:58 AM	Bypass valve opened
12/16/2010	9:56:58 AM	Helium MFC set to  100.000000
12/16/2010	9:56:58 AM	H2 MFC set to  0.000000
12/16/2010	9:56:58 AM	BCl3 MFC set to  0.000000
12/16/2010	9:56:58 AM	PHl3 MFC set to  0.000000
12/16/2010	9:56:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:56:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:56:58 AM	Tube furnace set to 0
12/16/2010	9:57:58 AM	Helium valve closed
12/16/2010	9:57:58 AM	H2 valve closed
12/16/2010	9:57:58 AM	BCl3 valve closed
12/16/2010	9:57:58 AM	PH3 valve closed
12/16/2010	9:57:58 AM	SiCl4 pre valve closed
12/16/2010	9:57:58 AM	SiCl4 post valve closed
12/16/2010	9:57:58 AM	Bubbler valve closed
12/16/2010	9:57:58 AM	Main Vac valve opened
12/16/2010	9:57:58 AM	Bypass valve opened
12/16/2010	9:57:58 AM	Helium MFC set to  0.000000
12/16/2010	9:57:58 AM	H2 MFC set to  0.000000
12/16/2010	9:57:58 AM	BCl3 MFC set to  0.000000
12/16/2010	9:57:58 AM	PHl3 MFC set to  0.000000
12/16/2010	9:57:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:57:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:57:58 AM	Tube furnace set to 0
12/16/2010	9:58:58 AM	H2 valve closed
12/16/2010	9:58:58 AM	BCl3 valve closed
12/16/2010	9:58:58 AM	PH3 valve closed
12/16/2010	9:58:58 AM	SiCl4 pre valve closed
12/16/2010	9:58:58 AM	SiCl4 post valve closed
12/16/2010	9:58:58 AM	Bubbler valve closed
12/16/2010	9:58:58 AM	Helium valve opened
12/16/2010	9:58:58 AM	Main Vac valve opened
12/16/2010	9:58:58 AM	Bypass valve opened
12/16/2010	9:58:58 AM	Helium MFC set to  100.000000
12/16/2010	9:58:58 AM	H2 MFC set to  0.000000
12/16/2010	9:58:58 AM	BCl3 MFC set to  0.000000
12/16/2010	9:58:58 AM	PHl3 MFC set to  0.000000
12/16/2010	9:58:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:58:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:58:58 AM	Tube furnace set to 0
12/16/2010	9:59:58 AM	Helium valve closed
12/16/2010	9:59:58 AM	H2 valve closed
12/16/2010	9:59:58 AM	BCl3 valve closed
12/16/2010	9:59:58 AM	PH3 valve closed
12/16/2010	9:59:58 AM	SiCl4 pre valve closed
12/16/2010	9:59:58 AM	SiCl4 post valve closed
12/16/2010	9:59:58 AM	Bubbler valve closed
12/16/2010	9:59:58 AM	Main Vac valve opened
12/16/2010	9:59:58 AM	Bypass valve opened
12/16/2010	9:59:58 AM	Helium MFC set to  0.000000
12/16/2010	9:59:58 AM	H2 MFC set to  0.000000
12/16/2010	9:59:58 AM	BCl3 MFC set to  0.000000
12/16/2010	9:59:58 AM	PHl3 MFC set to  0.000000
12/16/2010	9:59:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	9:59:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:59:58 AM	Tube furnace set to 0
12/16/2010	10:00:59 AM	H2 valve closed
12/16/2010	10:00:59 AM	BCl3 valve closed
12/16/2010	10:00:59 AM	PH3 valve closed
12/16/2010	10:00:59 AM	SiCl4 pre valve closed
12/16/2010	10:00:59 AM	SiCl4 post valve closed
12/16/2010	10:00:59 AM	Bubbler valve closed
12/16/2010	10:00:59 AM	Helium valve opened
12/16/2010	10:00:59 AM	Main Vac valve opened
12/16/2010	10:00:59 AM	Bypass valve opened
12/16/2010	10:00:59 AM	Helium MFC set to  100.000000
12/16/2010	10:00:59 AM	H2 MFC set to  0.000000
12/16/2010	10:00:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:00:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:00:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:00:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:00:59 AM	Tube furnace set to 0
12/16/2010	10:01:59 AM	Helium valve closed
12/16/2010	10:01:59 AM	H2 valve closed
12/16/2010	10:01:59 AM	BCl3 valve closed
12/16/2010	10:01:59 AM	PH3 valve closed
12/16/2010	10:01:59 AM	SiCl4 pre valve closed
12/16/2010	10:01:59 AM	SiCl4 post valve closed
12/16/2010	10:01:59 AM	Bubbler valve closed
12/16/2010	10:01:59 AM	Main Vac valve opened
12/16/2010	10:01:59 AM	Bypass valve opened
12/16/2010	10:01:59 AM	Helium MFC set to  0.000000
12/16/2010	10:01:59 AM	H2 MFC set to  0.000000
12/16/2010	10:01:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:01:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:01:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:01:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:01:59 AM	Tube furnace set to 0
12/16/2010	10:02:59 AM	H2 valve closed
12/16/2010	10:02:59 AM	BCl3 valve closed
12/16/2010	10:02:59 AM	PH3 valve closed
12/16/2010	10:02:59 AM	SiCl4 pre valve closed
12/16/2010	10:02:59 AM	SiCl4 post valve closed
12/16/2010	10:02:59 AM	Bubbler valve closed
12/16/2010	10:02:59 AM	Helium valve opened
12/16/2010	10:02:59 AM	Main Vac valve opened
12/16/2010	10:02:59 AM	Bypass valve opened
12/16/2010	10:02:59 AM	Helium MFC set to  100.000000
12/16/2010	10:02:59 AM	H2 MFC set to  0.000000
12/16/2010	10:02:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:02:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:02:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:02:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:02:59 AM	Tube furnace set to 0
12/16/2010	10:03:59 AM	Helium valve closed
12/16/2010	10:03:59 AM	H2 valve closed
12/16/2010	10:03:59 AM	BCl3 valve closed
12/16/2010	10:03:59 AM	PH3 valve closed
12/16/2010	10:03:59 AM	SiCl4 pre valve closed
12/16/2010	10:03:59 AM	SiCl4 post valve closed
12/16/2010	10:03:59 AM	Bubbler valve closed
12/16/2010	10:03:59 AM	Main Vac valve opened
12/16/2010	10:03:59 AM	Bypass valve opened
12/16/2010	10:03:59 AM	Helium MFC set to  0.000000
12/16/2010	10:03:59 AM	H2 MFC set to  0.000000
12/16/2010	10:03:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:03:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:03:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:03:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:03:59 AM	Tube furnace set to 0
12/16/2010	10:04:59 AM	H2 valve closed
12/16/2010	10:04:59 AM	BCl3 valve closed
12/16/2010	10:04:59 AM	PH3 valve closed
12/16/2010	10:04:59 AM	SiCl4 pre valve closed
12/16/2010	10:04:59 AM	SiCl4 post valve closed
12/16/2010	10:04:59 AM	Bubbler valve closed
12/16/2010	10:04:59 AM	Helium valve opened
12/16/2010	10:04:59 AM	Main Vac valve opened
12/16/2010	10:04:59 AM	Bypass valve opened
12/16/2010	10:04:59 AM	Helium MFC set to  100.000000
12/16/2010	10:04:59 AM	H2 MFC set to  0.000000
12/16/2010	10:04:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:04:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:04:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:04:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:04:59 AM	Tube furnace set to 0
12/16/2010	10:05:59 AM	Helium valve closed
12/16/2010	10:05:59 AM	H2 valve closed
12/16/2010	10:05:59 AM	BCl3 valve closed
12/16/2010	10:05:59 AM	PH3 valve closed
12/16/2010	10:05:59 AM	SiCl4 pre valve closed
12/16/2010	10:05:59 AM	SiCl4 post valve closed
12/16/2010	10:05:59 AM	Bubbler valve closed
12/16/2010	10:05:59 AM	Main Vac valve opened
12/16/2010	10:05:59 AM	Bypass valve opened
12/16/2010	10:05:59 AM	Helium MFC set to  0.000000
12/16/2010	10:05:59 AM	H2 MFC set to  0.000000
12/16/2010	10:05:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:05:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:06:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:06:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:06:00 AM	Tube furnace set to 0
12/16/2010	10:06:06 AM	Run aborted at 10:06 AM
12/16/2010	10:06:06 AM	Helium valve closed
12/16/2010	10:06:06 AM	H2 valve closed
12/16/2010	10:06:06 AM	BCl3 valve closed
12/16/2010	10:06:06 AM	PH3 valve closed
12/16/2010	10:06:06 AM	SiCl4 pre valve closed
12/16/2010	10:06:06 AM	SiCl4 post valve closed
12/16/2010	10:06:06 AM	Bypass valve closed
12/16/2010	10:06:06 AM	Main Vac valve closed
12/16/2010	10:06:06 AM	Bubbler valve closed
12/16/2010	10:06:06 AM	Helium MFC set to  0.000000
12/16/2010	10:06:06 AM	H2 MFC set to  0.000000
12/16/2010	10:06:06 AM	BCl3 MFC set to  0.000000
12/16/2010	10:06:06 AM	PHl3 MFC set to  0.000000
12/16/2010	10:06:06 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:06:07 AM	Tube furnace set to 0
12/16/2010	10:06:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:06:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:06:08 AM	Recipe started at 10:06 AM
12/16/2010	10:06:08 AM	Helium valve closed
12/16/2010	10:06:08 AM	H2 valve closed
12/16/2010	10:06:08 AM	BCl3 valve closed
12/16/2010	10:06:08 AM	PH3 valve closed
12/16/2010	10:06:08 AM	SiCl4 pre valve closed
12/16/2010	10:06:08 AM	SiCl4 post valve closed
12/16/2010	10:06:08 AM	Main Vac valve closed
12/16/2010	10:06:08 AM	Bubbler valve closed
12/16/2010	10:06:08 AM	Bypass valve opened
12/16/2010	10:06:08 AM	Helium MFC set to  0.000000
12/16/2010	10:06:08 AM	H2 MFC set to  0.000000
12/16/2010	10:06:08 AM	BCl3 MFC set to  0.000000
12/16/2010	10:06:08 AM	PHl3 MFC set to  0.000000
12/16/2010	10:06:08 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:06:08 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:06:08 AM	Tube furnace set to 0
12/16/2010	10:06:08 AM	Helium valve closed
12/16/2010	10:06:08 AM	H2 valve closed
12/16/2010	10:06:08 AM	BCl3 valve closed
12/16/2010	10:06:08 AM	PH3 valve closed
12/16/2010	10:06:08 AM	SiCl4 pre valve closed
12/16/2010	10:06:08 AM	SiCl4 post valve closed
12/16/2010	10:06:08 AM	Bubbler valve closed
12/16/2010	10:06:08 AM	Main Vac valve opened
12/16/2010	10:06:08 AM	Bypass valve opened
12/16/2010	10:06:08 AM	Helium MFC set to  0.000000
12/16/2010	10:06:08 AM	H2 MFC set to  0.000000
12/16/2010	10:06:08 AM	BCl3 MFC set to  0.000000
12/16/2010	10:06:08 AM	PHl3 MFC set to  0.000000
12/16/2010	10:06:08 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:06:08 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:06:08 AM	Tube furnace set to 0
12/16/2010	10:06:09 AM	Run finished at 10:06 AM
12/16/2010	10:06:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:06:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:06:56 AM	Recipe started at 10:06 AM
12/16/2010	10:06:56 AM	Helium valve closed
12/16/2010	10:06:56 AM	H2 valve closed
12/16/2010	10:06:56 AM	BCl3 valve closed
12/16/2010	10:06:56 AM	PH3 valve closed
12/16/2010	10:06:56 AM	SiCl4 pre valve closed
12/16/2010	10:06:56 AM	SiCl4 post valve closed
12/16/2010	10:06:56 AM	Main Vac valve closed
12/16/2010	10:06:56 AM	Bubbler valve closed
12/16/2010	10:06:56 AM	Bypass valve opened
12/16/2010	10:06:56 AM	Helium MFC set to  0.000000
12/16/2010	10:06:56 AM	H2 MFC set to  0.000000
12/16/2010	10:06:56 AM	BCl3 MFC set to  0.000000
12/16/2010	10:06:56 AM	PHl3 MFC set to  0.000000
12/16/2010	10:06:56 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:06:56 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:06:56 AM	Tube furnace set to 0
12/16/2010	10:06:57 AM	Helium valve closed
12/16/2010	10:06:57 AM	H2 valve closed
12/16/2010	10:06:57 AM	BCl3 valve closed
12/16/2010	10:06:57 AM	PH3 valve closed
12/16/2010	10:06:57 AM	SiCl4 pre valve closed
12/16/2010	10:06:57 AM	SiCl4 post valve closed
12/16/2010	10:06:57 AM	Bubbler valve closed
12/16/2010	10:06:57 AM	Main Vac valve opened
12/16/2010	10:06:57 AM	Bypass valve opened
12/16/2010	10:06:57 AM	Helium MFC set to  0.000000
12/16/2010	10:06:57 AM	H2 MFC set to  0.000000
12/16/2010	10:06:57 AM	BCl3 MFC set to  0.000000
12/16/2010	10:06:57 AM	PHl3 MFC set to  0.000000
12/16/2010	10:06:57 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:06:57 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:06:57 AM	Tube furnace set to 0
12/16/2010	10:07:57 AM	H2 valve closed
12/16/2010	10:07:57 AM	BCl3 valve closed
12/16/2010	10:07:57 AM	PH3 valve closed
12/16/2010	10:07:57 AM	SiCl4 pre valve closed
12/16/2010	10:07:57 AM	SiCl4 post valve closed
12/16/2010	10:07:57 AM	Bubbler valve closed
12/16/2010	10:07:57 AM	Helium valve opened
12/16/2010	10:07:57 AM	Main Vac valve opened
12/16/2010	10:07:57 AM	Bypass valve opened
12/16/2010	10:07:57 AM	Helium MFC set to  100.000000
12/16/2010	10:07:57 AM	H2 MFC set to  0.000000
12/16/2010	10:07:57 AM	BCl3 MFC set to  0.000000
12/16/2010	10:07:57 AM	PHl3 MFC set to  0.000000
12/16/2010	10:07:57 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:07:57 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:07:57 AM	Tube furnace set to 0
12/16/2010	10:08:57 AM	Helium valve closed
12/16/2010	10:08:57 AM	H2 valve closed
12/16/2010	10:08:57 AM	BCl3 valve closed
12/16/2010	10:08:57 AM	PH3 valve closed
12/16/2010	10:08:57 AM	SiCl4 pre valve closed
12/16/2010	10:08:57 AM	SiCl4 post valve closed
12/16/2010	10:08:57 AM	Bubbler valve closed
12/16/2010	10:08:57 AM	Main Vac valve opened
12/16/2010	10:08:57 AM	Bypass valve opened
12/16/2010	10:08:57 AM	Helium MFC set to  0.000000
12/16/2010	10:08:57 AM	H2 MFC set to  0.000000
12/16/2010	10:08:57 AM	BCl3 MFC set to  0.000000
12/16/2010	10:08:57 AM	PHl3 MFC set to  0.000000
12/16/2010	10:08:57 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:08:57 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:08:57 AM	Tube furnace set to 0
12/16/2010	10:09:57 AM	H2 valve closed
12/16/2010	10:09:57 AM	BCl3 valve closed
12/16/2010	10:09:57 AM	PH3 valve closed
12/16/2010	10:09:57 AM	SiCl4 pre valve closed
12/16/2010	10:09:57 AM	SiCl4 post valve closed
12/16/2010	10:09:57 AM	Bubbler valve closed
12/16/2010	10:09:57 AM	Helium valve opened
12/16/2010	10:09:57 AM	Main Vac valve opened
12/16/2010	10:09:57 AM	Bypass valve opened
12/16/2010	10:09:57 AM	Helium MFC set to  100.000000
12/16/2010	10:09:57 AM	H2 MFC set to  0.000000
12/16/2010	10:09:57 AM	BCl3 MFC set to  0.000000
12/16/2010	10:09:57 AM	PHl3 MFC set to  0.000000
12/16/2010	10:09:57 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:09:57 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:09:57 AM	Tube furnace set to 0
12/16/2010	10:10:57 AM	Helium valve closed
12/16/2010	10:10:57 AM	H2 valve closed
12/16/2010	10:10:57 AM	BCl3 valve closed
12/16/2010	10:10:57 AM	PH3 valve closed
12/16/2010	10:10:57 AM	SiCl4 pre valve closed
12/16/2010	10:10:57 AM	SiCl4 post valve closed
12/16/2010	10:10:57 AM	Bubbler valve closed
12/16/2010	10:10:57 AM	Main Vac valve opened
12/16/2010	10:10:57 AM	Bypass valve opened
12/16/2010	10:10:57 AM	Helium MFC set to  0.000000
12/16/2010	10:10:57 AM	H2 MFC set to  0.000000
12/16/2010	10:10:57 AM	BCl3 MFC set to  0.000000
12/16/2010	10:10:57 AM	PHl3 MFC set to  0.000000
12/16/2010	10:10:57 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:10:57 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:10:58 AM	Tube furnace set to 0
12/16/2010	10:11:58 AM	H2 valve closed
12/16/2010	10:11:58 AM	BCl3 valve closed
12/16/2010	10:11:58 AM	PH3 valve closed
12/16/2010	10:11:58 AM	SiCl4 pre valve closed
12/16/2010	10:11:58 AM	SiCl4 post valve closed
12/16/2010	10:11:58 AM	Bubbler valve closed
12/16/2010	10:11:58 AM	Helium valve opened
12/16/2010	10:11:58 AM	Main Vac valve opened
12/16/2010	10:11:58 AM	Bypass valve opened
12/16/2010	10:11:58 AM	Helium MFC set to  100.000000
12/16/2010	10:11:58 AM	H2 MFC set to  0.000000
12/16/2010	10:11:58 AM	BCl3 MFC set to  0.000000
12/16/2010	10:11:58 AM	PHl3 MFC set to  0.000000
12/16/2010	10:11:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:11:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:11:58 AM	Tube furnace set to 0
12/16/2010	10:12:58 AM	Helium valve closed
12/16/2010	10:12:58 AM	H2 valve closed
12/16/2010	10:12:58 AM	BCl3 valve closed
12/16/2010	10:12:58 AM	PH3 valve closed
12/16/2010	10:12:58 AM	SiCl4 pre valve closed
12/16/2010	10:12:58 AM	SiCl4 post valve closed
12/16/2010	10:12:58 AM	Bubbler valve closed
12/16/2010	10:12:58 AM	Main Vac valve opened
12/16/2010	10:12:58 AM	Bypass valve opened
12/16/2010	10:12:58 AM	Helium MFC set to  0.000000
12/16/2010	10:12:58 AM	H2 MFC set to  0.000000
12/16/2010	10:12:58 AM	BCl3 MFC set to  0.000000
12/16/2010	10:12:58 AM	PHl3 MFC set to  0.000000
12/16/2010	10:12:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:12:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:12:58 AM	Tube furnace set to 0
12/16/2010	10:13:58 AM	H2 valve closed
12/16/2010	10:13:58 AM	BCl3 valve closed
12/16/2010	10:13:58 AM	PH3 valve closed
12/16/2010	10:13:58 AM	SiCl4 pre valve closed
12/16/2010	10:13:58 AM	SiCl4 post valve closed
12/16/2010	10:13:58 AM	Bubbler valve closed
12/16/2010	10:13:58 AM	Helium valve opened
12/16/2010	10:13:58 AM	Main Vac valve opened
12/16/2010	10:13:58 AM	Bypass valve opened
12/16/2010	10:13:58 AM	Helium MFC set to  100.000000
12/16/2010	10:13:58 AM	H2 MFC set to  0.000000
12/16/2010	10:13:58 AM	BCl3 MFC set to  0.000000
12/16/2010	10:13:58 AM	PHl3 MFC set to  0.000000
12/16/2010	10:13:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:13:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:13:58 AM	Tube furnace set to 0
12/16/2010	10:14:58 AM	Helium valve closed
12/16/2010	10:14:58 AM	H2 valve closed
12/16/2010	10:14:58 AM	BCl3 valve closed
12/16/2010	10:14:58 AM	PH3 valve closed
12/16/2010	10:14:58 AM	SiCl4 pre valve closed
12/16/2010	10:14:58 AM	SiCl4 post valve closed
12/16/2010	10:14:58 AM	Bubbler valve closed
12/16/2010	10:14:58 AM	Main Vac valve opened
12/16/2010	10:14:58 AM	Bypass valve opened
12/16/2010	10:14:58 AM	Helium MFC set to  0.000000
12/16/2010	10:14:58 AM	H2 MFC set to  0.000000
12/16/2010	10:14:58 AM	BCl3 MFC set to  0.000000
12/16/2010	10:14:58 AM	PHl3 MFC set to  0.000000
12/16/2010	10:14:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:14:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:14:58 AM	Tube furnace set to 0
12/16/2010	10:15:58 AM	H2 valve closed
12/16/2010	10:15:58 AM	BCl3 valve closed
12/16/2010	10:15:58 AM	PH3 valve closed
12/16/2010	10:15:58 AM	SiCl4 pre valve closed
12/16/2010	10:15:58 AM	SiCl4 post valve closed
12/16/2010	10:15:58 AM	Bubbler valve closed
12/16/2010	10:15:58 AM	Helium valve opened
12/16/2010	10:15:58 AM	Main Vac valve opened
12/16/2010	10:15:58 AM	Bypass valve opened
12/16/2010	10:15:58 AM	Helium MFC set to  100.000000
12/16/2010	10:15:58 AM	H2 MFC set to  0.000000
12/16/2010	10:15:58 AM	BCl3 MFC set to  0.000000
12/16/2010	10:15:58 AM	PHl3 MFC set to  0.000000
12/16/2010	10:15:58 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:15:58 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:15:59 AM	Tube furnace set to 0
12/16/2010	10:16:59 AM	Helium valve closed
12/16/2010	10:16:59 AM	H2 valve closed
12/16/2010	10:16:59 AM	BCl3 valve closed
12/16/2010	10:16:59 AM	PH3 valve closed
12/16/2010	10:16:59 AM	SiCl4 pre valve closed
12/16/2010	10:16:59 AM	SiCl4 post valve closed
12/16/2010	10:16:59 AM	Bubbler valve closed
12/16/2010	10:16:59 AM	Main Vac valve opened
12/16/2010	10:16:59 AM	Bypass valve opened
12/16/2010	10:16:59 AM	Helium MFC set to  0.000000
12/16/2010	10:16:59 AM	H2 MFC set to  0.000000
12/16/2010	10:16:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:16:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:16:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:16:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:16:59 AM	Tube furnace set to 0
12/16/2010	10:17:59 AM	H2 valve closed
12/16/2010	10:17:59 AM	BCl3 valve closed
12/16/2010	10:17:59 AM	PH3 valve closed
12/16/2010	10:17:59 AM	SiCl4 pre valve closed
12/16/2010	10:17:59 AM	SiCl4 post valve closed
12/16/2010	10:17:59 AM	Bubbler valve closed
12/16/2010	10:17:59 AM	Helium valve opened
12/16/2010	10:17:59 AM	Main Vac valve opened
12/16/2010	10:17:59 AM	Bypass valve opened
12/16/2010	10:17:59 AM	Helium MFC set to  100.000000
12/16/2010	10:17:59 AM	H2 MFC set to  0.000000
12/16/2010	10:17:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:17:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:17:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:17:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:17:59 AM	Tube furnace set to 0
12/16/2010	10:18:59 AM	Helium valve closed
12/16/2010	10:18:59 AM	H2 valve closed
12/16/2010	10:18:59 AM	BCl3 valve closed
12/16/2010	10:18:59 AM	PH3 valve closed
12/16/2010	10:18:59 AM	SiCl4 pre valve closed
12/16/2010	10:18:59 AM	SiCl4 post valve closed
12/16/2010	10:18:59 AM	Bubbler valve closed
12/16/2010	10:18:59 AM	Main Vac valve opened
12/16/2010	10:18:59 AM	Bypass valve opened
12/16/2010	10:18:59 AM	Helium MFC set to  0.000000
12/16/2010	10:18:59 AM	H2 MFC set to  0.000000
12/16/2010	10:18:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:18:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:18:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:18:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:18:59 AM	Tube furnace set to 0
12/16/2010	10:19:59 AM	H2 valve closed
12/16/2010	10:19:59 AM	BCl3 valve closed
12/16/2010	10:19:59 AM	PH3 valve closed
12/16/2010	10:19:59 AM	SiCl4 pre valve closed
12/16/2010	10:19:59 AM	SiCl4 post valve closed
12/16/2010	10:19:59 AM	Bubbler valve closed
12/16/2010	10:19:59 AM	Helium valve opened
12/16/2010	10:19:59 AM	Main Vac valve opened
12/16/2010	10:19:59 AM	Bypass valve opened
12/16/2010	10:19:59 AM	Helium MFC set to  100.000000
12/16/2010	10:19:59 AM	H2 MFC set to  0.000000
12/16/2010	10:19:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:19:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:19:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:19:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:19:59 AM	Tube furnace set to 0
12/16/2010	10:20:59 AM	Helium valve closed
12/16/2010	10:20:59 AM	H2 valve closed
12/16/2010	10:20:59 AM	BCl3 valve closed
12/16/2010	10:20:59 AM	PH3 valve closed
12/16/2010	10:20:59 AM	SiCl4 pre valve closed
12/16/2010	10:20:59 AM	SiCl4 post valve closed
12/16/2010	10:20:59 AM	Bubbler valve closed
12/16/2010	10:20:59 AM	Main Vac valve opened
12/16/2010	10:20:59 AM	Bypass valve opened
12/16/2010	10:20:59 AM	Helium MFC set to  0.000000
12/16/2010	10:20:59 AM	H2 MFC set to  0.000000
12/16/2010	10:20:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:20:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:20:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:20:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:21:00 AM	Tube furnace set to 0
12/16/2010	10:22:00 AM	H2 valve closed
12/16/2010	10:22:00 AM	BCl3 valve closed
12/16/2010	10:22:00 AM	PH3 valve closed
12/16/2010	10:22:00 AM	SiCl4 pre valve closed
12/16/2010	10:22:00 AM	SiCl4 post valve closed
12/16/2010	10:22:00 AM	Bubbler valve closed
12/16/2010	10:22:00 AM	Helium valve opened
12/16/2010	10:22:00 AM	Main Vac valve opened
12/16/2010	10:22:00 AM	Bypass valve opened
12/16/2010	10:22:00 AM	Helium MFC set to  100.000000
12/16/2010	10:22:00 AM	H2 MFC set to  0.000000
12/16/2010	10:22:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:22:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:22:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:22:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:22:00 AM	Tube furnace set to 0
12/16/2010	10:23:00 AM	Helium valve closed
12/16/2010	10:23:00 AM	H2 valve closed
12/16/2010	10:23:00 AM	BCl3 valve closed
12/16/2010	10:23:00 AM	PH3 valve closed
12/16/2010	10:23:00 AM	SiCl4 pre valve closed
12/16/2010	10:23:00 AM	SiCl4 post valve closed
12/16/2010	10:23:00 AM	Bubbler valve closed
12/16/2010	10:23:00 AM	Main Vac valve opened
12/16/2010	10:23:00 AM	Bypass valve opened
12/16/2010	10:23:00 AM	Helium MFC set to  0.000000
12/16/2010	10:23:00 AM	H2 MFC set to  0.000000
12/16/2010	10:23:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:23:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:23:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:23:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:23:00 AM	Tube furnace set to 0
12/16/2010	10:24:00 AM	H2 valve closed
12/16/2010	10:24:00 AM	BCl3 valve closed
12/16/2010	10:24:00 AM	PH3 valve closed
12/16/2010	10:24:00 AM	SiCl4 pre valve closed
12/16/2010	10:24:00 AM	SiCl4 post valve closed
12/16/2010	10:24:00 AM	Bubbler valve closed
12/16/2010	10:24:00 AM	Helium valve opened
12/16/2010	10:24:00 AM	Main Vac valve opened
12/16/2010	10:24:00 AM	Bypass valve opened
12/16/2010	10:24:00 AM	Helium MFC set to  100.000000
12/16/2010	10:24:00 AM	H2 MFC set to  0.000000
12/16/2010	10:24:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:24:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:24:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:24:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:24:00 AM	Tube furnace set to 0
12/16/2010	10:25:00 AM	Helium valve closed
12/16/2010	10:25:00 AM	H2 valve closed
12/16/2010	10:25:00 AM	BCl3 valve closed
12/16/2010	10:25:00 AM	PH3 valve closed
12/16/2010	10:25:00 AM	SiCl4 pre valve closed
12/16/2010	10:25:00 AM	SiCl4 post valve closed
12/16/2010	10:25:00 AM	Bubbler valve closed
12/16/2010	10:25:00 AM	Main Vac valve opened
12/16/2010	10:25:00 AM	Bypass valve opened
12/16/2010	10:25:00 AM	Helium MFC set to  0.000000
12/16/2010	10:25:00 AM	H2 MFC set to  0.000000
12/16/2010	10:25:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:25:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:25:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:25:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:25:00 AM	Tube furnace set to 0
12/16/2010	10:26:00 AM	H2 valve closed
12/16/2010	10:26:00 AM	BCl3 valve closed
12/16/2010	10:26:00 AM	PH3 valve closed
12/16/2010	10:26:00 AM	SiCl4 pre valve closed
12/16/2010	10:26:00 AM	SiCl4 post valve closed
12/16/2010	10:26:00 AM	Bubbler valve closed
12/16/2010	10:26:00 AM	Helium valve opened
12/16/2010	10:26:00 AM	Main Vac valve opened
12/16/2010	10:26:00 AM	Bypass valve opened
12/16/2010	10:26:00 AM	Helium MFC set to  100.000000
12/16/2010	10:26:00 AM	H2 MFC set to  0.000000
12/16/2010	10:26:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:26:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:26:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:26:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:26:01 AM	Tube furnace set to 0
12/16/2010	10:27:01 AM	Helium valve closed
12/16/2010	10:27:01 AM	H2 valve closed
12/16/2010	10:27:01 AM	BCl3 valve closed
12/16/2010	10:27:01 AM	PH3 valve closed
12/16/2010	10:27:01 AM	SiCl4 pre valve closed
12/16/2010	10:27:01 AM	SiCl4 post valve closed
12/16/2010	10:27:01 AM	Bubbler valve closed
12/16/2010	10:27:01 AM	Main Vac valve opened
12/16/2010	10:27:01 AM	Bypass valve opened
12/16/2010	10:27:01 AM	Helium MFC set to  0.000000
12/16/2010	10:27:01 AM	H2 MFC set to  0.000000
12/16/2010	10:27:01 AM	BCl3 MFC set to  0.000000
12/16/2010	10:27:01 AM	PHl3 MFC set to  0.000000
12/16/2010	10:27:01 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:27:01 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:27:01 AM	Tube furnace set to 0
12/16/2010	10:27:02 AM	Run finished at 10:27 AM
12/16/2010	10:27:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:33:59 AM	Bypass valve closed
12/16/2010	10:33:59 AM	Main Vac valve closed
12/16/2010	10:34:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:34:40 AM	Recipe started at 10:34 AM
12/16/2010	10:34:40 AM	Helium valve closed
12/16/2010	10:34:40 AM	H2 valve closed
12/16/2010	10:34:40 AM	BCl3 valve closed
12/16/2010	10:34:40 AM	PH3 valve closed
12/16/2010	10:34:40 AM	SiCl4 pre valve closed
12/16/2010	10:34:40 AM	SiCl4 post valve closed
12/16/2010	10:34:40 AM	Main Vac valve closed
12/16/2010	10:34:40 AM	Bubbler valve closed
12/16/2010	10:34:40 AM	Bypass valve opened
12/16/2010	10:34:40 AM	Helium MFC set to  0.000000
12/16/2010	10:34:40 AM	H2 MFC set to  0.000000
12/16/2010	10:34:40 AM	BCl3 MFC set to  0.000000
12/16/2010	10:34:40 AM	PHl3 MFC set to  0.000000
12/16/2010	10:34:40 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:34:40 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:34:40 AM	Tube furnace set to 0
12/16/2010	10:34:40 AM	Helium valve closed
12/16/2010	10:34:40 AM	H2 valve closed
12/16/2010	10:34:40 AM	BCl3 valve closed
12/16/2010	10:34:40 AM	PH3 valve closed
12/16/2010	10:34:40 AM	SiCl4 pre valve closed
12/16/2010	10:34:40 AM	SiCl4 post valve closed
12/16/2010	10:34:40 AM	Bubbler valve closed
12/16/2010	10:34:40 AM	Main Vac valve opened
12/16/2010	10:34:40 AM	Bypass valve opened
12/16/2010	10:34:40 AM	Helium MFC set to  0.000000
12/16/2010	10:34:40 AM	H2 MFC set to  0.000000
12/16/2010	10:34:40 AM	BCl3 MFC set to  0.000000
12/16/2010	10:34:40 AM	PHl3 MFC set to  0.000000
12/16/2010	10:34:40 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:34:40 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:34:40 AM	Tube furnace set to 0
12/16/2010	10:34:41 AM	Run finished at 10:34 AM
12/16/2010	10:34:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:34:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:34:59 AM	Recipe started at 10:34 AM
12/16/2010	10:34:59 AM	Helium valve closed
12/16/2010	10:34:59 AM	H2 valve closed
12/16/2010	10:34:59 AM	BCl3 valve closed
12/16/2010	10:34:59 AM	PH3 valve closed
12/16/2010	10:34:59 AM	SiCl4 pre valve closed
12/16/2010	10:34:59 AM	SiCl4 post valve closed
12/16/2010	10:34:59 AM	Main Vac valve closed
12/16/2010	10:34:59 AM	Bubbler valve closed
12/16/2010	10:34:59 AM	Bypass valve opened
12/16/2010	10:34:59 AM	Helium MFC set to  0.000000
12/16/2010	10:34:59 AM	H2 MFC set to  0.000000
12/16/2010	10:34:59 AM	BCl3 MFC set to  0.000000
12/16/2010	10:34:59 AM	PHl3 MFC set to  0.000000
12/16/2010	10:34:59 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:34:59 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:35:00 AM	Tube furnace set to 0
12/16/2010	10:35:00 AM	Helium valve closed
12/16/2010	10:35:00 AM	H2 valve closed
12/16/2010	10:35:00 AM	BCl3 valve closed
12/16/2010	10:35:00 AM	PH3 valve closed
12/16/2010	10:35:00 AM	SiCl4 pre valve closed
12/16/2010	10:35:00 AM	SiCl4 post valve closed
12/16/2010	10:35:00 AM	Bubbler valve closed
12/16/2010	10:35:00 AM	Main Vac valve opened
12/16/2010	10:35:00 AM	Bypass valve opened
12/16/2010	10:35:00 AM	Helium MFC set to  0.000000
12/16/2010	10:35:00 AM	H2 MFC set to  0.000000
12/16/2010	10:35:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:35:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:35:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:35:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:35:00 AM	Tube furnace set to 0
12/16/2010	10:36:00 AM	H2 valve closed
12/16/2010	10:36:00 AM	BCl3 valve closed
12/16/2010	10:36:00 AM	PH3 valve closed
12/16/2010	10:36:00 AM	SiCl4 pre valve closed
12/16/2010	10:36:00 AM	SiCl4 post valve closed
12/16/2010	10:36:00 AM	Bubbler valve closed
12/16/2010	10:36:00 AM	Helium valve opened
12/16/2010	10:36:00 AM	Main Vac valve opened
12/16/2010	10:36:00 AM	Bypass valve opened
12/16/2010	10:36:00 AM	Helium MFC set to  100.000000
12/16/2010	10:36:00 AM	H2 MFC set to  0.000000
12/16/2010	10:36:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:36:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:36:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:36:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:36:00 AM	Tube furnace set to 0
12/16/2010	10:37:00 AM	Helium valve closed
12/16/2010	10:37:00 AM	H2 valve closed
12/16/2010	10:37:00 AM	BCl3 valve closed
12/16/2010	10:37:00 AM	PH3 valve closed
12/16/2010	10:37:00 AM	SiCl4 pre valve closed
12/16/2010	10:37:00 AM	SiCl4 post valve closed
12/16/2010	10:37:00 AM	Bubbler valve closed
12/16/2010	10:37:00 AM	Main Vac valve opened
12/16/2010	10:37:00 AM	Bypass valve opened
12/16/2010	10:37:00 AM	Helium MFC set to  0.000000
12/16/2010	10:37:00 AM	H2 MFC set to  0.000000
12/16/2010	10:37:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:37:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:37:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:37:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:37:00 AM	Tube furnace set to 0
12/16/2010	10:37:04 AM	Run aborted at 10:37 AM
12/16/2010	10:37:04 AM	Helium valve closed
12/16/2010	10:37:04 AM	H2 valve closed
12/16/2010	10:37:04 AM	BCl3 valve closed
12/16/2010	10:37:04 AM	PH3 valve closed
12/16/2010	10:37:04 AM	SiCl4 pre valve closed
12/16/2010	10:37:04 AM	SiCl4 post valve closed
12/16/2010	10:37:04 AM	Bypass valve closed
12/16/2010	10:37:04 AM	Main Vac valve closed
12/16/2010	10:37:04 AM	Bubbler valve closed
12/16/2010	10:37:04 AM	Helium MFC set to  0.000000
12/16/2010	10:37:04 AM	H2 MFC set to  0.000000
12/16/2010	10:37:04 AM	BCl3 MFC set to  0.000000
12/16/2010	10:37:04 AM	PHl3 MFC set to  0.000000
12/16/2010	10:37:04 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:37:04 AM	Tube furnace set to 0
12/16/2010	10:37:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:37:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:37:05 AM	Recipe started at 10:37 AM
12/16/2010	10:37:05 AM	Helium valve closed
12/16/2010	10:37:05 AM	H2 valve closed
12/16/2010	10:37:05 AM	BCl3 valve closed
12/16/2010	10:37:05 AM	PH3 valve closed
12/16/2010	10:37:05 AM	SiCl4 pre valve closed
12/16/2010	10:37:05 AM	SiCl4 post valve closed
12/16/2010	10:37:05 AM	Main Vac valve closed
12/16/2010	10:37:05 AM	Bubbler valve closed
12/16/2010	10:37:05 AM	Bypass valve opened
12/16/2010	10:37:05 AM	Helium MFC set to  0.000000
12/16/2010	10:37:05 AM	H2 MFC set to  0.000000
12/16/2010	10:37:05 AM	BCl3 MFC set to  0.000000
12/16/2010	10:37:05 AM	PHl3 MFC set to  0.000000
12/16/2010	10:37:05 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:37:05 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:37:05 AM	Tube furnace set to 0
12/16/2010	10:37:06 AM	Helium valve closed
12/16/2010	10:37:06 AM	H2 valve closed
12/16/2010	10:37:06 AM	BCl3 valve closed
12/16/2010	10:37:06 AM	PH3 valve closed
12/16/2010	10:37:06 AM	SiCl4 pre valve closed
12/16/2010	10:37:06 AM	SiCl4 post valve closed
12/16/2010	10:37:06 AM	Bubbler valve closed
12/16/2010	10:37:06 AM	Main Vac valve opened
12/16/2010	10:37:06 AM	Bypass valve opened
12/16/2010	10:37:06 AM	Helium MFC set to  0.000000
12/16/2010	10:37:06 AM	H2 MFC set to  0.000000
12/16/2010	10:37:06 AM	BCl3 MFC set to  0.000000
12/16/2010	10:37:06 AM	PHl3 MFC set to  0.000000
12/16/2010	10:37:06 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:37:06 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:37:06 AM	Tube furnace set to 0
12/16/2010	10:37:06 AM	Run finished at 10:37 AM
12/16/2010	10:37:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:37:51 AM	Bypass valve closed
12/16/2010	10:37:52 AM	Main Vac valve closed
12/16/2010	10:37:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:38:00 AM	Recipe started at 10:37 AM
12/16/2010	10:38:00 AM	Helium valve closed
12/16/2010	10:38:00 AM	H2 valve closed
12/16/2010	10:38:00 AM	BCl3 valve closed
12/16/2010	10:38:00 AM	PH3 valve closed
12/16/2010	10:38:00 AM	SiCl4 pre valve closed
12/16/2010	10:38:00 AM	SiCl4 post valve closed
12/16/2010	10:38:00 AM	Main Vac valve closed
12/16/2010	10:38:00 AM	Bubbler valve closed
12/16/2010	10:38:00 AM	Bypass valve opened
12/16/2010	10:38:00 AM	Helium MFC set to  0.000000
12/16/2010	10:38:00 AM	H2 MFC set to  0.000000
12/16/2010	10:38:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:38:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:38:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:38:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:38:00 AM	Tube furnace set to 0
12/16/2010	10:38:00 AM	Helium valve closed
12/16/2010	10:38:00 AM	H2 valve closed
12/16/2010	10:38:00 AM	BCl3 valve closed
12/16/2010	10:38:00 AM	PH3 valve closed
12/16/2010	10:38:00 AM	SiCl4 pre valve closed
12/16/2010	10:38:00 AM	SiCl4 post valve closed
12/16/2010	10:38:00 AM	Bubbler valve closed
12/16/2010	10:38:00 AM	Main Vac valve opened
12/16/2010	10:38:00 AM	Bypass valve opened
12/16/2010	10:38:00 AM	Helium MFC set to  0.000000
12/16/2010	10:38:00 AM	H2 MFC set to  0.000000
12/16/2010	10:38:00 AM	BCl3 MFC set to  0.000000
12/16/2010	10:38:00 AM	PHl3 MFC set to  0.000000
12/16/2010	10:38:00 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:38:00 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:38:00 AM	Tube furnace set to 0
12/16/2010	10:38:01 AM	Run finished at 10:38 AM
12/16/2010	10:38:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:38:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:38:45 AM	Recipe started at 10:38 AM
12/16/2010	10:38:45 AM	Helium valve closed
12/16/2010	10:38:45 AM	H2 valve closed
12/16/2010	10:38:45 AM	BCl3 valve closed
12/16/2010	10:38:45 AM	PH3 valve closed
12/16/2010	10:38:45 AM	SiCl4 pre valve closed
12/16/2010	10:38:45 AM	SiCl4 post valve closed
12/16/2010	10:38:45 AM	Main Vac valve closed
12/16/2010	10:38:45 AM	Bubbler valve closed
12/16/2010	10:38:45 AM	Bypass valve opened
12/16/2010	10:38:45 AM	Helium MFC set to  0.000000
12/16/2010	10:38:45 AM	H2 MFC set to  0.000000
12/16/2010	10:38:45 AM	BCl3 MFC set to  0.000000
12/16/2010	10:38:45 AM	PHl3 MFC set to  0.000000
12/16/2010	10:38:45 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:38:45 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:38:45 AM	Tube furnace set to 0
12/16/2010	10:38:45 AM	Helium valve closed
12/16/2010	10:38:45 AM	H2 valve closed
12/16/2010	10:38:45 AM	BCl3 valve closed
12/16/2010	10:38:45 AM	PH3 valve closed
12/16/2010	10:38:45 AM	SiCl4 pre valve closed
12/16/2010	10:38:45 AM	SiCl4 post valve closed
12/16/2010	10:38:45 AM	Bubbler valve closed
12/16/2010	10:38:45 AM	Main Vac valve opened
12/16/2010	10:38:45 AM	Bypass valve opened
12/16/2010	10:38:45 AM	Helium MFC set to  0.000000
12/16/2010	10:38:45 AM	H2 MFC set to  0.000000
12/16/2010	10:38:45 AM	BCl3 MFC set to  0.000000
12/16/2010	10:38:45 AM	PHl3 MFC set to  0.000000
12/16/2010	10:38:45 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:38:45 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:38:45 AM	Tube furnace set to 0
12/16/2010	10:39:45 AM	H2 valve closed
12/16/2010	10:39:45 AM	BCl3 valve closed
12/16/2010	10:39:45 AM	PH3 valve closed
12/16/2010	10:39:45 AM	SiCl4 pre valve closed
12/16/2010	10:39:45 AM	SiCl4 post valve closed
12/16/2010	10:39:45 AM	Bubbler valve closed
12/16/2010	10:39:45 AM	Helium valve opened
12/16/2010	10:39:45 AM	Main Vac valve opened
12/16/2010	10:39:45 AM	Bypass valve opened
12/16/2010	10:39:45 AM	Helium MFC set to  100.000000
12/16/2010	10:39:45 AM	H2 MFC set to  0.000000
12/16/2010	10:39:45 AM	BCl3 MFC set to  0.000000
12/16/2010	10:39:45 AM	PHl3 MFC set to  0.000000
12/16/2010	10:39:45 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:39:45 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:39:45 AM	Tube furnace set to 0
12/16/2010	10:40:45 AM	Helium valve closed
12/16/2010	10:40:45 AM	H2 valve closed
12/16/2010	10:40:45 AM	BCl3 valve closed
12/16/2010	10:40:45 AM	PH3 valve closed
12/16/2010	10:40:45 AM	SiCl4 pre valve closed
12/16/2010	10:40:45 AM	SiCl4 post valve closed
12/16/2010	10:40:45 AM	Bubbler valve closed
12/16/2010	10:40:45 AM	Main Vac valve opened
12/16/2010	10:40:45 AM	Bypass valve opened
12/16/2010	10:40:45 AM	Helium MFC set to  0.000000
12/16/2010	10:40:45 AM	H2 MFC set to  0.000000
12/16/2010	10:40:45 AM	BCl3 MFC set to  0.000000
12/16/2010	10:40:45 AM	PHl3 MFC set to  0.000000
12/16/2010	10:40:45 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:40:45 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:40:46 AM	Tube furnace set to 0
12/16/2010	10:41:46 AM	H2 valve closed
12/16/2010	10:41:46 AM	BCl3 valve closed
12/16/2010	10:41:46 AM	PH3 valve closed
12/16/2010	10:41:46 AM	SiCl4 pre valve closed
12/16/2010	10:41:46 AM	SiCl4 post valve closed
12/16/2010	10:41:46 AM	Bubbler valve closed
12/16/2010	10:41:46 AM	Helium valve opened
12/16/2010	10:41:46 AM	Main Vac valve opened
12/16/2010	10:41:46 AM	Bypass valve opened
12/16/2010	10:41:46 AM	Helium MFC set to  100.000000
12/16/2010	10:41:46 AM	H2 MFC set to  0.000000
12/16/2010	10:41:46 AM	BCl3 MFC set to  0.000000
12/16/2010	10:41:46 AM	PHl3 MFC set to  0.000000
12/16/2010	10:41:46 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:41:46 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:41:46 AM	Tube furnace set to 0
12/16/2010	10:42:46 AM	Helium valve closed
12/16/2010	10:42:46 AM	H2 valve closed
12/16/2010	10:42:46 AM	BCl3 valve closed
12/16/2010	10:42:46 AM	PH3 valve closed
12/16/2010	10:42:46 AM	SiCl4 pre valve closed
12/16/2010	10:42:46 AM	SiCl4 post valve closed
12/16/2010	10:42:46 AM	Bubbler valve closed
12/16/2010	10:42:46 AM	Main Vac valve opened
12/16/2010	10:42:46 AM	Bypass valve opened
12/16/2010	10:42:46 AM	Helium MFC set to  0.000000
12/16/2010	10:42:46 AM	H2 MFC set to  0.000000
12/16/2010	10:42:46 AM	BCl3 MFC set to  0.000000
12/16/2010	10:42:46 AM	PHl3 MFC set to  0.000000
12/16/2010	10:42:46 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:42:46 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:42:46 AM	Tube furnace set to 0
12/16/2010	10:42:51 AM	Run aborted at 10:42 AM
12/16/2010	10:42:51 AM	Helium valve closed
12/16/2010	10:42:51 AM	H2 valve closed
12/16/2010	10:42:51 AM	BCl3 valve closed
12/16/2010	10:42:51 AM	PH3 valve closed
12/16/2010	10:42:51 AM	SiCl4 pre valve closed
12/16/2010	10:42:51 AM	SiCl4 post valve closed
12/16/2010	10:42:51 AM	Bypass valve closed
12/16/2010	10:42:51 AM	Main Vac valve closed
12/16/2010	10:42:51 AM	Bubbler valve closed
12/16/2010	10:42:51 AM	Helium MFC set to  0.000000
12/16/2010	10:42:51 AM	H2 MFC set to  0.000000
12/16/2010	10:42:51 AM	BCl3 MFC set to  0.000000
12/16/2010	10:42:51 AM	PHl3 MFC set to  0.000000
12/16/2010	10:42:51 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:42:51 AM	Tube furnace set to 0
12/16/2010	10:42:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	10:42:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:42:52 AM	Recipe started at 10:42 AM
12/16/2010	10:42:52 AM	Helium valve closed
12/16/2010	10:42:52 AM	H2 valve closed
12/16/2010	10:42:52 AM	BCl3 valve closed
12/16/2010	10:42:52 AM	PH3 valve closed
12/16/2010	10:42:52 AM	SiCl4 pre valve closed
12/16/2010	10:42:52 AM	SiCl4 post valve closed
12/16/2010	10:42:52 AM	Main Vac valve closed
12/16/2010	10:42:52 AM	Bubbler valve closed
12/16/2010	10:42:52 AM	Bypass valve opened
12/16/2010	10:42:52 AM	Helium MFC set to  0.000000
12/16/2010	10:42:52 AM	H2 MFC set to  0.000000
12/16/2010	10:42:52 AM	BCl3 MFC set to  0.000000
12/16/2010	10:42:52 AM	PHl3 MFC set to  0.000000
12/16/2010	10:42:52 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:42:52 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:42:52 AM	Tube furnace set to 0
12/16/2010	10:42:52 AM	Helium valve closed
12/16/2010	10:42:52 AM	H2 valve closed
12/16/2010	10:42:52 AM	BCl3 valve closed
12/16/2010	10:42:52 AM	PH3 valve closed
12/16/2010	10:42:52 AM	SiCl4 pre valve closed
12/16/2010	10:42:52 AM	SiCl4 post valve closed
12/16/2010	10:42:52 AM	Bubbler valve closed
12/16/2010	10:42:52 AM	Main Vac valve opened
12/16/2010	10:42:52 AM	Bypass valve opened
12/16/2010	10:42:52 AM	Helium MFC set to  0.000000
12/16/2010	10:42:52 AM	H2 MFC set to  0.000000
12/16/2010	10:42:52 AM	BCl3 MFC set to  0.000000
12/16/2010	10:42:52 AM	PHl3 MFC set to  0.000000
12/16/2010	10:42:52 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:42:52 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:42:53 AM	Tube furnace set to 0
12/16/2010	10:42:53 AM	Run finished at 10:42 AM
12/16/2010	10:42:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	10:45:24 AM	Recipe started at 10:45 AM
12/16/2010	10:45:24 AM	Helium valve closed
12/16/2010	10:45:24 AM	BCl3 valve closed
12/16/2010	10:45:24 AM	PH3 valve closed
12/16/2010	10:45:24 AM	SiCl4 pre valve closed
12/16/2010	10:45:24 AM	SiCl4 post valve closed
12/16/2010	10:45:24 AM	Main Vac valve closed
12/16/2010	10:45:24 AM	Bypass valve closed
12/16/2010	10:45:24 AM	Bubbler valve closed
12/16/2010	10:45:24 AM	H2 valve opened
12/16/2010	10:45:24 AM	Helium MFC set to  0.000000
12/16/2010	10:45:24 AM	H2 MFC set to  500.000000
12/16/2010	10:45:24 AM	BCl3 MFC set to  0.000000
12/16/2010	10:45:24 AM	PHl3 MFC set to  0.000000
12/16/2010	10:45:24 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:45:24 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:45:24 AM	Tube furnace set to 0
12/16/2010	10:46:46 AM	Helium valve closed
12/16/2010	10:46:46 AM	BCl3 valve closed
12/16/2010	10:46:46 AM	PH3 valve closed
12/16/2010	10:46:46 AM	SiCl4 pre valve closed
12/16/2010	10:46:46 AM	SiCl4 post valve closed
12/16/2010	10:46:46 AM	Main Vac valve closed
12/16/2010	10:46:46 AM	Bypass valve closed
12/16/2010	10:46:46 AM	H2 valve opened
12/16/2010	10:46:46 AM	Bubbler valve opened
12/16/2010	10:46:46 AM	Helium MFC set to  0.000000
12/16/2010	10:46:46 AM	H2 MFC set to  500.000000
12/16/2010	10:46:46 AM	BCl3 MFC set to  0.000000
12/16/2010	10:46:46 AM	PHl3 MFC set to  0.000000
12/16/2010	10:46:46 AM	SiCl4 MFC set to  0.000000
12/16/2010	10:46:46 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:46:46 AM	Tube furnace set to 1000
12/16/2010	11:06:46 AM	Helium valve closed
12/16/2010	11:06:46 AM	PH3 valve closed
12/16/2010	11:06:46 AM	Main Vac valve closed
12/16/2010	11:06:46 AM	Bypass valve closed
12/16/2010	11:06:46 AM	H2 valve opened
12/16/2010	11:06:46 AM	BCl3 valve opened
12/16/2010	11:06:46 AM	SiCl4 pre valve opened
12/16/2010	11:06:46 AM	SiCl4 post valve opened
12/16/2010	11:06:46 AM	Bubbler valve opened
12/16/2010	11:06:46 AM	Helium MFC set to  0.000000
12/16/2010	11:06:46 AM	H2 MFC set to  500.000000
12/16/2010	11:06:46 AM	BCl3 MFC set to  12.000000
12/16/2010	11:06:46 AM	PHl3 MFC set to  0.000000
12/16/2010	11:06:46 AM	SiCl4 MFC set to  50.000000
12/16/2010	11:06:46 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:06:46 AM	Tube furnace set to 1000
12/16/2010	11:26:46 AM	H2 valve closed
12/16/2010	11:26:46 AM	BCl3 valve closed
12/16/2010	11:26:46 AM	PH3 valve closed
12/16/2010	11:26:46 AM	SiCl4 pre valve closed
12/16/2010	11:26:46 AM	SiCl4 post valve closed
12/16/2010	11:26:46 AM	Main Vac valve closed
12/16/2010	11:26:46 AM	Bypass valve closed
12/16/2010	11:26:46 AM	Helium valve opened
12/16/2010	11:26:46 AM	Bubbler valve opened
12/16/2010	11:26:46 AM	Helium MFC set to  500.000000
12/16/2010	11:26:46 AM	H2 MFC set to  0.000000
12/16/2010	11:26:46 AM	BCl3 MFC set to  0.000000
12/16/2010	11:26:46 AM	PHl3 MFC set to  0.000000
12/16/2010	11:26:46 AM	SiCl4 MFC set to  0.000000
12/16/2010	11:26:46 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:26:46 AM	Tube furnace set to 0
12/16/2010	11:46:46 AM	Helium valve closed
12/16/2010	11:46:46 AM	H2 valve closed
12/16/2010	11:46:46 AM	BCl3 valve closed
12/16/2010	11:46:46 AM	PH3 valve closed
12/16/2010	11:46:46 AM	SiCl4 pre valve closed
12/16/2010	11:46:46 AM	SiCl4 post valve closed
12/16/2010	11:46:46 AM	Main Vac valve closed
12/16/2010	11:46:46 AM	Bypass valve closed
12/16/2010	11:46:46 AM	Bubbler valve closed
12/16/2010	11:46:46 AM	Helium MFC set to  0.000000
12/16/2010	11:46:46 AM	H2 MFC set to  0.000000
12/16/2010	11:46:46 AM	BCl3 MFC set to  0.000000
12/16/2010	11:46:46 AM	PHl3 MFC set to  0.000000
12/16/2010	11:46:46 AM	SiCl4 MFC set to  0.000000
12/16/2010	11:46:46 AM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:46:47 AM	Tube furnace set to 0
12/16/2010	11:46:47 AM	Run finished at 11:46 AM
12/16/2010	12:01:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	12:01:47 PM	Recipe started at 12:01 PM
12/16/2010	12:01:47 PM	Helium valve closed
12/16/2010	12:01:47 PM	H2 valve closed
12/16/2010	12:01:47 PM	BCl3 valve closed
12/16/2010	12:01:47 PM	PH3 valve closed
12/16/2010	12:01:47 PM	SiCl4 pre valve closed
12/16/2010	12:01:47 PM	SiCl4 post valve closed
12/16/2010	12:01:47 PM	Main Vac valve closed
12/16/2010	12:01:47 PM	Bubbler valve closed
12/16/2010	12:01:47 PM	Bypass valve opened
12/16/2010	12:01:47 PM	Helium MFC set to  0.000000
12/16/2010	12:01:47 PM	H2 MFC set to  0.000000
12/16/2010	12:01:47 PM	BCl3 MFC set to  0.000000
12/16/2010	12:01:47 PM	PHl3 MFC set to  0.000000
12/16/2010	12:01:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:01:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:01:47 PM	Tube furnace set to 0
12/16/2010	12:02:45 PM	Helium valve closed
12/16/2010	12:02:45 PM	H2 valve closed
12/16/2010	12:02:45 PM	BCl3 valve closed
12/16/2010	12:02:45 PM	PH3 valve closed
12/16/2010	12:02:45 PM	SiCl4 pre valve closed
12/16/2010	12:02:45 PM	SiCl4 post valve closed
12/16/2010	12:02:45 PM	Bubbler valve closed
12/16/2010	12:02:45 PM	Main Vac valve opened
12/16/2010	12:02:45 PM	Bypass valve opened
12/16/2010	12:02:45 PM	Helium MFC set to  0.000000
12/16/2010	12:02:45 PM	H2 MFC set to  0.000000
12/16/2010	12:02:45 PM	BCl3 MFC set to  0.000000
12/16/2010	12:02:45 PM	PHl3 MFC set to  0.000000
12/16/2010	12:02:45 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:02:45 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:02:45 PM	Tube furnace set to 0
12/16/2010	12:02:45 PM	Run finished at 12:02 PM
12/16/2010	12:02:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	12:07:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	12:08:00 PM	Recipe started at 12:07 PM
12/16/2010	12:08:00 PM	Helium valve closed
12/16/2010	12:08:00 PM	H2 valve closed
12/16/2010	12:08:00 PM	BCl3 valve closed
12/16/2010	12:08:00 PM	PH3 valve closed
12/16/2010	12:08:00 PM	SiCl4 pre valve closed
12/16/2010	12:08:00 PM	SiCl4 post valve closed
12/16/2010	12:08:00 PM	Main Vac valve closed
12/16/2010	12:08:00 PM	Bubbler valve closed
12/16/2010	12:08:00 PM	Bypass valve opened
12/16/2010	12:08:00 PM	Helium MFC set to  0.000000
12/16/2010	12:08:00 PM	H2 MFC set to  0.000000
12/16/2010	12:08:00 PM	BCl3 MFC set to  0.000000
12/16/2010	12:08:00 PM	PHl3 MFC set to  0.000000
12/16/2010	12:08:00 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:08:00 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:08:00 PM	Tube furnace set to 0
12/16/2010	12:08:00 PM	Helium valve closed
12/16/2010	12:08:00 PM	H2 valve closed
12/16/2010	12:08:00 PM	BCl3 valve closed
12/16/2010	12:08:00 PM	PH3 valve closed
12/16/2010	12:08:00 PM	SiCl4 pre valve closed
12/16/2010	12:08:00 PM	SiCl4 post valve closed
12/16/2010	12:08:00 PM	Bubbler valve closed
12/16/2010	12:08:00 PM	Main Vac valve opened
12/16/2010	12:08:00 PM	Bypass valve opened
12/16/2010	12:08:00 PM	Helium MFC set to  0.000000
12/16/2010	12:08:00 PM	H2 MFC set to  0.000000
12/16/2010	12:08:00 PM	BCl3 MFC set to  0.000000
12/16/2010	12:08:00 PM	PHl3 MFC set to  0.000000
12/16/2010	12:08:00 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:08:00 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:08:01 PM	Tube furnace set to 0
12/16/2010	12:09:01 PM	H2 valve closed
12/16/2010	12:09:01 PM	BCl3 valve closed
12/16/2010	12:09:01 PM	PH3 valve closed
12/16/2010	12:09:01 PM	SiCl4 pre valve closed
12/16/2010	12:09:01 PM	SiCl4 post valve closed
12/16/2010	12:09:01 PM	Bubbler valve closed
12/16/2010	12:09:01 PM	Helium valve opened
12/16/2010	12:09:01 PM	Main Vac valve opened
12/16/2010	12:09:01 PM	Bypass valve opened
12/16/2010	12:09:01 PM	Helium MFC set to  100.000000
12/16/2010	12:09:01 PM	H2 MFC set to  0.000000
12/16/2010	12:09:01 PM	BCl3 MFC set to  0.000000
12/16/2010	12:09:01 PM	PHl3 MFC set to  0.000000
12/16/2010	12:09:01 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:09:01 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:09:01 PM	Tube furnace set to 0
12/16/2010	12:10:01 PM	Helium valve closed
12/16/2010	12:10:01 PM	H2 valve closed
12/16/2010	12:10:01 PM	BCl3 valve closed
12/16/2010	12:10:01 PM	PH3 valve closed
12/16/2010	12:10:01 PM	SiCl4 pre valve closed
12/16/2010	12:10:01 PM	SiCl4 post valve closed
12/16/2010	12:10:01 PM	Bubbler valve closed
12/16/2010	12:10:01 PM	Main Vac valve opened
12/16/2010	12:10:01 PM	Bypass valve opened
12/16/2010	12:10:01 PM	Helium MFC set to  0.000000
12/16/2010	12:10:01 PM	H2 MFC set to  0.000000
12/16/2010	12:10:01 PM	BCl3 MFC set to  0.000000
12/16/2010	12:10:01 PM	PHl3 MFC set to  0.000000
12/16/2010	12:10:01 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:10:01 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:10:01 PM	Tube furnace set to 0
12/16/2010	12:11:01 PM	H2 valve closed
12/16/2010	12:11:01 PM	BCl3 valve closed
12/16/2010	12:11:01 PM	PH3 valve closed
12/16/2010	12:11:01 PM	SiCl4 pre valve closed
12/16/2010	12:11:01 PM	SiCl4 post valve closed
12/16/2010	12:11:01 PM	Bubbler valve closed
12/16/2010	12:11:01 PM	Helium valve opened
12/16/2010	12:11:01 PM	Main Vac valve opened
12/16/2010	12:11:01 PM	Bypass valve opened
12/16/2010	12:11:01 PM	Helium MFC set to  100.000000
12/16/2010	12:11:01 PM	H2 MFC set to  0.000000
12/16/2010	12:11:01 PM	BCl3 MFC set to  0.000000
12/16/2010	12:11:01 PM	PHl3 MFC set to  0.000000
12/16/2010	12:11:01 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:11:01 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:11:01 PM	Tube furnace set to 0
12/16/2010	12:12:01 PM	Helium valve closed
12/16/2010	12:12:01 PM	H2 valve closed
12/16/2010	12:12:01 PM	BCl3 valve closed
12/16/2010	12:12:01 PM	PH3 valve closed
12/16/2010	12:12:01 PM	SiCl4 pre valve closed
12/16/2010	12:12:01 PM	SiCl4 post valve closed
12/16/2010	12:12:01 PM	Bubbler valve closed
12/16/2010	12:12:01 PM	Main Vac valve opened
12/16/2010	12:12:01 PM	Bypass valve opened
12/16/2010	12:12:01 PM	Helium MFC set to  0.000000
12/16/2010	12:12:01 PM	H2 MFC set to  0.000000
12/16/2010	12:12:01 PM	BCl3 MFC set to  0.000000
12/16/2010	12:12:01 PM	PHl3 MFC set to  0.000000
12/16/2010	12:12:01 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:12:01 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:12:01 PM	Tube furnace set to 0
12/16/2010	12:13:01 PM	H2 valve closed
12/16/2010	12:13:01 PM	BCl3 valve closed
12/16/2010	12:13:01 PM	PH3 valve closed
12/16/2010	12:13:01 PM	SiCl4 pre valve closed
12/16/2010	12:13:01 PM	SiCl4 post valve closed
12/16/2010	12:13:01 PM	Bubbler valve closed
12/16/2010	12:13:01 PM	Helium valve opened
12/16/2010	12:13:01 PM	Main Vac valve opened
12/16/2010	12:13:01 PM	Bypass valve opened
12/16/2010	12:13:01 PM	Helium MFC set to  100.000000
12/16/2010	12:13:01 PM	H2 MFC set to  0.000000
12/16/2010	12:13:01 PM	BCl3 MFC set to  0.000000
12/16/2010	12:13:01 PM	PHl3 MFC set to  0.000000
12/16/2010	12:13:01 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:13:01 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:13:02 PM	Tube furnace set to 0
12/16/2010	12:14:02 PM	Helium valve closed
12/16/2010	12:14:02 PM	H2 valve closed
12/16/2010	12:14:02 PM	BCl3 valve closed
12/16/2010	12:14:02 PM	PH3 valve closed
12/16/2010	12:14:02 PM	SiCl4 pre valve closed
12/16/2010	12:14:02 PM	SiCl4 post valve closed
12/16/2010	12:14:02 PM	Bubbler valve closed
12/16/2010	12:14:02 PM	Main Vac valve opened
12/16/2010	12:14:02 PM	Bypass valve opened
12/16/2010	12:14:02 PM	Helium MFC set to  0.000000
12/16/2010	12:14:02 PM	H2 MFC set to  0.000000
12/16/2010	12:14:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:14:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:14:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:14:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:14:02 PM	Tube furnace set to 0
12/16/2010	12:15:02 PM	H2 valve closed
12/16/2010	12:15:02 PM	BCl3 valve closed
12/16/2010	12:15:02 PM	PH3 valve closed
12/16/2010	12:15:02 PM	SiCl4 pre valve closed
12/16/2010	12:15:02 PM	SiCl4 post valve closed
12/16/2010	12:15:02 PM	Bubbler valve closed
12/16/2010	12:15:02 PM	Helium valve opened
12/16/2010	12:15:02 PM	Main Vac valve opened
12/16/2010	12:15:02 PM	Bypass valve opened
12/16/2010	12:15:02 PM	Helium MFC set to  100.000000
12/16/2010	12:15:02 PM	H2 MFC set to  0.000000
12/16/2010	12:15:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:15:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:15:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:15:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:15:02 PM	Tube furnace set to 0
12/16/2010	12:16:02 PM	Helium valve closed
12/16/2010	12:16:02 PM	H2 valve closed
12/16/2010	12:16:02 PM	BCl3 valve closed
12/16/2010	12:16:02 PM	PH3 valve closed
12/16/2010	12:16:02 PM	SiCl4 pre valve closed
12/16/2010	12:16:02 PM	SiCl4 post valve closed
12/16/2010	12:16:02 PM	Bubbler valve closed
12/16/2010	12:16:02 PM	Main Vac valve opened
12/16/2010	12:16:02 PM	Bypass valve opened
12/16/2010	12:16:02 PM	Helium MFC set to  0.000000
12/16/2010	12:16:02 PM	H2 MFC set to  0.000000
12/16/2010	12:16:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:16:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:16:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:16:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:16:02 PM	Tube furnace set to 0
12/16/2010	12:17:02 PM	H2 valve closed
12/16/2010	12:17:02 PM	BCl3 valve closed
12/16/2010	12:17:02 PM	PH3 valve closed
12/16/2010	12:17:02 PM	SiCl4 pre valve closed
12/16/2010	12:17:02 PM	SiCl4 post valve closed
12/16/2010	12:17:02 PM	Bubbler valve closed
12/16/2010	12:17:02 PM	Helium valve opened
12/16/2010	12:17:02 PM	Main Vac valve opened
12/16/2010	12:17:02 PM	Bypass valve opened
12/16/2010	12:17:02 PM	Helium MFC set to  100.000000
12/16/2010	12:17:02 PM	H2 MFC set to  0.000000
12/16/2010	12:17:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:17:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:17:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:17:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:17:02 PM	Tube furnace set to 0
12/16/2010	12:18:02 PM	Helium valve closed
12/16/2010	12:18:02 PM	H2 valve closed
12/16/2010	12:18:02 PM	BCl3 valve closed
12/16/2010	12:18:02 PM	PH3 valve closed
12/16/2010	12:18:02 PM	SiCl4 pre valve closed
12/16/2010	12:18:02 PM	SiCl4 post valve closed
12/16/2010	12:18:02 PM	Bubbler valve closed
12/16/2010	12:18:02 PM	Main Vac valve opened
12/16/2010	12:18:02 PM	Bypass valve opened
12/16/2010	12:18:02 PM	Helium MFC set to  0.000000
12/16/2010	12:18:02 PM	H2 MFC set to  0.000000
12/16/2010	12:18:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:18:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:18:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:18:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:18:03 PM	Tube furnace set to 0
12/16/2010	12:19:00 PM	Run aborted at 12:19 PM
12/16/2010	12:19:00 PM	Helium valve closed
12/16/2010	12:19:00 PM	H2 valve closed
12/16/2010	12:19:00 PM	BCl3 valve closed
12/16/2010	12:19:00 PM	PH3 valve closed
12/16/2010	12:19:00 PM	SiCl4 pre valve closed
12/16/2010	12:19:00 PM	SiCl4 post valve closed
12/16/2010	12:19:00 PM	Bypass valve closed
12/16/2010	12:19:00 PM	Main Vac valve closed
12/16/2010	12:19:00 PM	Bubbler valve closed
12/16/2010	12:19:00 PM	Helium MFC set to  0.000000
12/16/2010	12:19:00 PM	H2 MFC set to  0.000000
12/16/2010	12:19:00 PM	BCl3 MFC set to  0.000000
12/16/2010	12:19:00 PM	PHl3 MFC set to  0.000000
12/16/2010	12:19:00 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:19:00 PM	Tube furnace set to 0
12/16/2010	12:19:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	12:19:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	12:19:02 PM	Recipe started at 12:19 PM
12/16/2010	12:19:02 PM	Helium valve closed
12/16/2010	12:19:02 PM	H2 valve closed
12/16/2010	12:19:02 PM	BCl3 valve closed
12/16/2010	12:19:02 PM	PH3 valve closed
12/16/2010	12:19:02 PM	SiCl4 pre valve closed
12/16/2010	12:19:02 PM	SiCl4 post valve closed
12/16/2010	12:19:02 PM	Main Vac valve closed
12/16/2010	12:19:02 PM	Bubbler valve closed
12/16/2010	12:19:02 PM	Bypass valve opened
12/16/2010	12:19:02 PM	Helium MFC set to  0.000000
12/16/2010	12:19:02 PM	H2 MFC set to  0.000000
12/16/2010	12:19:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:19:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:19:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:19:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:19:02 PM	Tube furnace set to 0
12/16/2010	12:19:02 PM	Helium valve closed
12/16/2010	12:19:02 PM	H2 valve closed
12/16/2010	12:19:02 PM	BCl3 valve closed
12/16/2010	12:19:02 PM	PH3 valve closed
12/16/2010	12:19:02 PM	SiCl4 pre valve closed
12/16/2010	12:19:02 PM	SiCl4 post valve closed
12/16/2010	12:19:02 PM	Bubbler valve closed
12/16/2010	12:19:02 PM	Main Vac valve opened
12/16/2010	12:19:02 PM	Bypass valve opened
12/16/2010	12:19:02 PM	Helium MFC set to  0.000000
12/16/2010	12:19:02 PM	H2 MFC set to  0.000000
12/16/2010	12:19:02 PM	BCl3 MFC set to  0.000000
12/16/2010	12:19:02 PM	PHl3 MFC set to  0.000000
12/16/2010	12:19:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:19:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:19:03 PM	Tube furnace set to 0
12/16/2010	12:19:03 PM	Run finished at 12:19 PM
12/16/2010	12:19:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	12:19:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	12:19:19 PM	Recipe started at 12:19 PM
12/16/2010	12:19:19 PM	Helium valve closed
12/16/2010	12:19:19 PM	H2 valve closed
12/16/2010	12:19:19 PM	BCl3 valve closed
12/16/2010	12:19:19 PM	PH3 valve closed
12/16/2010	12:19:19 PM	SiCl4 pre valve closed
12/16/2010	12:19:19 PM	SiCl4 post valve closed
12/16/2010	12:19:19 PM	Main Vac valve closed
12/16/2010	12:19:19 PM	Bubbler valve closed
12/16/2010	12:19:19 PM	Bypass valve opened
12/16/2010	12:19:19 PM	Helium MFC set to  0.000000
12/16/2010	12:19:19 PM	H2 MFC set to  0.000000
12/16/2010	12:19:19 PM	BCl3 MFC set to  0.000000
12/16/2010	12:19:19 PM	PHl3 MFC set to  0.000000
12/16/2010	12:19:19 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:19:19 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:19:19 PM	Tube furnace set to 0
12/16/2010	12:19:20 PM	Helium valve closed
12/16/2010	12:19:20 PM	H2 valve closed
12/16/2010	12:19:20 PM	BCl3 valve closed
12/16/2010	12:19:20 PM	PH3 valve closed
12/16/2010	12:19:20 PM	SiCl4 pre valve closed
12/16/2010	12:19:20 PM	SiCl4 post valve closed
12/16/2010	12:19:20 PM	Bubbler valve closed
12/16/2010	12:19:20 PM	Main Vac valve opened
12/16/2010	12:19:20 PM	Bypass valve opened
12/16/2010	12:19:20 PM	Helium MFC set to  0.000000
12/16/2010	12:19:20 PM	H2 MFC set to  0.000000
12/16/2010	12:19:20 PM	BCl3 MFC set to  0.000000
12/16/2010	12:19:20 PM	PHl3 MFC set to  0.000000
12/16/2010	12:19:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:19:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:19:20 PM	Tube furnace set to 0
12/16/2010	12:20:20 PM	H2 valve closed
12/16/2010	12:20:20 PM	BCl3 valve closed
12/16/2010	12:20:20 PM	PH3 valve closed
12/16/2010	12:20:20 PM	SiCl4 pre valve closed
12/16/2010	12:20:20 PM	SiCl4 post valve closed
12/16/2010	12:20:20 PM	Bubbler valve closed
12/16/2010	12:20:20 PM	Helium valve opened
12/16/2010	12:20:20 PM	Main Vac valve opened
12/16/2010	12:20:20 PM	Bypass valve opened
12/16/2010	12:20:20 PM	Helium MFC set to  100.000000
12/16/2010	12:20:20 PM	H2 MFC set to  0.000000
12/16/2010	12:20:20 PM	BCl3 MFC set to  0.000000
12/16/2010	12:20:20 PM	PHl3 MFC set to  0.000000
12/16/2010	12:20:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:20:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:20:20 PM	Tube furnace set to 0
12/16/2010	12:21:20 PM	Helium valve closed
12/16/2010	12:21:20 PM	H2 valve closed
12/16/2010	12:21:20 PM	BCl3 valve closed
12/16/2010	12:21:20 PM	PH3 valve closed
12/16/2010	12:21:20 PM	SiCl4 pre valve closed
12/16/2010	12:21:20 PM	SiCl4 post valve closed
12/16/2010	12:21:20 PM	Bubbler valve closed
12/16/2010	12:21:20 PM	Main Vac valve opened
12/16/2010	12:21:20 PM	Bypass valve opened
12/16/2010	12:21:20 PM	Helium MFC set to  0.000000
12/16/2010	12:21:20 PM	H2 MFC set to  0.000000
12/16/2010	12:21:20 PM	BCl3 MFC set to  0.000000
12/16/2010	12:21:20 PM	PHl3 MFC set to  0.000000
12/16/2010	12:21:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:21:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:21:20 PM	Tube furnace set to 0
12/16/2010	12:22:20 PM	H2 valve closed
12/16/2010	12:22:20 PM	BCl3 valve closed
12/16/2010	12:22:20 PM	PH3 valve closed
12/16/2010	12:22:20 PM	SiCl4 pre valve closed
12/16/2010	12:22:20 PM	SiCl4 post valve closed
12/16/2010	12:22:20 PM	Bubbler valve closed
12/16/2010	12:22:20 PM	Helium valve opened
12/16/2010	12:22:20 PM	Main Vac valve opened
12/16/2010	12:22:20 PM	Bypass valve opened
12/16/2010	12:22:20 PM	Helium MFC set to  100.000000
12/16/2010	12:22:20 PM	H2 MFC set to  0.000000
12/16/2010	12:22:20 PM	BCl3 MFC set to  0.000000
12/16/2010	12:22:20 PM	PHl3 MFC set to  0.000000
12/16/2010	12:22:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:22:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:22:20 PM	Tube furnace set to 0
12/16/2010	12:23:20 PM	Helium valve closed
12/16/2010	12:23:20 PM	H2 valve closed
12/16/2010	12:23:20 PM	BCl3 valve closed
12/16/2010	12:23:20 PM	PH3 valve closed
12/16/2010	12:23:20 PM	SiCl4 pre valve closed
12/16/2010	12:23:20 PM	SiCl4 post valve closed
12/16/2010	12:23:20 PM	Bubbler valve closed
12/16/2010	12:23:20 PM	Main Vac valve opened
12/16/2010	12:23:20 PM	Bypass valve opened
12/16/2010	12:23:20 PM	Helium MFC set to  0.000000
12/16/2010	12:23:20 PM	H2 MFC set to  0.000000
12/16/2010	12:23:20 PM	BCl3 MFC set to  0.000000
12/16/2010	12:23:20 PM	PHl3 MFC set to  0.000000
12/16/2010	12:23:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:23:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:23:21 PM	Tube furnace set to 0
12/16/2010	12:24:21 PM	H2 valve closed
12/16/2010	12:24:21 PM	BCl3 valve closed
12/16/2010	12:24:21 PM	PH3 valve closed
12/16/2010	12:24:21 PM	SiCl4 pre valve closed
12/16/2010	12:24:21 PM	SiCl4 post valve closed
12/16/2010	12:24:21 PM	Bubbler valve closed
12/16/2010	12:24:21 PM	Helium valve opened
12/16/2010	12:24:21 PM	Main Vac valve opened
12/16/2010	12:24:21 PM	Bypass valve opened
12/16/2010	12:24:21 PM	Helium MFC set to  100.000000
12/16/2010	12:24:21 PM	H2 MFC set to  0.000000
12/16/2010	12:24:21 PM	BCl3 MFC set to  0.000000
12/16/2010	12:24:21 PM	PHl3 MFC set to  0.000000
12/16/2010	12:24:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:24:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:24:21 PM	Tube furnace set to 0
12/16/2010	12:25:21 PM	Helium valve closed
12/16/2010	12:25:21 PM	H2 valve closed
12/16/2010	12:25:21 PM	BCl3 valve closed
12/16/2010	12:25:21 PM	PH3 valve closed
12/16/2010	12:25:21 PM	SiCl4 pre valve closed
12/16/2010	12:25:21 PM	SiCl4 post valve closed
12/16/2010	12:25:21 PM	Bubbler valve closed
12/16/2010	12:25:21 PM	Main Vac valve opened
12/16/2010	12:25:21 PM	Bypass valve opened
12/16/2010	12:25:21 PM	Helium MFC set to  0.000000
12/16/2010	12:25:21 PM	H2 MFC set to  0.000000
12/16/2010	12:25:21 PM	BCl3 MFC set to  0.000000
12/16/2010	12:25:21 PM	PHl3 MFC set to  0.000000
12/16/2010	12:25:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:25:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:25:21 PM	Tube furnace set to 0
12/16/2010	12:26:21 PM	H2 valve closed
12/16/2010	12:26:21 PM	BCl3 valve closed
12/16/2010	12:26:21 PM	PH3 valve closed
12/16/2010	12:26:21 PM	SiCl4 pre valve closed
12/16/2010	12:26:21 PM	SiCl4 post valve closed
12/16/2010	12:26:21 PM	Bubbler valve closed
12/16/2010	12:26:21 PM	Helium valve opened
12/16/2010	12:26:21 PM	Main Vac valve opened
12/16/2010	12:26:21 PM	Bypass valve opened
12/16/2010	12:26:21 PM	Helium MFC set to  100.000000
12/16/2010	12:26:21 PM	H2 MFC set to  0.000000
12/16/2010	12:26:21 PM	BCl3 MFC set to  0.000000
12/16/2010	12:26:21 PM	PHl3 MFC set to  0.000000
12/16/2010	12:26:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:26:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:26:21 PM	Tube furnace set to 0
12/16/2010	12:27:21 PM	Helium valve closed
12/16/2010	12:27:21 PM	H2 valve closed
12/16/2010	12:27:21 PM	BCl3 valve closed
12/16/2010	12:27:21 PM	PH3 valve closed
12/16/2010	12:27:21 PM	SiCl4 pre valve closed
12/16/2010	12:27:21 PM	SiCl4 post valve closed
12/16/2010	12:27:21 PM	Bubbler valve closed
12/16/2010	12:27:21 PM	Main Vac valve opened
12/16/2010	12:27:21 PM	Bypass valve opened
12/16/2010	12:27:21 PM	Helium MFC set to  0.000000
12/16/2010	12:27:21 PM	H2 MFC set to  0.000000
12/16/2010	12:27:21 PM	BCl3 MFC set to  0.000000
12/16/2010	12:27:21 PM	PHl3 MFC set to  0.000000
12/16/2010	12:27:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:27:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:27:21 PM	Tube furnace set to 0
12/16/2010	12:28:21 PM	H2 valve closed
12/16/2010	12:28:21 PM	BCl3 valve closed
12/16/2010	12:28:21 PM	PH3 valve closed
12/16/2010	12:28:21 PM	SiCl4 pre valve closed
12/16/2010	12:28:21 PM	SiCl4 post valve closed
12/16/2010	12:28:21 PM	Bubbler valve closed
12/16/2010	12:28:21 PM	Helium valve opened
12/16/2010	12:28:21 PM	Main Vac valve opened
12/16/2010	12:28:21 PM	Bypass valve opened
12/16/2010	12:28:21 PM	Helium MFC set to  100.000000
12/16/2010	12:28:21 PM	H2 MFC set to  0.000000
12/16/2010	12:28:21 PM	BCl3 MFC set to  0.000000
12/16/2010	12:28:21 PM	PHl3 MFC set to  0.000000
12/16/2010	12:28:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:28:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:28:21 PM	Tube furnace set to 0
12/16/2010	12:29:22 PM	Helium valve closed
12/16/2010	12:29:22 PM	H2 valve closed
12/16/2010	12:29:22 PM	BCl3 valve closed
12/16/2010	12:29:22 PM	PH3 valve closed
12/16/2010	12:29:22 PM	SiCl4 pre valve closed
12/16/2010	12:29:22 PM	SiCl4 post valve closed
12/16/2010	12:29:22 PM	Bubbler valve closed
12/16/2010	12:29:22 PM	Main Vac valve opened
12/16/2010	12:29:22 PM	Bypass valve opened
12/16/2010	12:29:22 PM	Helium MFC set to  0.000000
12/16/2010	12:29:22 PM	H2 MFC set to  0.000000
12/16/2010	12:29:22 PM	BCl3 MFC set to  0.000000
12/16/2010	12:29:22 PM	PHl3 MFC set to  0.000000
12/16/2010	12:29:22 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:29:22 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:29:22 PM	Tube furnace set to 0
12/16/2010	12:30:22 PM	H2 valve closed
12/16/2010	12:30:22 PM	BCl3 valve closed
12/16/2010	12:30:22 PM	PH3 valve closed
12/16/2010	12:30:22 PM	SiCl4 pre valve closed
12/16/2010	12:30:22 PM	SiCl4 post valve closed
12/16/2010	12:30:22 PM	Bubbler valve closed
12/16/2010	12:30:22 PM	Helium valve opened
12/16/2010	12:30:22 PM	Main Vac valve opened
12/16/2010	12:30:22 PM	Bypass valve opened
12/16/2010	12:30:22 PM	Helium MFC set to  100.000000
12/16/2010	12:30:22 PM	H2 MFC set to  0.000000
12/16/2010	12:30:22 PM	BCl3 MFC set to  0.000000
12/16/2010	12:30:22 PM	PHl3 MFC set to  0.000000
12/16/2010	12:30:22 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:30:22 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:30:22 PM	Tube furnace set to 0
12/16/2010	12:31:22 PM	Helium valve closed
12/16/2010	12:31:22 PM	H2 valve closed
12/16/2010	12:31:22 PM	BCl3 valve closed
12/16/2010	12:31:22 PM	PH3 valve closed
12/16/2010	12:31:22 PM	SiCl4 pre valve closed
12/16/2010	12:31:22 PM	SiCl4 post valve closed
12/16/2010	12:31:22 PM	Bubbler valve closed
12/16/2010	12:31:22 PM	Main Vac valve opened
12/16/2010	12:31:22 PM	Bypass valve opened
12/16/2010	12:31:22 PM	Helium MFC set to  0.000000
12/16/2010	12:31:22 PM	H2 MFC set to  0.000000
12/16/2010	12:31:22 PM	BCl3 MFC set to  0.000000
12/16/2010	12:31:22 PM	PHl3 MFC set to  0.000000
12/16/2010	12:31:22 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:31:22 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:31:22 PM	Tube furnace set to 0
12/16/2010	12:32:22 PM	H2 valve closed
12/16/2010	12:32:22 PM	BCl3 valve closed
12/16/2010	12:32:22 PM	PH3 valve closed
12/16/2010	12:32:22 PM	SiCl4 pre valve closed
12/16/2010	12:32:22 PM	SiCl4 post valve closed
12/16/2010	12:32:22 PM	Bubbler valve closed
12/16/2010	12:32:22 PM	Helium valve opened
12/16/2010	12:32:22 PM	Main Vac valve opened
12/16/2010	12:32:22 PM	Bypass valve opened
12/16/2010	12:32:22 PM	Helium MFC set to  100.000000
12/16/2010	12:32:22 PM	H2 MFC set to  0.000000
12/16/2010	12:32:22 PM	BCl3 MFC set to  0.000000
12/16/2010	12:32:22 PM	PHl3 MFC set to  0.000000
12/16/2010	12:32:22 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:32:22 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:32:22 PM	Tube furnace set to 0
12/16/2010	12:33:22 PM	Helium valve closed
12/16/2010	12:33:22 PM	H2 valve closed
12/16/2010	12:33:22 PM	BCl3 valve closed
12/16/2010	12:33:22 PM	PH3 valve closed
12/16/2010	12:33:22 PM	SiCl4 pre valve closed
12/16/2010	12:33:22 PM	SiCl4 post valve closed
12/16/2010	12:33:22 PM	Bubbler valve closed
12/16/2010	12:33:22 PM	Main Vac valve opened
12/16/2010	12:33:22 PM	Bypass valve opened
12/16/2010	12:33:22 PM	Helium MFC set to  0.000000
12/16/2010	12:33:22 PM	H2 MFC set to  0.000000
12/16/2010	12:33:22 PM	BCl3 MFC set to  0.000000
12/16/2010	12:33:22 PM	PHl3 MFC set to  0.000000
12/16/2010	12:33:22 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:33:22 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:33:22 PM	Tube furnace set to 0
12/16/2010	12:34:22 PM	H2 valve closed
12/16/2010	12:34:22 PM	BCl3 valve closed
12/16/2010	12:34:22 PM	PH3 valve closed
12/16/2010	12:34:22 PM	SiCl4 pre valve closed
12/16/2010	12:34:22 PM	SiCl4 post valve closed
12/16/2010	12:34:23 PM	Bubbler valve closed
12/16/2010	12:34:23 PM	Helium valve opened
12/16/2010	12:34:23 PM	Main Vac valve opened
12/16/2010	12:34:23 PM	Bypass valve opened
12/16/2010	12:34:23 PM	Helium MFC set to  100.000000
12/16/2010	12:34:23 PM	H2 MFC set to  0.000000
12/16/2010	12:34:23 PM	BCl3 MFC set to  0.000000
12/16/2010	12:34:23 PM	PHl3 MFC set to  0.000000
12/16/2010	12:34:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:34:23 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:34:23 PM	Tube furnace set to 0
12/16/2010	12:35:23 PM	Helium valve closed
12/16/2010	12:35:23 PM	H2 valve closed
12/16/2010	12:35:23 PM	BCl3 valve closed
12/16/2010	12:35:23 PM	PH3 valve closed
12/16/2010	12:35:23 PM	SiCl4 pre valve closed
12/16/2010	12:35:23 PM	SiCl4 post valve closed
12/16/2010	12:35:23 PM	Bubbler valve closed
12/16/2010	12:35:23 PM	Main Vac valve opened
12/16/2010	12:35:23 PM	Bypass valve opened
12/16/2010	12:35:23 PM	Helium MFC set to  0.000000
12/16/2010	12:35:23 PM	H2 MFC set to  0.000000
12/16/2010	12:35:23 PM	BCl3 MFC set to  0.000000
12/16/2010	12:35:23 PM	PHl3 MFC set to  0.000000
12/16/2010	12:35:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:35:23 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:35:23 PM	Tube furnace set to 0
12/16/2010	12:36:23 PM	H2 valve closed
12/16/2010	12:36:23 PM	BCl3 valve closed
12/16/2010	12:36:23 PM	PH3 valve closed
12/16/2010	12:36:23 PM	SiCl4 pre valve closed
12/16/2010	12:36:23 PM	SiCl4 post valve closed
12/16/2010	12:36:23 PM	Bubbler valve closed
12/16/2010	12:36:23 PM	Helium valve opened
12/16/2010	12:36:23 PM	Main Vac valve opened
12/16/2010	12:36:23 PM	Bypass valve opened
12/16/2010	12:36:23 PM	Helium MFC set to  100.000000
12/16/2010	12:36:23 PM	H2 MFC set to  0.000000
12/16/2010	12:36:23 PM	BCl3 MFC set to  0.000000
12/16/2010	12:36:23 PM	PHl3 MFC set to  0.000000
12/16/2010	12:36:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:36:23 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:36:23 PM	Tube furnace set to 0
12/16/2010	12:37:23 PM	Helium valve closed
12/16/2010	12:37:23 PM	H2 valve closed
12/16/2010	12:37:23 PM	BCl3 valve closed
12/16/2010	12:37:23 PM	PH3 valve closed
12/16/2010	12:37:23 PM	SiCl4 pre valve closed
12/16/2010	12:37:23 PM	SiCl4 post valve closed
12/16/2010	12:37:23 PM	Bubbler valve closed
12/16/2010	12:37:23 PM	Main Vac valve opened
12/16/2010	12:37:23 PM	Bypass valve opened
12/16/2010	12:37:23 PM	Helium MFC set to  0.000000
12/16/2010	12:37:23 PM	H2 MFC set to  0.000000
12/16/2010	12:37:23 PM	BCl3 MFC set to  0.000000
12/16/2010	12:37:23 PM	PHl3 MFC set to  0.000000
12/16/2010	12:37:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:37:23 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:37:23 PM	Tube furnace set to 0
12/16/2010	12:38:23 PM	H2 valve closed
12/16/2010	12:38:23 PM	BCl3 valve closed
12/16/2010	12:38:23 PM	PH3 valve closed
12/16/2010	12:38:23 PM	SiCl4 pre valve closed
12/16/2010	12:38:23 PM	SiCl4 post valve closed
12/16/2010	12:38:23 PM	Bubbler valve closed
12/16/2010	12:38:23 PM	Helium valve opened
12/16/2010	12:38:23 PM	Main Vac valve opened
12/16/2010	12:38:23 PM	Bypass valve opened
12/16/2010	12:38:23 PM	Helium MFC set to  100.000000
12/16/2010	12:38:23 PM	H2 MFC set to  0.000000
12/16/2010	12:38:23 PM	BCl3 MFC set to  0.000000
12/16/2010	12:38:23 PM	PHl3 MFC set to  0.000000
12/16/2010	12:38:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:38:23 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:38:23 PM	Tube furnace set to 0
12/16/2010	12:39:23 PM	Helium valve closed
12/16/2010	12:39:23 PM	H2 valve closed
12/16/2010	12:39:23 PM	BCl3 valve closed
12/16/2010	12:39:23 PM	PH3 valve closed
12/16/2010	12:39:23 PM	SiCl4 pre valve closed
12/16/2010	12:39:23 PM	SiCl4 post valve closed
12/16/2010	12:39:23 PM	Bubbler valve closed
12/16/2010	12:39:23 PM	Main Vac valve opened
12/16/2010	12:39:23 PM	Bypass valve opened
12/16/2010	12:39:23 PM	Helium MFC set to  0.000000
12/16/2010	12:39:23 PM	H2 MFC set to  0.000000
12/16/2010	12:39:23 PM	BCl3 MFC set to  0.000000
12/16/2010	12:39:23 PM	PHl3 MFC set to  0.000000
12/16/2010	12:39:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	12:39:23 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	12:39:24 PM	Tube furnace set to 0
12/16/2010	12:39:25 PM	Run finished at 12:39 PM
12/16/2010	12:39:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	1:32:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	1:32:45 PM	Recipe started at 1:32 PM
12/16/2010	1:32:45 PM	Helium valve closed
12/16/2010	1:32:45 PM	H2 valve closed
12/16/2010	1:32:45 PM	BCl3 valve closed
12/16/2010	1:32:45 PM	PH3 valve closed
12/16/2010	1:32:45 PM	SiCl4 pre valve closed
12/16/2010	1:32:45 PM	SiCl4 post valve closed
12/16/2010	1:32:45 PM	Main Vac valve closed
12/16/2010	1:32:45 PM	Bubbler valve closed
12/16/2010	1:32:45 PM	Bypass valve opened
12/16/2010	1:32:45 PM	Helium MFC set to  0.000000
12/16/2010	1:32:45 PM	H2 MFC set to  0.000000
12/16/2010	1:32:45 PM	BCl3 MFC set to  0.000000
12/16/2010	1:32:45 PM	PHl3 MFC set to  0.000000
12/16/2010	1:32:45 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:32:45 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:32:46 PM	Tube furnace set to 0
12/16/2010	1:32:46 PM	Helium valve closed
12/16/2010	1:32:46 PM	H2 valve closed
12/16/2010	1:32:46 PM	BCl3 valve closed
12/16/2010	1:32:46 PM	PH3 valve closed
12/16/2010	1:32:46 PM	SiCl4 pre valve closed
12/16/2010	1:32:46 PM	SiCl4 post valve closed
12/16/2010	1:32:46 PM	Bubbler valve closed
12/16/2010	1:32:46 PM	Main Vac valve opened
12/16/2010	1:32:46 PM	Bypass valve opened
12/16/2010	1:32:46 PM	Helium MFC set to  0.000000
12/16/2010	1:32:46 PM	H2 MFC set to  0.000000
12/16/2010	1:32:46 PM	BCl3 MFC set to  0.000000
12/16/2010	1:32:46 PM	PHl3 MFC set to  0.000000
12/16/2010	1:32:46 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:32:46 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:32:46 PM	Tube furnace set to 0
12/16/2010	1:33:46 PM	H2 valve closed
12/16/2010	1:33:46 PM	BCl3 valve closed
12/16/2010	1:33:46 PM	PH3 valve closed
12/16/2010	1:33:46 PM	SiCl4 pre valve closed
12/16/2010	1:33:46 PM	SiCl4 post valve closed
12/16/2010	1:33:46 PM	Bubbler valve closed
12/16/2010	1:33:46 PM	Helium valve opened
12/16/2010	1:33:46 PM	Main Vac valve opened
12/16/2010	1:33:46 PM	Bypass valve opened
12/16/2010	1:33:46 PM	Helium MFC set to  100.000000
12/16/2010	1:33:46 PM	H2 MFC set to  0.000000
12/16/2010	1:33:46 PM	BCl3 MFC set to  0.000000
12/16/2010	1:33:46 PM	PHl3 MFC set to  0.000000
12/16/2010	1:33:46 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:33:46 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:33:46 PM	Tube furnace set to 0
12/16/2010	1:34:46 PM	Helium valve closed
12/16/2010	1:34:46 PM	H2 valve closed
12/16/2010	1:34:46 PM	BCl3 valve closed
12/16/2010	1:34:46 PM	PH3 valve closed
12/16/2010	1:34:46 PM	SiCl4 pre valve closed
12/16/2010	1:34:46 PM	SiCl4 post valve closed
12/16/2010	1:34:46 PM	Bubbler valve closed
12/16/2010	1:34:46 PM	Main Vac valve opened
12/16/2010	1:34:46 PM	Bypass valve opened
12/16/2010	1:34:46 PM	Helium MFC set to  0.000000
12/16/2010	1:34:46 PM	H2 MFC set to  0.000000
12/16/2010	1:34:46 PM	BCl3 MFC set to  0.000000
12/16/2010	1:34:46 PM	PHl3 MFC set to  0.000000
12/16/2010	1:34:46 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:34:46 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:34:46 PM	Tube furnace set to 0
12/16/2010	1:35:46 PM	H2 valve closed
12/16/2010	1:35:46 PM	BCl3 valve closed
12/16/2010	1:35:46 PM	PH3 valve closed
12/16/2010	1:35:46 PM	SiCl4 pre valve closed
12/16/2010	1:35:46 PM	SiCl4 post valve closed
12/16/2010	1:35:46 PM	Bubbler valve closed
12/16/2010	1:35:46 PM	Helium valve opened
12/16/2010	1:35:46 PM	Main Vac valve opened
12/16/2010	1:35:46 PM	Bypass valve opened
12/16/2010	1:35:46 PM	Helium MFC set to  100.000000
12/16/2010	1:35:46 PM	H2 MFC set to  0.000000
12/16/2010	1:35:46 PM	BCl3 MFC set to  0.000000
12/16/2010	1:35:46 PM	PHl3 MFC set to  0.000000
12/16/2010	1:35:46 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:35:46 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:35:47 PM	Tube furnace set to 0
12/16/2010	1:36:47 PM	Helium valve closed
12/16/2010	1:36:47 PM	H2 valve closed
12/16/2010	1:36:47 PM	BCl3 valve closed
12/16/2010	1:36:47 PM	PH3 valve closed
12/16/2010	1:36:47 PM	SiCl4 pre valve closed
12/16/2010	1:36:47 PM	SiCl4 post valve closed
12/16/2010	1:36:47 PM	Bubbler valve closed
12/16/2010	1:36:47 PM	Main Vac valve opened
12/16/2010	1:36:47 PM	Bypass valve opened
12/16/2010	1:36:47 PM	Helium MFC set to  0.000000
12/16/2010	1:36:47 PM	H2 MFC set to  0.000000
12/16/2010	1:36:47 PM	BCl3 MFC set to  0.000000
12/16/2010	1:36:47 PM	PHl3 MFC set to  0.000000
12/16/2010	1:36:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:36:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:36:47 PM	Tube furnace set to 0
12/16/2010	1:37:47 PM	H2 valve closed
12/16/2010	1:37:47 PM	BCl3 valve closed
12/16/2010	1:37:47 PM	PH3 valve closed
12/16/2010	1:37:47 PM	SiCl4 pre valve closed
12/16/2010	1:37:47 PM	SiCl4 post valve closed
12/16/2010	1:37:47 PM	Bubbler valve closed
12/16/2010	1:37:47 PM	Helium valve opened
12/16/2010	1:37:47 PM	Main Vac valve opened
12/16/2010	1:37:47 PM	Bypass valve opened
12/16/2010	1:37:47 PM	Helium MFC set to  100.000000
12/16/2010	1:37:47 PM	H2 MFC set to  0.000000
12/16/2010	1:37:47 PM	BCl3 MFC set to  0.000000
12/16/2010	1:37:47 PM	PHl3 MFC set to  0.000000
12/16/2010	1:37:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:37:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:37:47 PM	Tube furnace set to 0
12/16/2010	1:38:47 PM	Helium valve closed
12/16/2010	1:38:47 PM	H2 valve closed
12/16/2010	1:38:47 PM	BCl3 valve closed
12/16/2010	1:38:47 PM	PH3 valve closed
12/16/2010	1:38:47 PM	SiCl4 pre valve closed
12/16/2010	1:38:47 PM	SiCl4 post valve closed
12/16/2010	1:38:47 PM	Bubbler valve closed
12/16/2010	1:38:47 PM	Main Vac valve opened
12/16/2010	1:38:47 PM	Bypass valve opened
12/16/2010	1:38:47 PM	Helium MFC set to  0.000000
12/16/2010	1:38:47 PM	H2 MFC set to  0.000000
12/16/2010	1:38:47 PM	BCl3 MFC set to  0.000000
12/16/2010	1:38:47 PM	PHl3 MFC set to  0.000000
12/16/2010	1:38:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:38:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:38:47 PM	Tube furnace set to 0
12/16/2010	1:39:47 PM	H2 valve closed
12/16/2010	1:39:47 PM	BCl3 valve closed
12/16/2010	1:39:47 PM	PH3 valve closed
12/16/2010	1:39:47 PM	SiCl4 pre valve closed
12/16/2010	1:39:47 PM	SiCl4 post valve closed
12/16/2010	1:39:47 PM	Bubbler valve closed
12/16/2010	1:39:47 PM	Helium valve opened
12/16/2010	1:39:47 PM	Main Vac valve opened
12/16/2010	1:39:47 PM	Bypass valve opened
12/16/2010	1:39:47 PM	Helium MFC set to  100.000000
12/16/2010	1:39:47 PM	H2 MFC set to  0.000000
12/16/2010	1:39:47 PM	BCl3 MFC set to  0.000000
12/16/2010	1:39:47 PM	PHl3 MFC set to  0.000000
12/16/2010	1:39:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:39:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:39:47 PM	Tube furnace set to 0
12/16/2010	1:40:47 PM	Helium valve closed
12/16/2010	1:40:47 PM	H2 valve closed
12/16/2010	1:40:47 PM	BCl3 valve closed
12/16/2010	1:40:47 PM	PH3 valve closed
12/16/2010	1:40:47 PM	SiCl4 pre valve closed
12/16/2010	1:40:47 PM	SiCl4 post valve closed
12/16/2010	1:40:47 PM	Bubbler valve closed
12/16/2010	1:40:47 PM	Main Vac valve opened
12/16/2010	1:40:47 PM	Bypass valve opened
12/16/2010	1:40:47 PM	Helium MFC set to  0.000000
12/16/2010	1:40:47 PM	H2 MFC set to  0.000000
12/16/2010	1:40:47 PM	BCl3 MFC set to  0.000000
12/16/2010	1:40:47 PM	PHl3 MFC set to  0.000000
12/16/2010	1:40:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:40:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:40:48 PM	Tube furnace set to 0
12/16/2010	1:41:48 PM	H2 valve closed
12/16/2010	1:41:48 PM	BCl3 valve closed
12/16/2010	1:41:48 PM	PH3 valve closed
12/16/2010	1:41:48 PM	SiCl4 pre valve closed
12/16/2010	1:41:48 PM	SiCl4 post valve closed
12/16/2010	1:41:48 PM	Bubbler valve closed
12/16/2010	1:41:48 PM	Helium valve opened
12/16/2010	1:41:48 PM	Main Vac valve opened
12/16/2010	1:41:48 PM	Bypass valve opened
12/16/2010	1:41:48 PM	Helium MFC set to  100.000000
12/16/2010	1:41:48 PM	H2 MFC set to  0.000000
12/16/2010	1:41:48 PM	BCl3 MFC set to  0.000000
12/16/2010	1:41:48 PM	PHl3 MFC set to  0.000000
12/16/2010	1:41:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:41:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:41:48 PM	Tube furnace set to 0
12/16/2010	1:42:48 PM	Helium valve closed
12/16/2010	1:42:48 PM	H2 valve closed
12/16/2010	1:42:48 PM	BCl3 valve closed
12/16/2010	1:42:48 PM	PH3 valve closed
12/16/2010	1:42:48 PM	SiCl4 pre valve closed
12/16/2010	1:42:48 PM	SiCl4 post valve closed
12/16/2010	1:42:48 PM	Bubbler valve closed
12/16/2010	1:42:48 PM	Main Vac valve opened
12/16/2010	1:42:48 PM	Bypass valve opened
12/16/2010	1:42:48 PM	Helium MFC set to  0.000000
12/16/2010	1:42:48 PM	H2 MFC set to  0.000000
12/16/2010	1:42:48 PM	BCl3 MFC set to  0.000000
12/16/2010	1:42:48 PM	PHl3 MFC set to  0.000000
12/16/2010	1:42:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:42:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:42:48 PM	Tube furnace set to 0
12/16/2010	1:43:27 PM	Run aborted at 1:43 PM
12/16/2010	1:43:27 PM	Helium valve closed
12/16/2010	1:43:27 PM	H2 valve closed
12/16/2010	1:43:27 PM	BCl3 valve closed
12/16/2010	1:43:27 PM	PH3 valve closed
12/16/2010	1:43:27 PM	SiCl4 pre valve closed
12/16/2010	1:43:27 PM	SiCl4 post valve closed
12/16/2010	1:43:27 PM	Bypass valve closed
12/16/2010	1:43:27 PM	Main Vac valve closed
12/16/2010	1:43:27 PM	Bubbler valve closed
12/16/2010	1:43:27 PM	Helium MFC set to  0.000000
12/16/2010	1:43:27 PM	H2 MFC set to  0.000000
12/16/2010	1:43:27 PM	BCl3 MFC set to  0.000000
12/16/2010	1:43:27 PM	PHl3 MFC set to  0.000000
12/16/2010	1:43:27 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:43:27 PM	Tube furnace set to 0
12/16/2010	1:43:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	1:43:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	1:43:29 PM	Recipe started at 1:43 PM
12/16/2010	1:43:29 PM	Helium valve closed
12/16/2010	1:43:29 PM	H2 valve closed
12/16/2010	1:43:29 PM	BCl3 valve closed
12/16/2010	1:43:29 PM	PH3 valve closed
12/16/2010	1:43:29 PM	SiCl4 pre valve closed
12/16/2010	1:43:29 PM	SiCl4 post valve closed
12/16/2010	1:43:29 PM	Main Vac valve closed
12/16/2010	1:43:29 PM	Bubbler valve closed
12/16/2010	1:43:29 PM	Bypass valve opened
12/16/2010	1:43:29 PM	Helium MFC set to  0.000000
12/16/2010	1:43:29 PM	H2 MFC set to  0.000000
12/16/2010	1:43:29 PM	BCl3 MFC set to  0.000000
12/16/2010	1:43:29 PM	PHl3 MFC set to  0.000000
12/16/2010	1:43:29 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:43:29 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:43:29 PM	Tube furnace set to 0
12/16/2010	1:43:29 PM	Helium valve closed
12/16/2010	1:43:29 PM	H2 valve closed
12/16/2010	1:43:29 PM	BCl3 valve closed
12/16/2010	1:43:29 PM	PH3 valve closed
12/16/2010	1:43:29 PM	SiCl4 pre valve closed
12/16/2010	1:43:29 PM	SiCl4 post valve closed
12/16/2010	1:43:29 PM	Bubbler valve closed
12/16/2010	1:43:29 PM	Main Vac valve opened
12/16/2010	1:43:29 PM	Bypass valve opened
12/16/2010	1:43:29 PM	Helium MFC set to  0.000000
12/16/2010	1:43:29 PM	H2 MFC set to  0.000000
12/16/2010	1:43:29 PM	BCl3 MFC set to  0.000000
12/16/2010	1:43:29 PM	PHl3 MFC set to  0.000000
12/16/2010	1:43:29 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:43:29 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:43:29 PM	Tube furnace set to 0
12/16/2010	1:43:30 PM	Run finished at 1:43 PM
12/16/2010	1:43:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	1:45:07 PM	Recipe started at 1:45 PM
12/16/2010	1:45:07 PM	Helium valve closed
12/16/2010	1:45:07 PM	BCl3 valve closed
12/16/2010	1:45:07 PM	PH3 valve closed
12/16/2010	1:45:07 PM	SiCl4 pre valve closed
12/16/2010	1:45:07 PM	SiCl4 post valve closed
12/16/2010	1:45:07 PM	Main Vac valve closed
12/16/2010	1:45:07 PM	Bypass valve closed
12/16/2010	1:45:07 PM	Bubbler valve closed
12/16/2010	1:45:07 PM	H2 valve opened
12/16/2010	1:45:07 PM	Helium MFC set to  0.000000
12/16/2010	1:45:07 PM	H2 MFC set to  500.000000
12/16/2010	1:45:07 PM	BCl3 MFC set to  0.000000
12/16/2010	1:45:07 PM	PHl3 MFC set to  0.000000
12/16/2010	1:45:07 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:45:07 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:45:07 PM	Tube furnace set to 0
12/16/2010	1:46:27 PM	Helium valve closed
12/16/2010	1:46:27 PM	BCl3 valve closed
12/16/2010	1:46:27 PM	PH3 valve closed
12/16/2010	1:46:27 PM	SiCl4 pre valve closed
12/16/2010	1:46:27 PM	SiCl4 post valve closed
12/16/2010	1:46:27 PM	Main Vac valve closed
12/16/2010	1:46:27 PM	Bypass valve closed
12/16/2010	1:46:27 PM	H2 valve opened
12/16/2010	1:46:27 PM	Bubbler valve opened
12/16/2010	1:46:27 PM	Helium MFC set to  0.000000
12/16/2010	1:46:27 PM	H2 MFC set to  500.000000
12/16/2010	1:46:27 PM	BCl3 MFC set to  0.000000
12/16/2010	1:46:27 PM	PHl3 MFC set to  0.000000
12/16/2010	1:46:27 PM	SiCl4 MFC set to  0.000000
12/16/2010	1:46:27 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	1:46:27 PM	Tube furnace set to 1000
12/16/2010	2:06:27 PM	Helium valve closed
12/16/2010	2:06:27 PM	PH3 valve closed
12/16/2010	2:06:27 PM	Main Vac valve closed
12/16/2010	2:06:27 PM	Bypass valve closed
12/16/2010	2:06:27 PM	H2 valve opened
12/16/2010	2:06:27 PM	BCl3 valve opened
12/16/2010	2:06:27 PM	SiCl4 pre valve opened
12/16/2010	2:06:27 PM	SiCl4 post valve opened
12/16/2010	2:06:27 PM	Bubbler valve opened
12/16/2010	2:06:27 PM	Helium MFC set to  0.000000
12/16/2010	2:06:27 PM	H2 MFC set to  500.000000
12/16/2010	2:06:27 PM	BCl3 MFC set to  12.000000
12/16/2010	2:06:27 PM	PHl3 MFC set to  0.000000
12/16/2010	2:06:27 PM	SiCl4 MFC set to  50.000000
12/16/2010	2:06:27 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	2:06:27 PM	Tube furnace set to 1000
12/16/2010	2:26:27 PM	H2 valve closed
12/16/2010	2:26:27 PM	BCl3 valve closed
12/16/2010	2:26:27 PM	PH3 valve closed
12/16/2010	2:26:27 PM	SiCl4 pre valve closed
12/16/2010	2:26:27 PM	SiCl4 post valve closed
12/16/2010	2:26:27 PM	Main Vac valve closed
12/16/2010	2:26:27 PM	Bypass valve closed
12/16/2010	2:26:27 PM	Helium valve opened
12/16/2010	2:26:27 PM	Bubbler valve opened
12/16/2010	2:26:27 PM	Helium MFC set to  500.000000
12/16/2010	2:26:27 PM	H2 MFC set to  0.000000
12/16/2010	2:26:27 PM	BCl3 MFC set to  0.000000
12/16/2010	2:26:27 PM	PHl3 MFC set to  0.000000
12/16/2010	2:26:27 PM	SiCl4 MFC set to  0.000000
12/16/2010	2:26:27 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	2:26:27 PM	Tube furnace set to 0
12/16/2010	2:46:27 PM	Helium valve closed
12/16/2010	2:46:27 PM	H2 valve closed
12/16/2010	2:46:27 PM	BCl3 valve closed
12/16/2010	2:46:27 PM	PH3 valve closed
12/16/2010	2:46:27 PM	SiCl4 pre valve closed
12/16/2010	2:46:27 PM	SiCl4 post valve closed
12/16/2010	2:46:27 PM	Main Vac valve closed
12/16/2010	2:46:27 PM	Bypass valve closed
12/16/2010	2:46:27 PM	Bubbler valve closed
12/16/2010	2:46:27 PM	Helium MFC set to  0.000000
12/16/2010	2:46:27 PM	H2 MFC set to  0.000000
12/16/2010	2:46:27 PM	BCl3 MFC set to  0.000000
12/16/2010	2:46:27 PM	PHl3 MFC set to  0.000000
12/16/2010	2:46:27 PM	SiCl4 MFC set to  0.000000
12/16/2010	2:46:27 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	2:46:27 PM	Tube furnace set to 0
12/16/2010	2:46:28 PM	Run finished at 2:46 PM
12/16/2010	3:38:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	3:38:47 PM	Recipe started at 3:38 PM
12/16/2010	3:38:47 PM	Helium valve closed
12/16/2010	3:38:47 PM	H2 valve closed
12/16/2010	3:38:47 PM	BCl3 valve closed
12/16/2010	3:38:47 PM	PH3 valve closed
12/16/2010	3:38:47 PM	SiCl4 pre valve closed
12/16/2010	3:38:47 PM	SiCl4 post valve closed
12/16/2010	3:38:47 PM	Main Vac valve closed
12/16/2010	3:38:47 PM	Bubbler valve closed
12/16/2010	3:38:47 PM	Bypass valve opened
12/16/2010	3:38:47 PM	Helium MFC set to  0.000000
12/16/2010	3:38:47 PM	H2 MFC set to  0.000000
12/16/2010	3:38:47 PM	BCl3 MFC set to  0.000000
12/16/2010	3:38:47 PM	PHl3 MFC set to  0.000000
12/16/2010	3:38:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:38:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:38:47 PM	Tube furnace set to 0
12/16/2010	3:39:43 PM	Helium valve closed
12/16/2010	3:39:43 PM	H2 valve closed
12/16/2010	3:39:43 PM	BCl3 valve closed
12/16/2010	3:39:43 PM	PH3 valve closed
12/16/2010	3:39:43 PM	SiCl4 pre valve closed
12/16/2010	3:39:43 PM	SiCl4 post valve closed
12/16/2010	3:39:43 PM	Bubbler valve closed
12/16/2010	3:39:43 PM	Main Vac valve opened
12/16/2010	3:39:43 PM	Bypass valve opened
12/16/2010	3:39:43 PM	Helium MFC set to  0.000000
12/16/2010	3:39:43 PM	H2 MFC set to  0.000000
12/16/2010	3:39:43 PM	BCl3 MFC set to  0.000000
12/16/2010	3:39:43 PM	PHl3 MFC set to  0.000000
12/16/2010	3:39:43 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:39:43 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:39:44 PM	Tube furnace set to 0
12/16/2010	3:39:44 PM	Run finished at 3:39 PM
12/16/2010	3:39:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	3:49:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	3:50:02 PM	Recipe started at 3:49 PM
12/16/2010	3:50:02 PM	Helium valve closed
12/16/2010	3:50:02 PM	H2 valve closed
12/16/2010	3:50:02 PM	BCl3 valve closed
12/16/2010	3:50:02 PM	PH3 valve closed
12/16/2010	3:50:02 PM	SiCl4 pre valve closed
12/16/2010	3:50:02 PM	SiCl4 post valve closed
12/16/2010	3:50:02 PM	Main Vac valve closed
12/16/2010	3:50:02 PM	Bubbler valve closed
12/16/2010	3:50:02 PM	Bypass valve opened
12/16/2010	3:50:02 PM	Helium MFC set to  0.000000
12/16/2010	3:50:02 PM	H2 MFC set to  0.000000
12/16/2010	3:50:02 PM	BCl3 MFC set to  0.000000
12/16/2010	3:50:02 PM	PHl3 MFC set to  0.000000
12/16/2010	3:50:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:50:02 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:50:03 PM	Tube furnace set to 0
12/16/2010	3:50:03 PM	Helium valve closed
12/16/2010	3:50:03 PM	H2 valve closed
12/16/2010	3:50:03 PM	BCl3 valve closed
12/16/2010	3:50:03 PM	PH3 valve closed
12/16/2010	3:50:03 PM	SiCl4 pre valve closed
12/16/2010	3:50:03 PM	SiCl4 post valve closed
12/16/2010	3:50:03 PM	Bubbler valve closed
12/16/2010	3:50:03 PM	Main Vac valve opened
12/16/2010	3:50:03 PM	Bypass valve opened
12/16/2010	3:50:03 PM	Helium MFC set to  0.000000
12/16/2010	3:50:03 PM	H2 MFC set to  0.000000
12/16/2010	3:50:03 PM	BCl3 MFC set to  0.000000
12/16/2010	3:50:03 PM	PHl3 MFC set to  0.000000
12/16/2010	3:50:03 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:50:03 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:50:03 PM	Tube furnace set to 0
12/16/2010	3:51:03 PM	H2 valve closed
12/16/2010	3:51:03 PM	BCl3 valve closed
12/16/2010	3:51:03 PM	PH3 valve closed
12/16/2010	3:51:03 PM	SiCl4 pre valve closed
12/16/2010	3:51:03 PM	SiCl4 post valve closed
12/16/2010	3:51:03 PM	Bubbler valve closed
12/16/2010	3:51:03 PM	Helium valve opened
12/16/2010	3:51:03 PM	Main Vac valve opened
12/16/2010	3:51:03 PM	Bypass valve opened
12/16/2010	3:51:03 PM	Helium MFC set to  100.000000
12/16/2010	3:51:03 PM	H2 MFC set to  0.000000
12/16/2010	3:51:03 PM	BCl3 MFC set to  0.000000
12/16/2010	3:51:03 PM	PHl3 MFC set to  0.000000
12/16/2010	3:51:03 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:51:03 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:51:03 PM	Tube furnace set to 0
12/16/2010	3:52:03 PM	Helium valve closed
12/16/2010	3:52:03 PM	H2 valve closed
12/16/2010	3:52:03 PM	BCl3 valve closed
12/16/2010	3:52:03 PM	PH3 valve closed
12/16/2010	3:52:03 PM	SiCl4 pre valve closed
12/16/2010	3:52:03 PM	SiCl4 post valve closed
12/16/2010	3:52:03 PM	Bubbler valve closed
12/16/2010	3:52:03 PM	Main Vac valve opened
12/16/2010	3:52:03 PM	Bypass valve opened
12/16/2010	3:52:03 PM	Helium MFC set to  0.000000
12/16/2010	3:52:03 PM	H2 MFC set to  0.000000
12/16/2010	3:52:03 PM	BCl3 MFC set to  0.000000
12/16/2010	3:52:03 PM	PHl3 MFC set to  0.000000
12/16/2010	3:52:03 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:52:03 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:52:03 PM	Tube furnace set to 0
12/16/2010	3:53:03 PM	H2 valve closed
12/16/2010	3:53:03 PM	BCl3 valve closed
12/16/2010	3:53:03 PM	PH3 valve closed
12/16/2010	3:53:03 PM	SiCl4 pre valve closed
12/16/2010	3:53:03 PM	SiCl4 post valve closed
12/16/2010	3:53:03 PM	Bubbler valve closed
12/16/2010	3:53:03 PM	Helium valve opened
12/16/2010	3:53:04 PM	Main Vac valve opened
12/16/2010	3:53:04 PM	Bypass valve opened
12/16/2010	3:53:04 PM	Helium MFC set to  100.000000
12/16/2010	3:53:04 PM	H2 MFC set to  0.000000
12/16/2010	3:53:04 PM	BCl3 MFC set to  0.000000
12/16/2010	3:53:04 PM	PHl3 MFC set to  0.000000
12/16/2010	3:53:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:53:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:53:04 PM	Tube furnace set to 0
12/16/2010	3:54:04 PM	Helium valve closed
12/16/2010	3:54:04 PM	H2 valve closed
12/16/2010	3:54:04 PM	BCl3 valve closed
12/16/2010	3:54:04 PM	PH3 valve closed
12/16/2010	3:54:04 PM	SiCl4 pre valve closed
12/16/2010	3:54:04 PM	SiCl4 post valve closed
12/16/2010	3:54:04 PM	Bubbler valve closed
12/16/2010	3:54:04 PM	Main Vac valve opened
12/16/2010	3:54:04 PM	Bypass valve opened
12/16/2010	3:54:04 PM	Helium MFC set to  0.000000
12/16/2010	3:54:04 PM	H2 MFC set to  0.000000
12/16/2010	3:54:04 PM	BCl3 MFC set to  0.000000
12/16/2010	3:54:04 PM	PHl3 MFC set to  0.000000
12/16/2010	3:54:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:54:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:54:04 PM	Tube furnace set to 0
12/16/2010	3:55:04 PM	H2 valve closed
12/16/2010	3:55:04 PM	BCl3 valve closed
12/16/2010	3:55:04 PM	PH3 valve closed
12/16/2010	3:55:04 PM	SiCl4 pre valve closed
12/16/2010	3:55:04 PM	SiCl4 post valve closed
12/16/2010	3:55:04 PM	Bubbler valve closed
12/16/2010	3:55:04 PM	Helium valve opened
12/16/2010	3:55:04 PM	Main Vac valve opened
12/16/2010	3:55:04 PM	Bypass valve opened
12/16/2010	3:55:04 PM	Helium MFC set to  100.000000
12/16/2010	3:55:04 PM	H2 MFC set to  0.000000
12/16/2010	3:55:04 PM	BCl3 MFC set to  0.000000
12/16/2010	3:55:04 PM	PHl3 MFC set to  0.000000
12/16/2010	3:55:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:55:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:55:04 PM	Tube furnace set to 0
12/16/2010	3:56:04 PM	Helium valve closed
12/16/2010	3:56:04 PM	H2 valve closed
12/16/2010	3:56:04 PM	BCl3 valve closed
12/16/2010	3:56:04 PM	PH3 valve closed
12/16/2010	3:56:04 PM	SiCl4 pre valve closed
12/16/2010	3:56:04 PM	SiCl4 post valve closed
12/16/2010	3:56:04 PM	Bubbler valve closed
12/16/2010	3:56:04 PM	Main Vac valve opened
12/16/2010	3:56:04 PM	Bypass valve opened
12/16/2010	3:56:04 PM	Helium MFC set to  0.000000
12/16/2010	3:56:04 PM	H2 MFC set to  0.000000
12/16/2010	3:56:04 PM	BCl3 MFC set to  0.000000
12/16/2010	3:56:04 PM	PHl3 MFC set to  0.000000
12/16/2010	3:56:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:56:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:56:04 PM	Tube furnace set to 0
12/16/2010	3:57:04 PM	H2 valve closed
12/16/2010	3:57:04 PM	BCl3 valve closed
12/16/2010	3:57:04 PM	PH3 valve closed
12/16/2010	3:57:04 PM	SiCl4 pre valve closed
12/16/2010	3:57:04 PM	SiCl4 post valve closed
12/16/2010	3:57:04 PM	Bubbler valve closed
12/16/2010	3:57:04 PM	Helium valve opened
12/16/2010	3:57:04 PM	Main Vac valve opened
12/16/2010	3:57:04 PM	Bypass valve opened
12/16/2010	3:57:04 PM	Helium MFC set to  100.000000
12/16/2010	3:57:04 PM	H2 MFC set to  0.000000
12/16/2010	3:57:04 PM	BCl3 MFC set to  0.000000
12/16/2010	3:57:04 PM	PHl3 MFC set to  0.000000
12/16/2010	3:57:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:57:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:57:04 PM	Tube furnace set to 0
12/16/2010	3:58:04 PM	Helium valve closed
12/16/2010	3:58:04 PM	H2 valve closed
12/16/2010	3:58:04 PM	BCl3 valve closed
12/16/2010	3:58:04 PM	PH3 valve closed
12/16/2010	3:58:04 PM	SiCl4 pre valve closed
12/16/2010	3:58:04 PM	SiCl4 post valve closed
12/16/2010	3:58:04 PM	Bubbler valve closed
12/16/2010	3:58:04 PM	Main Vac valve opened
12/16/2010	3:58:04 PM	Bypass valve opened
12/16/2010	3:58:04 PM	Helium MFC set to  0.000000
12/16/2010	3:58:04 PM	H2 MFC set to  0.000000
12/16/2010	3:58:04 PM	BCl3 MFC set to  0.000000
12/16/2010	3:58:04 PM	PHl3 MFC set to  0.000000
12/16/2010	3:58:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:58:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:58:05 PM	Tube furnace set to 0
12/16/2010	3:59:05 PM	H2 valve closed
12/16/2010	3:59:05 PM	BCl3 valve closed
12/16/2010	3:59:05 PM	PH3 valve closed
12/16/2010	3:59:05 PM	SiCl4 pre valve closed
12/16/2010	3:59:05 PM	SiCl4 post valve closed
12/16/2010	3:59:05 PM	Bubbler valve closed
12/16/2010	3:59:05 PM	Helium valve opened
12/16/2010	3:59:05 PM	Main Vac valve opened
12/16/2010	3:59:05 PM	Bypass valve opened
12/16/2010	3:59:05 PM	Helium MFC set to  100.000000
12/16/2010	3:59:05 PM	H2 MFC set to  0.000000
12/16/2010	3:59:05 PM	BCl3 MFC set to  0.000000
12/16/2010	3:59:05 PM	PHl3 MFC set to  0.000000
12/16/2010	3:59:05 PM	SiCl4 MFC set to  0.000000
12/16/2010	3:59:05 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	3:59:05 PM	Tube furnace set to 0
12/16/2010	4:00:05 PM	Helium valve closed
12/16/2010	4:00:05 PM	H2 valve closed
12/16/2010	4:00:05 PM	BCl3 valve closed
12/16/2010	4:00:05 PM	PH3 valve closed
12/16/2010	4:00:05 PM	SiCl4 pre valve closed
12/16/2010	4:00:05 PM	SiCl4 post valve closed
12/16/2010	4:00:05 PM	Bubbler valve closed
12/16/2010	4:00:05 PM	Main Vac valve opened
12/16/2010	4:00:05 PM	Bypass valve opened
12/16/2010	4:00:05 PM	Helium MFC set to  0.000000
12/16/2010	4:00:05 PM	H2 MFC set to  0.000000
12/16/2010	4:00:05 PM	BCl3 MFC set to  0.000000
12/16/2010	4:00:05 PM	PHl3 MFC set to  0.000000
12/16/2010	4:00:05 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:00:05 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:00:05 PM	Tube furnace set to 0
12/16/2010	4:01:05 PM	H2 valve closed
12/16/2010	4:01:05 PM	BCl3 valve closed
12/16/2010	4:01:05 PM	PH3 valve closed
12/16/2010	4:01:05 PM	SiCl4 pre valve closed
12/16/2010	4:01:05 PM	SiCl4 post valve closed
12/16/2010	4:01:05 PM	Bubbler valve closed
12/16/2010	4:01:05 PM	Helium valve opened
12/16/2010	4:01:05 PM	Main Vac valve opened
12/16/2010	4:01:05 PM	Bypass valve opened
12/16/2010	4:01:05 PM	Helium MFC set to  100.000000
12/16/2010	4:01:05 PM	H2 MFC set to  0.000000
12/16/2010	4:01:05 PM	BCl3 MFC set to  0.000000
12/16/2010	4:01:05 PM	PHl3 MFC set to  0.000000
12/16/2010	4:01:05 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:01:05 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:01:05 PM	Tube furnace set to 0
12/16/2010	4:01:23 PM	Run aborted at 4:01 PM
12/16/2010	4:01:23 PM	Helium valve closed
12/16/2010	4:01:23 PM	H2 valve closed
12/16/2010	4:01:23 PM	BCl3 valve closed
12/16/2010	4:01:23 PM	PH3 valve closed
12/16/2010	4:01:23 PM	SiCl4 pre valve closed
12/16/2010	4:01:23 PM	SiCl4 post valve closed
12/16/2010	4:01:23 PM	Bypass valve closed
12/16/2010	4:01:23 PM	Main Vac valve closed
12/16/2010	4:01:23 PM	Bubbler valve closed
12/16/2010	4:01:23 PM	Helium MFC set to  0.000000
12/16/2010	4:01:23 PM	H2 MFC set to  0.000000
12/16/2010	4:01:23 PM	BCl3 MFC set to  0.000000
12/16/2010	4:01:23 PM	PHl3 MFC set to  0.000000
12/16/2010	4:01:23 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:01:23 PM	Tube furnace set to 0
12/16/2010	4:01:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	4:01:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	4:01:26 PM	Recipe started at 4:01 PM
12/16/2010	4:01:26 PM	Helium valve closed
12/16/2010	4:01:26 PM	H2 valve closed
12/16/2010	4:01:26 PM	BCl3 valve closed
12/16/2010	4:01:26 PM	PH3 valve closed
12/16/2010	4:01:26 PM	SiCl4 pre valve closed
12/16/2010	4:01:26 PM	SiCl4 post valve closed
12/16/2010	4:01:26 PM	Main Vac valve closed
12/16/2010	4:01:26 PM	Bubbler valve closed
12/16/2010	4:01:26 PM	Bypass valve opened
12/16/2010	4:01:26 PM	Helium MFC set to  0.000000
12/16/2010	4:01:26 PM	H2 MFC set to  0.000000
12/16/2010	4:01:26 PM	BCl3 MFC set to  0.000000
12/16/2010	4:01:26 PM	PHl3 MFC set to  0.000000
12/16/2010	4:01:26 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:01:26 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:01:26 PM	Tube furnace set to 0
12/16/2010	4:01:27 PM	Helium valve closed
12/16/2010	4:01:27 PM	H2 valve closed
12/16/2010	4:01:27 PM	BCl3 valve closed
12/16/2010	4:01:27 PM	PH3 valve closed
12/16/2010	4:01:27 PM	SiCl4 pre valve closed
12/16/2010	4:01:27 PM	SiCl4 post valve closed
12/16/2010	4:01:27 PM	Bubbler valve closed
12/16/2010	4:01:27 PM	Main Vac valve opened
12/16/2010	4:01:27 PM	Bypass valve opened
12/16/2010	4:01:27 PM	Helium MFC set to  0.000000
12/16/2010	4:01:27 PM	H2 MFC set to  0.000000
12/16/2010	4:01:27 PM	BCl3 MFC set to  0.000000
12/16/2010	4:01:27 PM	PHl3 MFC set to  0.000000
12/16/2010	4:01:27 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:01:27 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:01:27 PM	Tube furnace set to 0
12/16/2010	4:01:27 PM	Run finished at 4:01 PM
12/16/2010	4:01:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	4:05:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	4:05:48 PM	Recipe started at 4:05 PM
12/16/2010	4:05:48 PM	Helium valve closed
12/16/2010	4:05:48 PM	H2 valve closed
12/16/2010	4:05:48 PM	BCl3 valve closed
12/16/2010	4:05:48 PM	PH3 valve closed
12/16/2010	4:05:48 PM	SiCl4 pre valve closed
12/16/2010	4:05:48 PM	SiCl4 post valve closed
12/16/2010	4:05:48 PM	Main Vac valve closed
12/16/2010	4:05:48 PM	Bubbler valve closed
12/16/2010	4:05:48 PM	Bypass valve opened
12/16/2010	4:05:48 PM	Helium MFC set to  0.000000
12/16/2010	4:05:48 PM	H2 MFC set to  0.000000
12/16/2010	4:05:48 PM	BCl3 MFC set to  0.000000
12/16/2010	4:05:48 PM	PHl3 MFC set to  0.000000
12/16/2010	4:05:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:05:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:05:48 PM	Tube furnace set to 0
12/16/2010	4:05:49 PM	Helium valve closed
12/16/2010	4:05:49 PM	H2 valve closed
12/16/2010	4:05:49 PM	BCl3 valve closed
12/16/2010	4:05:49 PM	PH3 valve closed
12/16/2010	4:05:49 PM	SiCl4 pre valve closed
12/16/2010	4:05:49 PM	SiCl4 post valve closed
12/16/2010	4:05:49 PM	Bubbler valve closed
12/16/2010	4:05:49 PM	Main Vac valve opened
12/16/2010	4:05:49 PM	Bypass valve opened
12/16/2010	4:05:49 PM	Helium MFC set to  0.000000
12/16/2010	4:05:49 PM	H2 MFC set to  0.000000
12/16/2010	4:05:49 PM	BCl3 MFC set to  0.000000
12/16/2010	4:05:49 PM	PHl3 MFC set to  0.000000
12/16/2010	4:05:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:05:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:05:49 PM	Tube furnace set to 0
12/16/2010	4:06:49 PM	H2 valve closed
12/16/2010	4:06:49 PM	BCl3 valve closed
12/16/2010	4:06:49 PM	PH3 valve closed
12/16/2010	4:06:49 PM	SiCl4 pre valve closed
12/16/2010	4:06:49 PM	SiCl4 post valve closed
12/16/2010	4:06:49 PM	Bubbler valve closed
12/16/2010	4:06:49 PM	Helium valve opened
12/16/2010	4:06:49 PM	Main Vac valve opened
12/16/2010	4:06:49 PM	Bypass valve opened
12/16/2010	4:06:49 PM	Helium MFC set to  100.000000
12/16/2010	4:06:49 PM	H2 MFC set to  0.000000
12/16/2010	4:06:49 PM	BCl3 MFC set to  0.000000
12/16/2010	4:06:49 PM	PHl3 MFC set to  0.000000
12/16/2010	4:06:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:06:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:06:49 PM	Tube furnace set to 0
12/16/2010	4:07:49 PM	Helium valve closed
12/16/2010	4:07:49 PM	H2 valve closed
12/16/2010	4:07:49 PM	BCl3 valve closed
12/16/2010	4:07:49 PM	PH3 valve closed
12/16/2010	4:07:49 PM	SiCl4 pre valve closed
12/16/2010	4:07:49 PM	SiCl4 post valve closed
12/16/2010	4:07:49 PM	Bubbler valve closed
12/16/2010	4:07:49 PM	Main Vac valve opened
12/16/2010	4:07:49 PM	Bypass valve opened
12/16/2010	4:07:49 PM	Helium MFC set to  0.000000
12/16/2010	4:07:49 PM	H2 MFC set to  0.000000
12/16/2010	4:07:49 PM	BCl3 MFC set to  0.000000
12/16/2010	4:07:49 PM	PHl3 MFC set to  0.000000
12/16/2010	4:07:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:07:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:07:49 PM	Tube furnace set to 0
12/16/2010	4:08:49 PM	H2 valve closed
12/16/2010	4:08:49 PM	BCl3 valve closed
12/16/2010	4:08:49 PM	PH3 valve closed
12/16/2010	4:08:49 PM	SiCl4 pre valve closed
12/16/2010	4:08:49 PM	SiCl4 post valve closed
12/16/2010	4:08:49 PM	Bubbler valve closed
12/16/2010	4:08:49 PM	Helium valve opened
12/16/2010	4:08:49 PM	Main Vac valve opened
12/16/2010	4:08:49 PM	Bypass valve opened
12/16/2010	4:08:49 PM	Helium MFC set to  100.000000
12/16/2010	4:08:49 PM	H2 MFC set to  0.000000
12/16/2010	4:08:49 PM	BCl3 MFC set to  0.000000
12/16/2010	4:08:49 PM	PHl3 MFC set to  0.000000
12/16/2010	4:08:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:08:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:08:49 PM	Tube furnace set to 0
12/16/2010	4:09:49 PM	Helium valve closed
12/16/2010	4:09:49 PM	H2 valve closed
12/16/2010	4:09:49 PM	BCl3 valve closed
12/16/2010	4:09:49 PM	PH3 valve closed
12/16/2010	4:09:49 PM	SiCl4 pre valve closed
12/16/2010	4:09:49 PM	SiCl4 post valve closed
12/16/2010	4:09:49 PM	Bubbler valve closed
12/16/2010	4:09:49 PM	Main Vac valve opened
12/16/2010	4:09:49 PM	Bypass valve opened
12/16/2010	4:09:49 PM	Helium MFC set to  0.000000
12/16/2010	4:09:49 PM	H2 MFC set to  0.000000
12/16/2010	4:09:49 PM	BCl3 MFC set to  0.000000
12/16/2010	4:09:49 PM	PHl3 MFC set to  0.000000
12/16/2010	4:09:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:09:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:09:50 PM	Tube furnace set to 0
12/16/2010	4:10:50 PM	H2 valve closed
12/16/2010	4:10:50 PM	BCl3 valve closed
12/16/2010	4:10:50 PM	PH3 valve closed
12/16/2010	4:10:50 PM	SiCl4 pre valve closed
12/16/2010	4:10:50 PM	SiCl4 post valve closed
12/16/2010	4:10:50 PM	Bubbler valve closed
12/16/2010	4:10:50 PM	Helium valve opened
12/16/2010	4:10:50 PM	Main Vac valve opened
12/16/2010	4:10:50 PM	Bypass valve opened
12/16/2010	4:10:50 PM	Helium MFC set to  100.000000
12/16/2010	4:10:50 PM	H2 MFC set to  0.000000
12/16/2010	4:10:50 PM	BCl3 MFC set to  0.000000
12/16/2010	4:10:50 PM	PHl3 MFC set to  0.000000
12/16/2010	4:10:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:10:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:10:50 PM	Tube furnace set to 0
12/16/2010	4:11:50 PM	Helium valve closed
12/16/2010	4:11:50 PM	H2 valve closed
12/16/2010	4:11:50 PM	BCl3 valve closed
12/16/2010	4:11:50 PM	PH3 valve closed
12/16/2010	4:11:50 PM	SiCl4 pre valve closed
12/16/2010	4:11:50 PM	SiCl4 post valve closed
12/16/2010	4:11:50 PM	Bubbler valve closed
12/16/2010	4:11:50 PM	Main Vac valve opened
12/16/2010	4:11:50 PM	Bypass valve opened
12/16/2010	4:11:50 PM	Helium MFC set to  0.000000
12/16/2010	4:11:50 PM	H2 MFC set to  0.000000
12/16/2010	4:11:50 PM	BCl3 MFC set to  0.000000
12/16/2010	4:11:50 PM	PHl3 MFC set to  0.000000
12/16/2010	4:11:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:11:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:11:50 PM	Tube furnace set to 0
12/16/2010	4:12:50 PM	H2 valve closed
12/16/2010	4:12:50 PM	BCl3 valve closed
12/16/2010	4:12:50 PM	PH3 valve closed
12/16/2010	4:12:50 PM	SiCl4 pre valve closed
12/16/2010	4:12:50 PM	SiCl4 post valve closed
12/16/2010	4:12:50 PM	Bubbler valve closed
12/16/2010	4:12:50 PM	Helium valve opened
12/16/2010	4:12:50 PM	Main Vac valve opened
12/16/2010	4:12:50 PM	Bypass valve opened
12/16/2010	4:12:50 PM	Helium MFC set to  100.000000
12/16/2010	4:12:50 PM	H2 MFC set to  0.000000
12/16/2010	4:12:50 PM	BCl3 MFC set to  0.000000
12/16/2010	4:12:50 PM	PHl3 MFC set to  0.000000
12/16/2010	4:12:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:12:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:12:50 PM	Tube furnace set to 0
12/16/2010	4:13:50 PM	Helium valve closed
12/16/2010	4:13:50 PM	H2 valve closed
12/16/2010	4:13:50 PM	BCl3 valve closed
12/16/2010	4:13:50 PM	PH3 valve closed
12/16/2010	4:13:50 PM	SiCl4 pre valve closed
12/16/2010	4:13:50 PM	SiCl4 post valve closed
12/16/2010	4:13:50 PM	Bubbler valve closed
12/16/2010	4:13:50 PM	Main Vac valve opened
12/16/2010	4:13:50 PM	Bypass valve opened
12/16/2010	4:13:50 PM	Helium MFC set to  0.000000
12/16/2010	4:13:50 PM	H2 MFC set to  0.000000
12/16/2010	4:13:50 PM	BCl3 MFC set to  0.000000
12/16/2010	4:13:50 PM	PHl3 MFC set to  0.000000
12/16/2010	4:13:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:13:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:13:50 PM	Tube furnace set to 0
12/16/2010	4:14:50 PM	H2 valve closed
12/16/2010	4:14:50 PM	BCl3 valve closed
12/16/2010	4:14:50 PM	PH3 valve closed
12/16/2010	4:14:50 PM	SiCl4 pre valve closed
12/16/2010	4:14:50 PM	SiCl4 post valve closed
12/16/2010	4:14:50 PM	Bubbler valve closed
12/16/2010	4:14:50 PM	Helium valve opened
12/16/2010	4:14:50 PM	Main Vac valve opened
12/16/2010	4:14:50 PM	Bypass valve opened
12/16/2010	4:14:50 PM	Helium MFC set to  100.000000
12/16/2010	4:14:50 PM	H2 MFC set to  0.000000
12/16/2010	4:14:50 PM	BCl3 MFC set to  0.000000
12/16/2010	4:14:50 PM	PHl3 MFC set to  0.000000
12/16/2010	4:14:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:14:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:14:51 PM	Tube furnace set to 0
12/16/2010	4:15:51 PM	Helium valve closed
12/16/2010	4:15:51 PM	H2 valve closed
12/16/2010	4:15:51 PM	BCl3 valve closed
12/16/2010	4:15:51 PM	PH3 valve closed
12/16/2010	4:15:51 PM	SiCl4 pre valve closed
12/16/2010	4:15:51 PM	SiCl4 post valve closed
12/16/2010	4:15:51 PM	Bubbler valve closed
12/16/2010	4:15:51 PM	Main Vac valve opened
12/16/2010	4:15:51 PM	Bypass valve opened
12/16/2010	4:15:51 PM	Helium MFC set to  0.000000
12/16/2010	4:15:51 PM	H2 MFC set to  0.000000
12/16/2010	4:15:51 PM	BCl3 MFC set to  0.000000
12/16/2010	4:15:51 PM	PHl3 MFC set to  0.000000
12/16/2010	4:15:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:15:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:15:51 PM	Tube furnace set to 0
12/16/2010	4:16:51 PM	H2 valve closed
12/16/2010	4:16:51 PM	BCl3 valve closed
12/16/2010	4:16:51 PM	PH3 valve closed
12/16/2010	4:16:51 PM	SiCl4 pre valve closed
12/16/2010	4:16:51 PM	SiCl4 post valve closed
12/16/2010	4:16:51 PM	Bubbler valve closed
12/16/2010	4:16:51 PM	Helium valve opened
12/16/2010	4:16:51 PM	Main Vac valve opened
12/16/2010	4:16:51 PM	Bypass valve opened
12/16/2010	4:16:51 PM	Helium MFC set to  100.000000
12/16/2010	4:16:51 PM	H2 MFC set to  0.000000
12/16/2010	4:16:51 PM	BCl3 MFC set to  0.000000
12/16/2010	4:16:51 PM	PHl3 MFC set to  0.000000
12/16/2010	4:16:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:16:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:16:51 PM	Tube furnace set to 0
12/16/2010	4:17:51 PM	Helium valve closed
12/16/2010	4:17:51 PM	H2 valve closed
12/16/2010	4:17:51 PM	BCl3 valve closed
12/16/2010	4:17:51 PM	PH3 valve closed
12/16/2010	4:17:51 PM	SiCl4 pre valve closed
12/16/2010	4:17:51 PM	SiCl4 post valve closed
12/16/2010	4:17:51 PM	Bubbler valve closed
12/16/2010	4:17:51 PM	Main Vac valve opened
12/16/2010	4:17:51 PM	Bypass valve opened
12/16/2010	4:17:51 PM	Helium MFC set to  0.000000
12/16/2010	4:17:51 PM	H2 MFC set to  0.000000
12/16/2010	4:17:51 PM	BCl3 MFC set to  0.000000
12/16/2010	4:17:51 PM	PHl3 MFC set to  0.000000
12/16/2010	4:17:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:17:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:17:51 PM	Tube furnace set to 0
12/16/2010	4:18:51 PM	H2 valve closed
12/16/2010	4:18:51 PM	BCl3 valve closed
12/16/2010	4:18:51 PM	PH3 valve closed
12/16/2010	4:18:51 PM	SiCl4 pre valve closed
12/16/2010	4:18:51 PM	SiCl4 post valve closed
12/16/2010	4:18:51 PM	Bubbler valve closed
12/16/2010	4:18:51 PM	Helium valve opened
12/16/2010	4:18:51 PM	Main Vac valve opened
12/16/2010	4:18:51 PM	Bypass valve opened
12/16/2010	4:18:51 PM	Helium MFC set to  100.000000
12/16/2010	4:18:51 PM	H2 MFC set to  0.000000
12/16/2010	4:18:51 PM	BCl3 MFC set to  0.000000
12/16/2010	4:18:51 PM	PHl3 MFC set to  0.000000
12/16/2010	4:18:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:18:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:18:51 PM	Tube furnace set to 0
12/16/2010	4:19:51 PM	Helium valve closed
12/16/2010	4:19:51 PM	H2 valve closed
12/16/2010	4:19:51 PM	BCl3 valve closed
12/16/2010	4:19:51 PM	PH3 valve closed
12/16/2010	4:19:51 PM	SiCl4 pre valve closed
12/16/2010	4:19:51 PM	SiCl4 post valve closed
12/16/2010	4:19:51 PM	Bubbler valve closed
12/16/2010	4:19:51 PM	Main Vac valve opened
12/16/2010	4:19:51 PM	Bypass valve opened
12/16/2010	4:19:51 PM	Helium MFC set to  0.000000
12/16/2010	4:19:51 PM	H2 MFC set to  0.000000
12/16/2010	4:19:51 PM	BCl3 MFC set to  0.000000
12/16/2010	4:19:51 PM	PHl3 MFC set to  0.000000
12/16/2010	4:19:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:19:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:19:52 PM	Tube furnace set to 0
12/16/2010	4:20:52 PM	H2 valve closed
12/16/2010	4:20:52 PM	BCl3 valve closed
12/16/2010	4:20:52 PM	PH3 valve closed
12/16/2010	4:20:52 PM	SiCl4 pre valve closed
12/16/2010	4:20:52 PM	SiCl4 post valve closed
12/16/2010	4:20:52 PM	Bubbler valve closed
12/16/2010	4:20:52 PM	Helium valve opened
12/16/2010	4:20:52 PM	Main Vac valve opened
12/16/2010	4:20:52 PM	Bypass valve opened
12/16/2010	4:20:52 PM	Helium MFC set to  100.000000
12/16/2010	4:20:52 PM	H2 MFC set to  0.000000
12/16/2010	4:20:52 PM	BCl3 MFC set to  0.000000
12/16/2010	4:20:52 PM	PHl3 MFC set to  0.000000
12/16/2010	4:20:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:20:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:20:52 PM	Tube furnace set to 0
12/16/2010	4:21:52 PM	Helium valve closed
12/16/2010	4:21:52 PM	H2 valve closed
12/16/2010	4:21:52 PM	BCl3 valve closed
12/16/2010	4:21:52 PM	PH3 valve closed
12/16/2010	4:21:52 PM	SiCl4 pre valve closed
12/16/2010	4:21:52 PM	SiCl4 post valve closed
12/16/2010	4:21:52 PM	Bubbler valve closed
12/16/2010	4:21:52 PM	Main Vac valve opened
12/16/2010	4:21:52 PM	Bypass valve opened
12/16/2010	4:21:52 PM	Helium MFC set to  0.000000
12/16/2010	4:21:52 PM	H2 MFC set to  0.000000
12/16/2010	4:21:52 PM	BCl3 MFC set to  0.000000
12/16/2010	4:21:52 PM	PHl3 MFC set to  0.000000
12/16/2010	4:21:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:21:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:21:52 PM	Tube furnace set to 0
12/16/2010	4:22:52 PM	H2 valve closed
12/16/2010	4:22:52 PM	BCl3 valve closed
12/16/2010	4:22:52 PM	PH3 valve closed
12/16/2010	4:22:52 PM	SiCl4 pre valve closed
12/16/2010	4:22:52 PM	SiCl4 post valve closed
12/16/2010	4:22:52 PM	Bubbler valve closed
12/16/2010	4:22:52 PM	Helium valve opened
12/16/2010	4:22:52 PM	Main Vac valve opened
12/16/2010	4:22:52 PM	Bypass valve opened
12/16/2010	4:22:52 PM	Helium MFC set to  100.000000
12/16/2010	4:22:52 PM	H2 MFC set to  0.000000
12/16/2010	4:22:52 PM	BCl3 MFC set to  0.000000
12/16/2010	4:22:52 PM	PHl3 MFC set to  0.000000
12/16/2010	4:22:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:22:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:22:52 PM	Tube furnace set to 0
12/16/2010	4:23:52 PM	Helium valve closed
12/16/2010	4:23:52 PM	H2 valve closed
12/16/2010	4:23:52 PM	BCl3 valve closed
12/16/2010	4:23:52 PM	PH3 valve closed
12/16/2010	4:23:52 PM	SiCl4 pre valve closed
12/16/2010	4:23:52 PM	SiCl4 post valve closed
12/16/2010	4:23:52 PM	Bubbler valve closed
12/16/2010	4:23:52 PM	Main Vac valve opened
12/16/2010	4:23:52 PM	Bypass valve opened
12/16/2010	4:23:52 PM	Helium MFC set to  0.000000
12/16/2010	4:23:52 PM	H2 MFC set to  0.000000
12/16/2010	4:23:52 PM	BCl3 MFC set to  0.000000
12/16/2010	4:23:52 PM	PHl3 MFC set to  0.000000
12/16/2010	4:23:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:23:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:23:52 PM	Tube furnace set to 0
12/16/2010	4:24:52 PM	H2 valve closed
12/16/2010	4:24:52 PM	BCl3 valve closed
12/16/2010	4:24:52 PM	PH3 valve closed
12/16/2010	4:24:52 PM	SiCl4 pre valve closed
12/16/2010	4:24:52 PM	SiCl4 post valve closed
12/16/2010	4:24:52 PM	Bubbler valve closed
12/16/2010	4:24:52 PM	Helium valve opened
12/16/2010	4:24:52 PM	Main Vac valve opened
12/16/2010	4:24:52 PM	Bypass valve opened
12/16/2010	4:24:52 PM	Helium MFC set to  100.000000
12/16/2010	4:24:52 PM	H2 MFC set to  0.000000
12/16/2010	4:24:52 PM	BCl3 MFC set to  0.000000
12/16/2010	4:24:52 PM	PHl3 MFC set to  0.000000
12/16/2010	4:24:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:24:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:24:52 PM	Tube furnace set to 0
12/16/2010	4:25:53 PM	Helium valve closed
12/16/2010	4:25:53 PM	H2 valve closed
12/16/2010	4:25:53 PM	BCl3 valve closed
12/16/2010	4:25:53 PM	PH3 valve closed
12/16/2010	4:25:53 PM	SiCl4 pre valve closed
12/16/2010	4:25:53 PM	SiCl4 post valve closed
12/16/2010	4:25:53 PM	Bubbler valve closed
12/16/2010	4:25:53 PM	Main Vac valve opened
12/16/2010	4:25:53 PM	Bypass valve opened
12/16/2010	4:25:53 PM	Helium MFC set to  0.000000
12/16/2010	4:25:53 PM	H2 MFC set to  0.000000
12/16/2010	4:25:53 PM	BCl3 MFC set to  0.000000
12/16/2010	4:25:53 PM	PHl3 MFC set to  0.000000
12/16/2010	4:25:53 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:25:53 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:25:53 PM	Tube furnace set to 0
12/16/2010	4:25:54 PM	Run finished at 4:25 PM
12/16/2010	4:25:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	4:27:16 PM	Recipe started at 4:27 PM
12/16/2010	4:27:16 PM	Helium valve closed
12/16/2010	4:27:16 PM	BCl3 valve closed
12/16/2010	4:27:16 PM	PH3 valve closed
12/16/2010	4:27:16 PM	SiCl4 pre valve closed
12/16/2010	4:27:16 PM	SiCl4 post valve closed
12/16/2010	4:27:16 PM	Main Vac valve closed
12/16/2010	4:27:16 PM	Bypass valve closed
12/16/2010	4:27:16 PM	Bubbler valve closed
12/16/2010	4:27:16 PM	H2 valve opened
12/16/2010	4:27:16 PM	Helium MFC set to  0.000000
12/16/2010	4:27:16 PM	H2 MFC set to  500.000000
12/16/2010	4:27:16 PM	BCl3 MFC set to  0.000000
12/16/2010	4:27:16 PM	PHl3 MFC set to  0.000000
12/16/2010	4:27:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:27:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:27:17 PM	Tube furnace set to 0
12/16/2010	4:28:34 PM	Helium valve closed
12/16/2010	4:28:34 PM	BCl3 valve closed
12/16/2010	4:28:34 PM	PH3 valve closed
12/16/2010	4:28:34 PM	SiCl4 pre valve closed
12/16/2010	4:28:34 PM	SiCl4 post valve closed
12/16/2010	4:28:34 PM	Main Vac valve closed
12/16/2010	4:28:34 PM	Bypass valve closed
12/16/2010	4:28:34 PM	H2 valve opened
12/16/2010	4:28:34 PM	Bubbler valve opened
12/16/2010	4:28:34 PM	Helium MFC set to  0.000000
12/16/2010	4:28:34 PM	H2 MFC set to  500.000000
12/16/2010	4:28:34 PM	BCl3 MFC set to  0.000000
12/16/2010	4:28:34 PM	PHl3 MFC set to  0.000000
12/16/2010	4:28:34 PM	SiCl4 MFC set to  0.000000
12/16/2010	4:28:34 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:28:35 PM	Tube furnace set to 1000
12/16/2010	4:48:35 PM	Helium valve closed
12/16/2010	4:48:35 PM	PH3 valve closed
12/16/2010	4:48:35 PM	Main Vac valve closed
12/16/2010	4:48:35 PM	Bypass valve closed
12/16/2010	4:48:35 PM	H2 valve opened
12/16/2010	4:48:35 PM	BCl3 valve opened
12/16/2010	4:48:35 PM	SiCl4 pre valve opened
12/16/2010	4:48:35 PM	SiCl4 post valve opened
12/16/2010	4:48:35 PM	Bubbler valve opened
12/16/2010	4:48:35 PM	Helium MFC set to  0.000000
12/16/2010	4:48:35 PM	H2 MFC set to  500.000000
12/16/2010	4:48:35 PM	BCl3 MFC set to  12.000000
12/16/2010	4:48:35 PM	PHl3 MFC set to  0.000000
12/16/2010	4:48:35 PM	SiCl4 MFC set to  50.000000
12/16/2010	4:48:35 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	4:48:35 PM	Tube furnace set to 1000
12/16/2010	5:08:35 PM	H2 valve closed
12/16/2010	5:08:35 PM	BCl3 valve closed
12/16/2010	5:08:35 PM	PH3 valve closed
12/16/2010	5:08:35 PM	SiCl4 pre valve closed
12/16/2010	5:08:35 PM	SiCl4 post valve closed
12/16/2010	5:08:35 PM	Main Vac valve closed
12/16/2010	5:08:35 PM	Bypass valve closed
12/16/2010	5:08:35 PM	Helium valve opened
12/16/2010	5:08:35 PM	Bubbler valve opened
12/16/2010	5:08:35 PM	Helium MFC set to  500.000000
12/16/2010	5:08:35 PM	H2 MFC set to  0.000000
12/16/2010	5:08:35 PM	BCl3 MFC set to  0.000000
12/16/2010	5:08:35 PM	PHl3 MFC set to  0.000000
12/16/2010	5:08:35 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:08:35 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:08:35 PM	Tube furnace set to 0
12/16/2010	5:28:35 PM	Helium valve closed
12/16/2010	5:28:35 PM	H2 valve closed
12/16/2010	5:28:35 PM	BCl3 valve closed
12/16/2010	5:28:35 PM	PH3 valve closed
12/16/2010	5:28:35 PM	SiCl4 pre valve closed
12/16/2010	5:28:35 PM	SiCl4 post valve closed
12/16/2010	5:28:35 PM	Main Vac valve closed
12/16/2010	5:28:35 PM	Bypass valve closed
12/16/2010	5:28:35 PM	Bubbler valve closed
12/16/2010	5:28:35 PM	Helium MFC set to  0.000000
12/16/2010	5:28:35 PM	H2 MFC set to  0.000000
12/16/2010	5:28:35 PM	BCl3 MFC set to  0.000000
12/16/2010	5:28:35 PM	PHl3 MFC set to  0.000000
12/16/2010	5:28:35 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:28:35 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:28:35 PM	Tube furnace set to 0
12/16/2010	5:28:35 PM	Run finished at 5:28 PM
12/16/2010	5:48:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	5:48:18 PM	Recipe started at 5:48 PM
12/16/2010	5:48:18 PM	Helium valve closed
12/16/2010	5:48:18 PM	H2 valve closed
12/16/2010	5:48:18 PM	BCl3 valve closed
12/16/2010	5:48:18 PM	PH3 valve closed
12/16/2010	5:48:18 PM	SiCl4 pre valve closed
12/16/2010	5:48:18 PM	SiCl4 post valve closed
12/16/2010	5:48:18 PM	Main Vac valve closed
12/16/2010	5:48:18 PM	Bubbler valve closed
12/16/2010	5:48:18 PM	Bypass valve opened
12/16/2010	5:48:18 PM	Helium MFC set to  0.000000
12/16/2010	5:48:18 PM	H2 MFC set to  0.000000
12/16/2010	5:48:18 PM	BCl3 MFC set to  0.000000
12/16/2010	5:48:18 PM	PHl3 MFC set to  0.000000
12/16/2010	5:48:18 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:48:18 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:48:18 PM	Tube furnace set to 0
12/16/2010	5:49:16 PM	Helium valve closed
12/16/2010	5:49:16 PM	H2 valve closed
12/16/2010	5:49:16 PM	BCl3 valve closed
12/16/2010	5:49:16 PM	PH3 valve closed
12/16/2010	5:49:16 PM	SiCl4 pre valve closed
12/16/2010	5:49:16 PM	SiCl4 post valve closed
12/16/2010	5:49:16 PM	Bubbler valve closed
12/16/2010	5:49:16 PM	Main Vac valve opened
12/16/2010	5:49:16 PM	Bypass valve opened
12/16/2010	5:49:16 PM	Helium MFC set to  0.000000
12/16/2010	5:49:16 PM	H2 MFC set to  0.000000
12/16/2010	5:49:16 PM	BCl3 MFC set to  0.000000
12/16/2010	5:49:16 PM	PHl3 MFC set to  0.000000
12/16/2010	5:49:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:49:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:49:16 PM	Tube furnace set to 0
12/16/2010	5:49:16 PM	Run finished at 5:49 PM
12/16/2010	5:49:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	5:49:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	5:49:50 PM	Recipe started at 5:49 PM
12/16/2010	5:49:50 PM	Helium valve closed
12/16/2010	5:49:50 PM	H2 valve closed
12/16/2010	5:49:50 PM	BCl3 valve closed
12/16/2010	5:49:50 PM	PH3 valve closed
12/16/2010	5:49:50 PM	SiCl4 pre valve closed
12/16/2010	5:49:50 PM	SiCl4 post valve closed
12/16/2010	5:49:50 PM	Main Vac valve closed
12/16/2010	5:49:50 PM	Bubbler valve closed
12/16/2010	5:49:50 PM	Bypass valve opened
12/16/2010	5:49:50 PM	Helium MFC set to  0.000000
12/16/2010	5:49:50 PM	H2 MFC set to  0.000000
12/16/2010	5:49:50 PM	BCl3 MFC set to  0.000000
12/16/2010	5:49:50 PM	PHl3 MFC set to  0.000000
12/16/2010	5:49:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:49:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:49:51 PM	Tube furnace set to 0
12/16/2010	5:49:51 PM	Helium valve closed
12/16/2010	5:49:51 PM	H2 valve closed
12/16/2010	5:49:51 PM	BCl3 valve closed
12/16/2010	5:49:51 PM	PH3 valve closed
12/16/2010	5:49:51 PM	SiCl4 pre valve closed
12/16/2010	5:49:51 PM	SiCl4 post valve closed
12/16/2010	5:49:51 PM	Bubbler valve closed
12/16/2010	5:49:51 PM	Main Vac valve opened
12/16/2010	5:49:51 PM	Bypass valve opened
12/16/2010	5:49:51 PM	Helium MFC set to  0.000000
12/16/2010	5:49:51 PM	H2 MFC set to  0.000000
12/16/2010	5:49:51 PM	BCl3 MFC set to  0.000000
12/16/2010	5:49:51 PM	PHl3 MFC set to  0.000000
12/16/2010	5:49:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:49:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:49:51 PM	Tube furnace set to 0
12/16/2010	5:50:51 PM	H2 valve closed
12/16/2010	5:50:51 PM	BCl3 valve closed
12/16/2010	5:50:51 PM	PH3 valve closed
12/16/2010	5:50:51 PM	SiCl4 pre valve closed
12/16/2010	5:50:51 PM	SiCl4 post valve closed
12/16/2010	5:50:51 PM	Bubbler valve closed
12/16/2010	5:50:51 PM	Helium valve opened
12/16/2010	5:50:51 PM	Main Vac valve opened
12/16/2010	5:50:51 PM	Bypass valve opened
12/16/2010	5:50:51 PM	Helium MFC set to  100.000000
12/16/2010	5:50:51 PM	H2 MFC set to  0.000000
12/16/2010	5:50:51 PM	BCl3 MFC set to  0.000000
12/16/2010	5:50:51 PM	PHl3 MFC set to  0.000000
12/16/2010	5:50:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:50:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:50:51 PM	Tube furnace set to 0
12/16/2010	5:51:51 PM	Helium valve closed
12/16/2010	5:51:51 PM	H2 valve closed
12/16/2010	5:51:51 PM	BCl3 valve closed
12/16/2010	5:51:51 PM	PH3 valve closed
12/16/2010	5:51:51 PM	SiCl4 pre valve closed
12/16/2010	5:51:51 PM	SiCl4 post valve closed
12/16/2010	5:51:51 PM	Bubbler valve closed
12/16/2010	5:51:51 PM	Main Vac valve opened
12/16/2010	5:51:51 PM	Bypass valve opened
12/16/2010	5:51:51 PM	Helium MFC set to  0.000000
12/16/2010	5:51:51 PM	H2 MFC set to  0.000000
12/16/2010	5:51:51 PM	BCl3 MFC set to  0.000000
12/16/2010	5:51:51 PM	PHl3 MFC set to  0.000000
12/16/2010	5:51:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:51:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:51:51 PM	Tube furnace set to 0
12/16/2010	5:52:51 PM	H2 valve closed
12/16/2010	5:52:51 PM	BCl3 valve closed
12/16/2010	5:52:51 PM	PH3 valve closed
12/16/2010	5:52:51 PM	SiCl4 pre valve closed
12/16/2010	5:52:51 PM	SiCl4 post valve closed
12/16/2010	5:52:51 PM	Bubbler valve closed
12/16/2010	5:52:51 PM	Helium valve opened
12/16/2010	5:52:51 PM	Main Vac valve opened
12/16/2010	5:52:51 PM	Bypass valve opened
12/16/2010	5:52:51 PM	Helium MFC set to  100.000000
12/16/2010	5:52:51 PM	H2 MFC set to  0.000000
12/16/2010	5:52:51 PM	BCl3 MFC set to  0.000000
12/16/2010	5:52:51 PM	PHl3 MFC set to  0.000000
12/16/2010	5:52:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:52:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:52:52 PM	Tube furnace set to 0
12/16/2010	5:53:52 PM	Helium valve closed
12/16/2010	5:53:52 PM	H2 valve closed
12/16/2010	5:53:52 PM	BCl3 valve closed
12/16/2010	5:53:52 PM	PH3 valve closed
12/16/2010	5:53:52 PM	SiCl4 pre valve closed
12/16/2010	5:53:52 PM	SiCl4 post valve closed
12/16/2010	5:53:52 PM	Bubbler valve closed
12/16/2010	5:53:52 PM	Main Vac valve opened
12/16/2010	5:53:52 PM	Bypass valve opened
12/16/2010	5:53:52 PM	Helium MFC set to  0.000000
12/16/2010	5:53:52 PM	H2 MFC set to  0.000000
12/16/2010	5:53:52 PM	BCl3 MFC set to  0.000000
12/16/2010	5:53:52 PM	PHl3 MFC set to  0.000000
12/16/2010	5:53:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:53:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:53:52 PM	Tube furnace set to 0
12/16/2010	5:54:52 PM	H2 valve closed
12/16/2010	5:54:52 PM	BCl3 valve closed
12/16/2010	5:54:52 PM	PH3 valve closed
12/16/2010	5:54:52 PM	SiCl4 pre valve closed
12/16/2010	5:54:52 PM	SiCl4 post valve closed
12/16/2010	5:54:52 PM	Bubbler valve closed
12/16/2010	5:54:52 PM	Helium valve opened
12/16/2010	5:54:52 PM	Main Vac valve opened
12/16/2010	5:54:52 PM	Bypass valve opened
12/16/2010	5:54:52 PM	Helium MFC set to  100.000000
12/16/2010	5:54:52 PM	H2 MFC set to  0.000000
12/16/2010	5:54:52 PM	BCl3 MFC set to  0.000000
12/16/2010	5:54:52 PM	PHl3 MFC set to  0.000000
12/16/2010	5:54:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:54:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:54:52 PM	Tube furnace set to 0
12/16/2010	5:55:52 PM	Helium valve closed
12/16/2010	5:55:52 PM	H2 valve closed
12/16/2010	5:55:52 PM	BCl3 valve closed
12/16/2010	5:55:52 PM	PH3 valve closed
12/16/2010	5:55:52 PM	SiCl4 pre valve closed
12/16/2010	5:55:52 PM	SiCl4 post valve closed
12/16/2010	5:55:52 PM	Bubbler valve closed
12/16/2010	5:55:52 PM	Main Vac valve opened
12/16/2010	5:55:52 PM	Bypass valve opened
12/16/2010	5:55:52 PM	Helium MFC set to  0.000000
12/16/2010	5:55:52 PM	H2 MFC set to  0.000000
12/16/2010	5:55:52 PM	BCl3 MFC set to  0.000000
12/16/2010	5:55:52 PM	PHl3 MFC set to  0.000000
12/16/2010	5:55:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:55:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:55:52 PM	Tube furnace set to 0
12/16/2010	5:56:52 PM	H2 valve closed
12/16/2010	5:56:52 PM	BCl3 valve closed
12/16/2010	5:56:52 PM	PH3 valve closed
12/16/2010	5:56:52 PM	SiCl4 pre valve closed
12/16/2010	5:56:52 PM	SiCl4 post valve closed
12/16/2010	5:56:52 PM	Bubbler valve closed
12/16/2010	5:56:52 PM	Helium valve opened
12/16/2010	5:56:52 PM	Main Vac valve opened
12/16/2010	5:56:52 PM	Bypass valve opened
12/16/2010	5:56:52 PM	Helium MFC set to  100.000000
12/16/2010	5:56:52 PM	H2 MFC set to  0.000000
12/16/2010	5:56:52 PM	BCl3 MFC set to  0.000000
12/16/2010	5:56:52 PM	PHl3 MFC set to  0.000000
12/16/2010	5:56:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:56:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:56:52 PM	Tube furnace set to 0
12/16/2010	5:57:52 PM	Helium valve closed
12/16/2010	5:57:52 PM	H2 valve closed
12/16/2010	5:57:52 PM	BCl3 valve closed
12/16/2010	5:57:52 PM	PH3 valve closed
12/16/2010	5:57:52 PM	SiCl4 pre valve closed
12/16/2010	5:57:52 PM	SiCl4 post valve closed
12/16/2010	5:57:52 PM	Bubbler valve closed
12/16/2010	5:57:52 PM	Main Vac valve opened
12/16/2010	5:57:52 PM	Bypass valve opened
12/16/2010	5:57:52 PM	Helium MFC set to  0.000000
12/16/2010	5:57:52 PM	H2 MFC set to  0.000000
12/16/2010	5:57:52 PM	BCl3 MFC set to  0.000000
12/16/2010	5:57:52 PM	PHl3 MFC set to  0.000000
12/16/2010	5:57:52 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:57:52 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:57:53 PM	Tube furnace set to 0
12/16/2010	5:58:53 PM	H2 valve closed
12/16/2010	5:58:53 PM	BCl3 valve closed
12/16/2010	5:58:53 PM	PH3 valve closed
12/16/2010	5:58:53 PM	SiCl4 pre valve closed
12/16/2010	5:58:53 PM	SiCl4 post valve closed
12/16/2010	5:58:53 PM	Bubbler valve closed
12/16/2010	5:58:53 PM	Helium valve opened
12/16/2010	5:58:53 PM	Main Vac valve opened
12/16/2010	5:58:53 PM	Bypass valve opened
12/16/2010	5:58:53 PM	Helium MFC set to  100.000000
12/16/2010	5:58:53 PM	H2 MFC set to  0.000000
12/16/2010	5:58:53 PM	BCl3 MFC set to  0.000000
12/16/2010	5:58:53 PM	PHl3 MFC set to  0.000000
12/16/2010	5:58:53 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:58:53 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:58:53 PM	Tube furnace set to 0
12/16/2010	5:59:53 PM	Helium valve closed
12/16/2010	5:59:53 PM	H2 valve closed
12/16/2010	5:59:53 PM	BCl3 valve closed
12/16/2010	5:59:53 PM	PH3 valve closed
12/16/2010	5:59:53 PM	SiCl4 pre valve closed
12/16/2010	5:59:53 PM	SiCl4 post valve closed
12/16/2010	5:59:53 PM	Bubbler valve closed
12/16/2010	5:59:53 PM	Main Vac valve opened
12/16/2010	5:59:53 PM	Bypass valve opened
12/16/2010	5:59:53 PM	Helium MFC set to  0.000000
12/16/2010	5:59:53 PM	H2 MFC set to  0.000000
12/16/2010	5:59:53 PM	BCl3 MFC set to  0.000000
12/16/2010	5:59:53 PM	PHl3 MFC set to  0.000000
12/16/2010	5:59:53 PM	SiCl4 MFC set to  0.000000
12/16/2010	5:59:53 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	5:59:53 PM	Tube furnace set to 0
12/16/2010	6:00:53 PM	H2 valve closed
12/16/2010	6:00:53 PM	BCl3 valve closed
12/16/2010	6:00:53 PM	PH3 valve closed
12/16/2010	6:00:53 PM	SiCl4 pre valve closed
12/16/2010	6:00:53 PM	SiCl4 post valve closed
12/16/2010	6:00:53 PM	Bubbler valve closed
12/16/2010	6:00:53 PM	Helium valve opened
12/16/2010	6:00:53 PM	Main Vac valve opened
12/16/2010	6:00:53 PM	Bypass valve opened
12/16/2010	6:00:53 PM	Helium MFC set to  100.000000
12/16/2010	6:00:53 PM	H2 MFC set to  0.000000
12/16/2010	6:00:53 PM	BCl3 MFC set to  0.000000
12/16/2010	6:00:53 PM	PHl3 MFC set to  0.000000
12/16/2010	6:00:53 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:00:53 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:00:53 PM	Tube furnace set to 0
12/16/2010	6:01:53 PM	Helium valve closed
12/16/2010	6:01:53 PM	H2 valve closed
12/16/2010	6:01:53 PM	BCl3 valve closed
12/16/2010	6:01:53 PM	PH3 valve closed
12/16/2010	6:01:53 PM	SiCl4 pre valve closed
12/16/2010	6:01:53 PM	SiCl4 post valve closed
12/16/2010	6:01:53 PM	Bubbler valve closed
12/16/2010	6:01:53 PM	Main Vac valve opened
12/16/2010	6:01:53 PM	Bypass valve opened
12/16/2010	6:01:53 PM	Helium MFC set to  0.000000
12/16/2010	6:01:53 PM	H2 MFC set to  0.000000
12/16/2010	6:01:53 PM	BCl3 MFC set to  0.000000
12/16/2010	6:01:53 PM	PHl3 MFC set to  0.000000
12/16/2010	6:01:53 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:01:53 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:01:53 PM	Tube furnace set to 0
12/16/2010	6:02:53 PM	H2 valve closed
12/16/2010	6:02:53 PM	BCl3 valve closed
12/16/2010	6:02:53 PM	PH3 valve closed
12/16/2010	6:02:53 PM	SiCl4 pre valve closed
12/16/2010	6:02:53 PM	SiCl4 post valve closed
12/16/2010	6:02:53 PM	Bubbler valve closed
12/16/2010	6:02:53 PM	Helium valve opened
12/16/2010	6:02:53 PM	Main Vac valve opened
12/16/2010	6:02:53 PM	Bypass valve opened
12/16/2010	6:02:53 PM	Helium MFC set to  100.000000
12/16/2010	6:02:53 PM	H2 MFC set to  0.000000
12/16/2010	6:02:53 PM	BCl3 MFC set to  0.000000
12/16/2010	6:02:53 PM	PHl3 MFC set to  0.000000
12/16/2010	6:02:53 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:02:53 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:02:54 PM	Tube furnace set to 0
12/16/2010	6:03:54 PM	Helium valve closed
12/16/2010	6:03:54 PM	H2 valve closed
12/16/2010	6:03:54 PM	BCl3 valve closed
12/16/2010	6:03:54 PM	PH3 valve closed
12/16/2010	6:03:54 PM	SiCl4 pre valve closed
12/16/2010	6:03:54 PM	SiCl4 post valve closed
12/16/2010	6:03:54 PM	Bubbler valve closed
12/16/2010	6:03:54 PM	Main Vac valve opened
12/16/2010	6:03:54 PM	Bypass valve opened
12/16/2010	6:03:54 PM	Helium MFC set to  0.000000
12/16/2010	6:03:54 PM	H2 MFC set to  0.000000
12/16/2010	6:03:54 PM	BCl3 MFC set to  0.000000
12/16/2010	6:03:54 PM	PHl3 MFC set to  0.000000
12/16/2010	6:03:54 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:03:54 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:03:54 PM	Tube furnace set to 0
12/16/2010	6:04:54 PM	H2 valve closed
12/16/2010	6:04:54 PM	BCl3 valve closed
12/16/2010	6:04:54 PM	PH3 valve closed
12/16/2010	6:04:54 PM	SiCl4 pre valve closed
12/16/2010	6:04:54 PM	SiCl4 post valve closed
12/16/2010	6:04:54 PM	Bubbler valve closed
12/16/2010	6:04:54 PM	Helium valve opened
12/16/2010	6:04:54 PM	Main Vac valve opened
12/16/2010	6:04:54 PM	Bypass valve opened
12/16/2010	6:04:54 PM	Helium MFC set to  100.000000
12/16/2010	6:04:54 PM	H2 MFC set to  0.000000
12/16/2010	6:04:54 PM	BCl3 MFC set to  0.000000
12/16/2010	6:04:54 PM	PHl3 MFC set to  0.000000
12/16/2010	6:04:54 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:04:54 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:04:54 PM	Tube furnace set to 0
12/16/2010	6:05:54 PM	Helium valve closed
12/16/2010	6:05:54 PM	H2 valve closed
12/16/2010	6:05:54 PM	BCl3 valve closed
12/16/2010	6:05:54 PM	PH3 valve closed
12/16/2010	6:05:54 PM	SiCl4 pre valve closed
12/16/2010	6:05:54 PM	SiCl4 post valve closed
12/16/2010	6:05:54 PM	Bubbler valve closed
12/16/2010	6:05:54 PM	Main Vac valve opened
12/16/2010	6:05:54 PM	Bypass valve opened
12/16/2010	6:05:54 PM	Helium MFC set to  0.000000
12/16/2010	6:05:54 PM	H2 MFC set to  0.000000
12/16/2010	6:05:54 PM	BCl3 MFC set to  0.000000
12/16/2010	6:05:54 PM	PHl3 MFC set to  0.000000
12/16/2010	6:05:54 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:05:54 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:05:54 PM	Tube furnace set to 0
12/16/2010	6:06:29 PM	Run aborted at 6:06 PM
12/16/2010	6:06:29 PM	Helium valve closed
12/16/2010	6:06:29 PM	H2 valve closed
12/16/2010	6:06:29 PM	BCl3 valve closed
12/16/2010	6:06:29 PM	PH3 valve closed
12/16/2010	6:06:29 PM	SiCl4 pre valve closed
12/16/2010	6:06:29 PM	SiCl4 post valve closed
12/16/2010	6:06:29 PM	Bypass valve closed
12/16/2010	6:06:29 PM	Main Vac valve closed
12/16/2010	6:06:29 PM	Bubbler valve closed
12/16/2010	6:06:29 PM	Helium MFC set to  0.000000
12/16/2010	6:06:29 PM	H2 MFC set to  0.000000
12/16/2010	6:06:29 PM	BCl3 MFC set to  0.000000
12/16/2010	6:06:29 PM	PHl3 MFC set to  0.000000
12/16/2010	6:06:29 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:06:29 PM	Tube furnace set to 0
12/16/2010	6:06:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	6:06:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	6:06:31 PM	Recipe started at 6:06 PM
12/16/2010	6:06:32 PM	Helium valve closed
12/16/2010	6:06:32 PM	H2 valve closed
12/16/2010	6:06:32 PM	BCl3 valve closed
12/16/2010	6:06:32 PM	PH3 valve closed
12/16/2010	6:06:32 PM	SiCl4 pre valve closed
12/16/2010	6:06:32 PM	SiCl4 post valve closed
12/16/2010	6:06:32 PM	Main Vac valve closed
12/16/2010	6:06:32 PM	Bubbler valve closed
12/16/2010	6:06:32 PM	Bypass valve opened
12/16/2010	6:06:32 PM	Helium MFC set to  0.000000
12/16/2010	6:06:32 PM	H2 MFC set to  0.000000
12/16/2010	6:06:32 PM	BCl3 MFC set to  0.000000
12/16/2010	6:06:32 PM	PHl3 MFC set to  0.000000
12/16/2010	6:06:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:06:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:06:32 PM	Tube furnace set to 0
12/16/2010	6:06:32 PM	Helium valve closed
12/16/2010	6:06:32 PM	H2 valve closed
12/16/2010	6:06:32 PM	BCl3 valve closed
12/16/2010	6:06:32 PM	PH3 valve closed
12/16/2010	6:06:32 PM	SiCl4 pre valve closed
12/16/2010	6:06:32 PM	SiCl4 post valve closed
12/16/2010	6:06:32 PM	Bubbler valve closed
12/16/2010	6:06:32 PM	Main Vac valve opened
12/16/2010	6:06:32 PM	Bypass valve opened
12/16/2010	6:06:32 PM	Helium MFC set to  0.000000
12/16/2010	6:06:32 PM	H2 MFC set to  0.000000
12/16/2010	6:06:32 PM	BCl3 MFC set to  0.000000
12/16/2010	6:06:32 PM	PHl3 MFC set to  0.000000
12/16/2010	6:06:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:06:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:06:32 PM	Tube furnace set to 0
12/16/2010	6:06:32 PM	Run finished at 6:06 PM
12/16/2010	6:06:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	6:06:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	6:06:46 PM	Recipe started at 6:06 PM
12/16/2010	6:06:46 PM	Helium valve closed
12/16/2010	6:06:46 PM	H2 valve closed
12/16/2010	6:06:46 PM	BCl3 valve closed
12/16/2010	6:06:46 PM	PH3 valve closed
12/16/2010	6:06:46 PM	SiCl4 pre valve closed
12/16/2010	6:06:46 PM	SiCl4 post valve closed
12/16/2010	6:06:46 PM	Main Vac valve closed
12/16/2010	6:06:46 PM	Bubbler valve closed
12/16/2010	6:06:46 PM	Bypass valve opened
12/16/2010	6:06:46 PM	Helium MFC set to  0.000000
12/16/2010	6:06:46 PM	H2 MFC set to  0.000000
12/16/2010	6:06:46 PM	BCl3 MFC set to  0.000000
12/16/2010	6:06:47 PM	PHl3 MFC set to  0.000000
12/16/2010	6:06:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:06:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:06:47 PM	Tube furnace set to 0
12/16/2010	6:06:47 PM	Helium valve closed
12/16/2010	6:06:47 PM	H2 valve closed
12/16/2010	6:06:47 PM	BCl3 valve closed
12/16/2010	6:06:47 PM	PH3 valve closed
12/16/2010	6:06:47 PM	SiCl4 pre valve closed
12/16/2010	6:06:47 PM	SiCl4 post valve closed
12/16/2010	6:06:47 PM	Bubbler valve closed
12/16/2010	6:06:47 PM	Main Vac valve opened
12/16/2010	6:06:47 PM	Bypass valve opened
12/16/2010	6:06:47 PM	Helium MFC set to  0.000000
12/16/2010	6:06:47 PM	H2 MFC set to  0.000000
12/16/2010	6:06:47 PM	BCl3 MFC set to  0.000000
12/16/2010	6:06:47 PM	PHl3 MFC set to  0.000000
12/16/2010	6:06:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:06:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:06:47 PM	Tube furnace set to 0
12/16/2010	6:07:47 PM	H2 valve closed
12/16/2010	6:07:47 PM	BCl3 valve closed
12/16/2010	6:07:47 PM	PH3 valve closed
12/16/2010	6:07:47 PM	SiCl4 pre valve closed
12/16/2010	6:07:47 PM	SiCl4 post valve closed
12/16/2010	6:07:47 PM	Bubbler valve closed
12/16/2010	6:07:47 PM	Helium valve opened
12/16/2010	6:07:47 PM	Main Vac valve opened
12/16/2010	6:07:47 PM	Bypass valve opened
12/16/2010	6:07:47 PM	Helium MFC set to  100.000000
12/16/2010	6:07:47 PM	H2 MFC set to  0.000000
12/16/2010	6:07:47 PM	BCl3 MFC set to  0.000000
12/16/2010	6:07:47 PM	PHl3 MFC set to  0.000000
12/16/2010	6:07:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:07:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:07:47 PM	Tube furnace set to 0
12/16/2010	6:08:47 PM	Helium valve closed
12/16/2010	6:08:47 PM	H2 valve closed
12/16/2010	6:08:47 PM	BCl3 valve closed
12/16/2010	6:08:47 PM	PH3 valve closed
12/16/2010	6:08:47 PM	SiCl4 pre valve closed
12/16/2010	6:08:47 PM	SiCl4 post valve closed
12/16/2010	6:08:47 PM	Bubbler valve closed
12/16/2010	6:08:47 PM	Main Vac valve opened
12/16/2010	6:08:47 PM	Bypass valve opened
12/16/2010	6:08:47 PM	Helium MFC set to  0.000000
12/16/2010	6:08:47 PM	H2 MFC set to  0.000000
12/16/2010	6:08:47 PM	BCl3 MFC set to  0.000000
12/16/2010	6:08:47 PM	PHl3 MFC set to  0.000000
12/16/2010	6:08:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:08:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:08:48 PM	Tube furnace set to 0
12/16/2010	6:09:48 PM	H2 valve closed
12/16/2010	6:09:48 PM	BCl3 valve closed
12/16/2010	6:09:48 PM	PH3 valve closed
12/16/2010	6:09:48 PM	SiCl4 pre valve closed
12/16/2010	6:09:48 PM	SiCl4 post valve closed
12/16/2010	6:09:48 PM	Bubbler valve closed
12/16/2010	6:09:48 PM	Helium valve opened
12/16/2010	6:09:48 PM	Main Vac valve opened
12/16/2010	6:09:48 PM	Bypass valve opened
12/16/2010	6:09:48 PM	Helium MFC set to  100.000000
12/16/2010	6:09:48 PM	H2 MFC set to  0.000000
12/16/2010	6:09:48 PM	BCl3 MFC set to  0.000000
12/16/2010	6:09:48 PM	PHl3 MFC set to  0.000000
12/16/2010	6:09:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:09:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:09:48 PM	Tube furnace set to 0
12/16/2010	6:10:48 PM	Helium valve closed
12/16/2010	6:10:48 PM	H2 valve closed
12/16/2010	6:10:48 PM	BCl3 valve closed
12/16/2010	6:10:48 PM	PH3 valve closed
12/16/2010	6:10:48 PM	SiCl4 pre valve closed
12/16/2010	6:10:48 PM	SiCl4 post valve closed
12/16/2010	6:10:48 PM	Bubbler valve closed
12/16/2010	6:10:48 PM	Main Vac valve opened
12/16/2010	6:10:48 PM	Bypass valve opened
12/16/2010	6:10:48 PM	Helium MFC set to  0.000000
12/16/2010	6:10:48 PM	H2 MFC set to  0.000000
12/16/2010	6:10:48 PM	BCl3 MFC set to  0.000000
12/16/2010	6:10:48 PM	PHl3 MFC set to  0.000000
12/16/2010	6:10:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:10:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:10:48 PM	Tube furnace set to 0
12/16/2010	6:11:48 PM	H2 valve closed
12/16/2010	6:11:48 PM	BCl3 valve closed
12/16/2010	6:11:48 PM	PH3 valve closed
12/16/2010	6:11:48 PM	SiCl4 pre valve closed
12/16/2010	6:11:48 PM	SiCl4 post valve closed
12/16/2010	6:11:48 PM	Bubbler valve closed
12/16/2010	6:11:48 PM	Helium valve opened
12/16/2010	6:11:48 PM	Main Vac valve opened
12/16/2010	6:11:48 PM	Bypass valve opened
12/16/2010	6:11:48 PM	Helium MFC set to  100.000000
12/16/2010	6:11:48 PM	H2 MFC set to  0.000000
12/16/2010	6:11:48 PM	BCl3 MFC set to  0.000000
12/16/2010	6:11:48 PM	PHl3 MFC set to  0.000000
12/16/2010	6:11:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:11:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:11:48 PM	Tube furnace set to 0
12/16/2010	6:12:48 PM	Helium valve closed
12/16/2010	6:12:48 PM	H2 valve closed
12/16/2010	6:12:48 PM	BCl3 valve closed
12/16/2010	6:12:48 PM	PH3 valve closed
12/16/2010	6:12:48 PM	SiCl4 pre valve closed
12/16/2010	6:12:48 PM	SiCl4 post valve closed
12/16/2010	6:12:48 PM	Bubbler valve closed
12/16/2010	6:12:48 PM	Main Vac valve opened
12/16/2010	6:12:48 PM	Bypass valve opened
12/16/2010	6:12:48 PM	Helium MFC set to  0.000000
12/16/2010	6:12:48 PM	H2 MFC set to  0.000000
12/16/2010	6:12:48 PM	BCl3 MFC set to  0.000000
12/16/2010	6:12:48 PM	PHl3 MFC set to  0.000000
12/16/2010	6:12:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:12:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:12:48 PM	Tube furnace set to 0
12/16/2010	6:13:48 PM	H2 valve closed
12/16/2010	6:13:48 PM	BCl3 valve closed
12/16/2010	6:13:48 PM	PH3 valve closed
12/16/2010	6:13:48 PM	SiCl4 pre valve closed
12/16/2010	6:13:48 PM	SiCl4 post valve closed
12/16/2010	6:13:48 PM	Bubbler valve closed
12/16/2010	6:13:48 PM	Helium valve opened
12/16/2010	6:13:48 PM	Main Vac valve opened
12/16/2010	6:13:48 PM	Bypass valve opened
12/16/2010	6:13:48 PM	Helium MFC set to  100.000000
12/16/2010	6:13:48 PM	H2 MFC set to  0.000000
12/16/2010	6:13:48 PM	BCl3 MFC set to  0.000000
12/16/2010	6:13:48 PM	PHl3 MFC set to  0.000000
12/16/2010	6:13:48 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:13:48 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:13:48 PM	Tube furnace set to 0
12/16/2010	6:14:48 PM	Helium valve closed
12/16/2010	6:14:48 PM	H2 valve closed
12/16/2010	6:14:48 PM	BCl3 valve closed
12/16/2010	6:14:49 PM	PH3 valve closed
12/16/2010	6:14:49 PM	SiCl4 pre valve closed
12/16/2010	6:14:49 PM	SiCl4 post valve closed
12/16/2010	6:14:49 PM	Bubbler valve closed
12/16/2010	6:14:49 PM	Main Vac valve opened
12/16/2010	6:14:49 PM	Bypass valve opened
12/16/2010	6:14:49 PM	Helium MFC set to  0.000000
12/16/2010	6:14:49 PM	H2 MFC set to  0.000000
12/16/2010	6:14:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:14:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:14:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:14:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:14:49 PM	Tube furnace set to 0
12/16/2010	6:15:49 PM	H2 valve closed
12/16/2010	6:15:49 PM	BCl3 valve closed
12/16/2010	6:15:49 PM	PH3 valve closed
12/16/2010	6:15:49 PM	SiCl4 pre valve closed
12/16/2010	6:15:49 PM	SiCl4 post valve closed
12/16/2010	6:15:49 PM	Bubbler valve closed
12/16/2010	6:15:49 PM	Helium valve opened
12/16/2010	6:15:49 PM	Main Vac valve opened
12/16/2010	6:15:49 PM	Bypass valve opened
12/16/2010	6:15:49 PM	Helium MFC set to  100.000000
12/16/2010	6:15:49 PM	H2 MFC set to  0.000000
12/16/2010	6:15:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:15:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:15:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:15:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:15:49 PM	Tube furnace set to 0
12/16/2010	6:16:49 PM	Helium valve closed
12/16/2010	6:16:49 PM	H2 valve closed
12/16/2010	6:16:49 PM	BCl3 valve closed
12/16/2010	6:16:49 PM	PH3 valve closed
12/16/2010	6:16:49 PM	SiCl4 pre valve closed
12/16/2010	6:16:49 PM	SiCl4 post valve closed
12/16/2010	6:16:49 PM	Bubbler valve closed
12/16/2010	6:16:49 PM	Main Vac valve opened
12/16/2010	6:16:49 PM	Bypass valve opened
12/16/2010	6:16:49 PM	Helium MFC set to  0.000000
12/16/2010	6:16:49 PM	H2 MFC set to  0.000000
12/16/2010	6:16:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:16:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:16:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:16:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:16:49 PM	Tube furnace set to 0
12/16/2010	6:17:49 PM	H2 valve closed
12/16/2010	6:17:49 PM	BCl3 valve closed
12/16/2010	6:17:49 PM	PH3 valve closed
12/16/2010	6:17:49 PM	SiCl4 pre valve closed
12/16/2010	6:17:49 PM	SiCl4 post valve closed
12/16/2010	6:17:49 PM	Bubbler valve closed
12/16/2010	6:17:49 PM	Helium valve opened
12/16/2010	6:17:49 PM	Main Vac valve opened
12/16/2010	6:17:49 PM	Bypass valve opened
12/16/2010	6:17:49 PM	Helium MFC set to  100.000000
12/16/2010	6:17:49 PM	H2 MFC set to  0.000000
12/16/2010	6:17:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:17:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:17:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:17:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:17:49 PM	Tube furnace set to 0
12/16/2010	6:18:49 PM	Helium valve closed
12/16/2010	6:18:49 PM	H2 valve closed
12/16/2010	6:18:49 PM	BCl3 valve closed
12/16/2010	6:18:49 PM	PH3 valve closed
12/16/2010	6:18:49 PM	SiCl4 pre valve closed
12/16/2010	6:18:49 PM	SiCl4 post valve closed
12/16/2010	6:18:49 PM	Bubbler valve closed
12/16/2010	6:18:49 PM	Main Vac valve opened
12/16/2010	6:18:49 PM	Bypass valve opened
12/16/2010	6:18:49 PM	Helium MFC set to  0.000000
12/16/2010	6:18:49 PM	H2 MFC set to  0.000000
12/16/2010	6:18:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:18:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:18:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:18:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:18:49 PM	Tube furnace set to 0
12/16/2010	6:19:49 PM	H2 valve closed
12/16/2010	6:19:49 PM	BCl3 valve closed
12/16/2010	6:19:49 PM	PH3 valve closed
12/16/2010	6:19:49 PM	SiCl4 pre valve closed
12/16/2010	6:19:49 PM	SiCl4 post valve closed
12/16/2010	6:19:49 PM	Bubbler valve closed
12/16/2010	6:19:49 PM	Helium valve opened
12/16/2010	6:19:49 PM	Main Vac valve opened
12/16/2010	6:19:49 PM	Bypass valve opened
12/16/2010	6:19:49 PM	Helium MFC set to  100.000000
12/16/2010	6:19:49 PM	H2 MFC set to  0.000000
12/16/2010	6:19:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:19:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:19:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:19:49 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:19:50 PM	Tube furnace set to 0
12/16/2010	6:20:50 PM	Helium valve closed
12/16/2010	6:20:50 PM	H2 valve closed
12/16/2010	6:20:50 PM	BCl3 valve closed
12/16/2010	6:20:50 PM	PH3 valve closed
12/16/2010	6:20:50 PM	SiCl4 pre valve closed
12/16/2010	6:20:50 PM	SiCl4 post valve closed
12/16/2010	6:20:50 PM	Bubbler valve closed
12/16/2010	6:20:50 PM	Main Vac valve opened
12/16/2010	6:20:50 PM	Bypass valve opened
12/16/2010	6:20:50 PM	Helium MFC set to  0.000000
12/16/2010	6:20:50 PM	H2 MFC set to  0.000000
12/16/2010	6:20:50 PM	BCl3 MFC set to  0.000000
12/16/2010	6:20:50 PM	PHl3 MFC set to  0.000000
12/16/2010	6:20:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:20:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:20:50 PM	Tube furnace set to 0
12/16/2010	6:21:50 PM	H2 valve closed
12/16/2010	6:21:50 PM	BCl3 valve closed
12/16/2010	6:21:50 PM	PH3 valve closed
12/16/2010	6:21:50 PM	SiCl4 pre valve closed
12/16/2010	6:21:50 PM	SiCl4 post valve closed
12/16/2010	6:21:50 PM	Bubbler valve closed
12/16/2010	6:21:50 PM	Helium valve opened
12/16/2010	6:21:50 PM	Main Vac valve opened
12/16/2010	6:21:50 PM	Bypass valve opened
12/16/2010	6:21:50 PM	Helium MFC set to  100.000000
12/16/2010	6:21:50 PM	H2 MFC set to  0.000000
12/16/2010	6:21:50 PM	BCl3 MFC set to  0.000000
12/16/2010	6:21:50 PM	PHl3 MFC set to  0.000000
12/16/2010	6:21:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:21:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:21:50 PM	Tube furnace set to 0
12/16/2010	6:22:50 PM	Helium valve closed
12/16/2010	6:22:50 PM	H2 valve closed
12/16/2010	6:22:50 PM	BCl3 valve closed
12/16/2010	6:22:50 PM	PH3 valve closed
12/16/2010	6:22:50 PM	SiCl4 pre valve closed
12/16/2010	6:22:50 PM	SiCl4 post valve closed
12/16/2010	6:22:50 PM	Bubbler valve closed
12/16/2010	6:22:50 PM	Main Vac valve opened
12/16/2010	6:22:50 PM	Bypass valve opened
12/16/2010	6:22:50 PM	Helium MFC set to  0.000000
12/16/2010	6:22:50 PM	H2 MFC set to  0.000000
12/16/2010	6:22:50 PM	BCl3 MFC set to  0.000000
12/16/2010	6:22:50 PM	PHl3 MFC set to  0.000000
12/16/2010	6:22:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:22:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:22:50 PM	Tube furnace set to 0
12/16/2010	6:23:50 PM	H2 valve closed
12/16/2010	6:23:50 PM	BCl3 valve closed
12/16/2010	6:23:50 PM	PH3 valve closed
12/16/2010	6:23:50 PM	SiCl4 pre valve closed
12/16/2010	6:23:50 PM	SiCl4 post valve closed
12/16/2010	6:23:50 PM	Bubbler valve closed
12/16/2010	6:23:50 PM	Helium valve opened
12/16/2010	6:23:50 PM	Main Vac valve opened
12/16/2010	6:23:50 PM	Bypass valve opened
12/16/2010	6:23:50 PM	Helium MFC set to  100.000000
12/16/2010	6:23:50 PM	H2 MFC set to  0.000000
12/16/2010	6:23:50 PM	BCl3 MFC set to  0.000000
12/16/2010	6:23:50 PM	PHl3 MFC set to  0.000000
12/16/2010	6:23:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:23:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:23:50 PM	Tube furnace set to 0
12/16/2010	6:24:50 PM	Helium valve closed
12/16/2010	6:24:50 PM	H2 valve closed
12/16/2010	6:24:50 PM	BCl3 valve closed
12/16/2010	6:24:50 PM	PH3 valve closed
12/16/2010	6:24:50 PM	SiCl4 pre valve closed
12/16/2010	6:24:50 PM	SiCl4 post valve closed
12/16/2010	6:24:50 PM	Bubbler valve closed
12/16/2010	6:24:50 PM	Main Vac valve opened
12/16/2010	6:24:50 PM	Bypass valve opened
12/16/2010	6:24:50 PM	Helium MFC set to  0.000000
12/16/2010	6:24:50 PM	H2 MFC set to  0.000000
12/16/2010	6:24:50 PM	BCl3 MFC set to  0.000000
12/16/2010	6:24:50 PM	PHl3 MFC set to  0.000000
12/16/2010	6:24:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:24:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:24:51 PM	Tube furnace set to 0
12/16/2010	6:25:51 PM	H2 valve closed
12/16/2010	6:25:51 PM	BCl3 valve closed
12/16/2010	6:25:51 PM	PH3 valve closed
12/16/2010	6:25:51 PM	SiCl4 pre valve closed
12/16/2010	6:25:51 PM	SiCl4 post valve closed
12/16/2010	6:25:51 PM	Bubbler valve closed
12/16/2010	6:25:51 PM	Helium valve opened
12/16/2010	6:25:51 PM	Main Vac valve opened
12/16/2010	6:25:51 PM	Bypass valve opened
12/16/2010	6:25:51 PM	Helium MFC set to  100.000000
12/16/2010	6:25:51 PM	H2 MFC set to  0.000000
12/16/2010	6:25:51 PM	BCl3 MFC set to  0.000000
12/16/2010	6:25:51 PM	PHl3 MFC set to  0.000000
12/16/2010	6:25:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:25:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:25:51 PM	Tube furnace set to 0
12/16/2010	6:26:51 PM	Helium valve closed
12/16/2010	6:26:51 PM	H2 valve closed
12/16/2010	6:26:51 PM	BCl3 valve closed
12/16/2010	6:26:51 PM	PH3 valve closed
12/16/2010	6:26:51 PM	SiCl4 pre valve closed
12/16/2010	6:26:51 PM	SiCl4 post valve closed
12/16/2010	6:26:51 PM	Bubbler valve closed
12/16/2010	6:26:51 PM	Main Vac valve opened
12/16/2010	6:26:51 PM	Bypass valve opened
12/16/2010	6:26:51 PM	Helium MFC set to  0.000000
12/16/2010	6:26:51 PM	H2 MFC set to  0.000000
12/16/2010	6:26:51 PM	BCl3 MFC set to  0.000000
12/16/2010	6:26:51 PM	PHl3 MFC set to  0.000000
12/16/2010	6:26:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:26:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:26:51 PM	Tube furnace set to 0
12/16/2010	6:26:52 PM	Run finished at 6:26 PM
12/16/2010	6:26:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	6:28:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	6:28:40 PM	Recipe started at 6:28 PM
12/16/2010	6:28:40 PM	Helium valve closed
12/16/2010	6:28:40 PM	H2 valve closed
12/16/2010	6:28:40 PM	BCl3 valve closed
12/16/2010	6:28:40 PM	PH3 valve closed
12/16/2010	6:28:40 PM	SiCl4 pre valve closed
12/16/2010	6:28:40 PM	SiCl4 post valve closed
12/16/2010	6:28:40 PM	Main Vac valve closed
12/16/2010	6:28:40 PM	Bubbler valve closed
12/16/2010	6:28:40 PM	Bypass valve opened
12/16/2010	6:28:40 PM	Helium MFC set to  0.000000
12/16/2010	6:28:40 PM	H2 MFC set to  0.000000
12/16/2010	6:28:40 PM	BCl3 MFC set to  0.000000
12/16/2010	6:28:40 PM	PHl3 MFC set to  0.000000
12/16/2010	6:28:40 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:28:40 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:28:40 PM	Tube furnace set to 0
12/16/2010	6:28:40 PM	Helium valve closed
12/16/2010	6:28:40 PM	H2 valve closed
12/16/2010	6:28:40 PM	BCl3 valve closed
12/16/2010	6:28:40 PM	PH3 valve closed
12/16/2010	6:28:41 PM	SiCl4 pre valve closed
12/16/2010	6:28:41 PM	SiCl4 post valve closed
12/16/2010	6:28:41 PM	Bubbler valve closed
12/16/2010	6:28:41 PM	Main Vac valve opened
12/16/2010	6:28:41 PM	Bypass valve opened
12/16/2010	6:28:41 PM	Helium MFC set to  0.000000
12/16/2010	6:28:41 PM	H2 MFC set to  0.000000
12/16/2010	6:28:41 PM	BCl3 MFC set to  0.000000
12/16/2010	6:28:41 PM	PHl3 MFC set to  0.000000
12/16/2010	6:28:41 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:28:41 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:28:41 PM	Tube furnace set to 0
12/16/2010	6:29:41 PM	H2 valve closed
12/16/2010	6:29:41 PM	BCl3 valve closed
12/16/2010	6:29:41 PM	PH3 valve closed
12/16/2010	6:29:41 PM	SiCl4 pre valve closed
12/16/2010	6:29:41 PM	SiCl4 post valve closed
12/16/2010	6:29:41 PM	Bubbler valve closed
12/16/2010	6:29:41 PM	Helium valve opened
12/16/2010	6:29:41 PM	Main Vac valve opened
12/16/2010	6:29:41 PM	Bypass valve opened
12/16/2010	6:29:41 PM	Helium MFC set to  100.000000
12/16/2010	6:29:41 PM	H2 MFC set to  0.000000
12/16/2010	6:29:41 PM	BCl3 MFC set to  0.000000
12/16/2010	6:29:41 PM	PHl3 MFC set to  0.000000
12/16/2010	6:29:41 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:29:41 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:29:41 PM	Tube furnace set to 0
12/16/2010	6:30:41 PM	Helium valve closed
12/16/2010	6:30:41 PM	H2 valve closed
12/16/2010	6:30:41 PM	BCl3 valve closed
12/16/2010	6:30:41 PM	PH3 valve closed
12/16/2010	6:30:41 PM	SiCl4 pre valve closed
12/16/2010	6:30:41 PM	SiCl4 post valve closed
12/16/2010	6:30:41 PM	Bubbler valve closed
12/16/2010	6:30:41 PM	Main Vac valve opened
12/16/2010	6:30:41 PM	Bypass valve opened
12/16/2010	6:30:41 PM	Helium MFC set to  0.000000
12/16/2010	6:30:41 PM	H2 MFC set to  0.000000
12/16/2010	6:30:41 PM	BCl3 MFC set to  0.000000
12/16/2010	6:30:41 PM	PHl3 MFC set to  0.000000
12/16/2010	6:30:41 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:30:41 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:30:41 PM	Tube furnace set to 0
12/16/2010	6:31:41 PM	H2 valve closed
12/16/2010	6:31:41 PM	BCl3 valve closed
12/16/2010	6:31:41 PM	PH3 valve closed
12/16/2010	6:31:41 PM	SiCl4 pre valve closed
12/16/2010	6:31:41 PM	SiCl4 post valve closed
12/16/2010	6:31:41 PM	Bubbler valve closed
12/16/2010	6:31:41 PM	Helium valve opened
12/16/2010	6:31:41 PM	Main Vac valve opened
12/16/2010	6:31:41 PM	Bypass valve opened
12/16/2010	6:31:41 PM	Helium MFC set to  100.000000
12/16/2010	6:31:41 PM	H2 MFC set to  0.000000
12/16/2010	6:31:41 PM	BCl3 MFC set to  0.000000
12/16/2010	6:31:41 PM	PHl3 MFC set to  0.000000
12/16/2010	6:31:41 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:31:41 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:31:41 PM	Tube furnace set to 0
12/16/2010	6:32:41 PM	Helium valve closed
12/16/2010	6:32:41 PM	H2 valve closed
12/16/2010	6:32:41 PM	BCl3 valve closed
12/16/2010	6:32:41 PM	PH3 valve closed
12/16/2010	6:32:41 PM	SiCl4 pre valve closed
12/16/2010	6:32:41 PM	SiCl4 post valve closed
12/16/2010	6:32:41 PM	Bubbler valve closed
12/16/2010	6:32:41 PM	Main Vac valve opened
12/16/2010	6:32:41 PM	Bypass valve opened
12/16/2010	6:32:41 PM	Helium MFC set to  0.000000
12/16/2010	6:32:41 PM	H2 MFC set to  0.000000
12/16/2010	6:32:41 PM	BCl3 MFC set to  0.000000
12/16/2010	6:32:41 PM	PHl3 MFC set to  0.000000
12/16/2010	6:32:41 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:32:41 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:32:41 PM	Tube furnace set to 0
12/16/2010	6:33:41 PM	H2 valve closed
12/16/2010	6:33:41 PM	BCl3 valve closed
12/16/2010	6:33:41 PM	PH3 valve closed
12/16/2010	6:33:41 PM	SiCl4 pre valve closed
12/16/2010	6:33:41 PM	SiCl4 post valve closed
12/16/2010	6:33:41 PM	Bubbler valve closed
12/16/2010	6:33:41 PM	Helium valve opened
12/16/2010	6:33:41 PM	Main Vac valve opened
12/16/2010	6:33:41 PM	Bypass valve opened
12/16/2010	6:33:41 PM	Helium MFC set to  100.000000
12/16/2010	6:33:41 PM	H2 MFC set to  0.000000
12/16/2010	6:33:41 PM	BCl3 MFC set to  0.000000
12/16/2010	6:33:41 PM	PHl3 MFC set to  0.000000
12/16/2010	6:33:41 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:33:41 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:33:42 PM	Tube furnace set to 0
12/16/2010	6:33:49 PM	Run aborted at 6:33 PM
12/16/2010	6:33:49 PM	Helium valve closed
12/16/2010	6:33:49 PM	H2 valve closed
12/16/2010	6:33:49 PM	BCl3 valve closed
12/16/2010	6:33:49 PM	PH3 valve closed
12/16/2010	6:33:49 PM	SiCl4 pre valve closed
12/16/2010	6:33:49 PM	SiCl4 post valve closed
12/16/2010	6:33:49 PM	Bypass valve closed
12/16/2010	6:33:49 PM	Main Vac valve closed
12/16/2010	6:33:49 PM	Bubbler valve closed
12/16/2010	6:33:49 PM	Helium MFC set to  0.000000
12/16/2010	6:33:49 PM	H2 MFC set to  0.000000
12/16/2010	6:33:49 PM	BCl3 MFC set to  0.000000
12/16/2010	6:33:49 PM	PHl3 MFC set to  0.000000
12/16/2010	6:33:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:33:49 PM	Tube furnace set to 0
12/16/2010	6:33:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	6:33:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	6:33:50 PM	Recipe started at 6:33 PM
12/16/2010	6:33:50 PM	Helium valve closed
12/16/2010	6:33:50 PM	H2 valve closed
12/16/2010	6:33:50 PM	BCl3 valve closed
12/16/2010	6:33:50 PM	PH3 valve closed
12/16/2010	6:33:50 PM	SiCl4 pre valve closed
12/16/2010	6:33:50 PM	SiCl4 post valve closed
12/16/2010	6:33:50 PM	Main Vac valve closed
12/16/2010	6:33:50 PM	Bubbler valve closed
12/16/2010	6:33:50 PM	Bypass valve opened
12/16/2010	6:33:50 PM	Helium MFC set to  0.000000
12/16/2010	6:33:50 PM	H2 MFC set to  0.000000
12/16/2010	6:33:50 PM	BCl3 MFC set to  0.000000
12/16/2010	6:33:50 PM	PHl3 MFC set to  0.000000
12/16/2010	6:33:50 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:33:50 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:33:51 PM	Tube furnace set to 0
12/16/2010	6:33:51 PM	Helium valve closed
12/16/2010	6:33:51 PM	H2 valve closed
12/16/2010	6:33:51 PM	BCl3 valve closed
12/16/2010	6:33:51 PM	PH3 valve closed
12/16/2010	6:33:51 PM	SiCl4 pre valve closed
12/16/2010	6:33:51 PM	SiCl4 post valve closed
12/16/2010	6:33:51 PM	Bubbler valve closed
12/16/2010	6:33:51 PM	Main Vac valve opened
12/16/2010	6:33:51 PM	Bypass valve opened
12/16/2010	6:33:51 PM	Helium MFC set to  0.000000
12/16/2010	6:33:51 PM	H2 MFC set to  0.000000
12/16/2010	6:33:51 PM	BCl3 MFC set to  0.000000
12/16/2010	6:33:51 PM	PHl3 MFC set to  0.000000
12/16/2010	6:33:51 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:33:51 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:33:51 PM	Tube furnace set to 0
12/16/2010	6:33:51 PM	Run finished at 6:33 PM
12/16/2010	6:33:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	6:34:47 PM	Recipe started at 6:34 PM
12/16/2010	6:34:47 PM	Helium valve closed
12/16/2010	6:34:47 PM	BCl3 valve closed
12/16/2010	6:34:47 PM	PH3 valve closed
12/16/2010	6:34:47 PM	SiCl4 pre valve closed
12/16/2010	6:34:47 PM	SiCl4 post valve closed
12/16/2010	6:34:47 PM	Main Vac valve closed
12/16/2010	6:34:47 PM	Bypass valve closed
12/16/2010	6:34:47 PM	Bubbler valve closed
12/16/2010	6:34:47 PM	H2 valve opened
12/16/2010	6:34:47 PM	Helium MFC set to  0.000000
12/16/2010	6:34:47 PM	H2 MFC set to  500.000000
12/16/2010	6:34:47 PM	BCl3 MFC set to  0.000000
12/16/2010	6:34:47 PM	PHl3 MFC set to  0.000000
12/16/2010	6:34:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:34:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:34:47 PM	Tube furnace set to 0
12/16/2010	6:36:04 PM	Helium valve closed
12/16/2010	6:36:04 PM	BCl3 valve closed
12/16/2010	6:36:04 PM	PH3 valve closed
12/16/2010	6:36:04 PM	SiCl4 pre valve closed
12/16/2010	6:36:04 PM	SiCl4 post valve closed
12/16/2010	6:36:04 PM	Main Vac valve closed
12/16/2010	6:36:04 PM	Bypass valve closed
12/16/2010	6:36:04 PM	H2 valve opened
12/16/2010	6:36:04 PM	Bubbler valve opened
12/16/2010	6:36:04 PM	Helium MFC set to  0.000000
12/16/2010	6:36:04 PM	H2 MFC set to  500.000000
12/16/2010	6:36:04 PM	BCl3 MFC set to  0.000000
12/16/2010	6:36:04 PM	PHl3 MFC set to  0.000000
12/16/2010	6:36:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	6:36:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:36:04 PM	Tube furnace set to 1000
12/16/2010	6:56:04 PM	Helium valve closed
12/16/2010	6:56:04 PM	PH3 valve closed
12/16/2010	6:56:04 PM	Main Vac valve closed
12/16/2010	6:56:04 PM	Bypass valve closed
12/16/2010	6:56:04 PM	H2 valve opened
12/16/2010	6:56:04 PM	BCl3 valve opened
12/16/2010	6:56:04 PM	SiCl4 pre valve opened
12/16/2010	6:56:04 PM	SiCl4 post valve opened
12/16/2010	6:56:04 PM	Bubbler valve opened
12/16/2010	6:56:04 PM	Helium MFC set to  0.000000
12/16/2010	6:56:04 PM	H2 MFC set to  500.000000
12/16/2010	6:56:04 PM	BCl3 MFC set to  12.000000
12/16/2010	6:56:04 PM	PHl3 MFC set to  0.000000
12/16/2010	6:56:04 PM	SiCl4 MFC set to  50.000000
12/16/2010	6:56:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	6:56:04 PM	Tube furnace set to 1000
12/16/2010	7:26:04 PM	H2 valve closed
12/16/2010	7:26:04 PM	BCl3 valve closed
12/16/2010	7:26:04 PM	PH3 valve closed
12/16/2010	7:26:04 PM	SiCl4 pre valve closed
12/16/2010	7:26:04 PM	SiCl4 post valve closed
12/16/2010	7:26:04 PM	Main Vac valve closed
12/16/2010	7:26:04 PM	Bypass valve closed
12/16/2010	7:26:04 PM	Helium valve opened
12/16/2010	7:26:04 PM	Bubbler valve opened
12/16/2010	7:26:04 PM	Helium MFC set to  500.000000
12/16/2010	7:26:04 PM	H2 MFC set to  0.000000
12/16/2010	7:26:04 PM	BCl3 MFC set to  0.000000
12/16/2010	7:26:04 PM	PHl3 MFC set to  0.000000
12/16/2010	7:26:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	7:26:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:26:04 PM	Tube furnace set to 0
12/16/2010	7:46:04 PM	Helium valve closed
12/16/2010	7:46:04 PM	H2 valve closed
12/16/2010	7:46:04 PM	BCl3 valve closed
12/16/2010	7:46:04 PM	PH3 valve closed
12/16/2010	7:46:04 PM	SiCl4 pre valve closed
12/16/2010	7:46:04 PM	SiCl4 post valve closed
12/16/2010	7:46:04 PM	Main Vac valve closed
12/16/2010	7:46:04 PM	Bypass valve closed
12/16/2010	7:46:04 PM	Bubbler valve closed
12/16/2010	7:46:04 PM	Helium MFC set to  0.000000
12/16/2010	7:46:04 PM	H2 MFC set to  0.000000
12/16/2010	7:46:04 PM	BCl3 MFC set to  0.000000
12/16/2010	7:46:04 PM	PHl3 MFC set to  0.000000
12/16/2010	7:46:04 PM	SiCl4 MFC set to  0.000000
12/16/2010	7:46:04 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	7:46:05 PM	Tube furnace set to 0
12/16/2010	7:46:05 PM	Run finished at 7:46 PM
12/16/2010	8:57:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	8:57:59 PM	Recipe started at 8:57 PM
12/16/2010	8:57:59 PM	Helium valve closed
12/16/2010	8:57:59 PM	H2 valve closed
12/16/2010	8:57:59 PM	BCl3 valve closed
12/16/2010	8:57:59 PM	PH3 valve closed
12/16/2010	8:57:59 PM	SiCl4 pre valve closed
12/16/2010	8:57:59 PM	SiCl4 post valve closed
12/16/2010	8:57:59 PM	Main Vac valve closed
12/16/2010	8:57:59 PM	Bubbler valve closed
12/16/2010	8:57:59 PM	Bypass valve opened
12/16/2010	8:57:59 PM	Helium MFC set to  0.000000
12/16/2010	8:57:59 PM	H2 MFC set to  0.000000
12/16/2010	8:57:59 PM	BCl3 MFC set to  0.000000
12/16/2010	8:57:59 PM	PHl3 MFC set to  0.000000
12/16/2010	8:57:59 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:57:59 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:57:59 PM	Tube furnace set to 0
12/16/2010	8:59:28 PM	Run aborted at 8:59 PM
12/16/2010	8:59:28 PM	Helium valve closed
12/16/2010	8:59:28 PM	H2 valve closed
12/16/2010	8:59:28 PM	BCl3 valve closed
12/16/2010	8:59:28 PM	PH3 valve closed
12/16/2010	8:59:28 PM	SiCl4 pre valve closed
12/16/2010	8:59:28 PM	SiCl4 post valve closed
12/16/2010	8:59:28 PM	Bypass valve closed
12/16/2010	8:59:28 PM	Main Vac valve closed
12/16/2010	8:59:28 PM	Bubbler valve closed
12/16/2010	8:59:28 PM	Helium MFC set to  0.000000
12/16/2010	8:59:28 PM	H2 MFC set to  0.000000
12/16/2010	8:59:28 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:28 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:28 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:28 PM	Tube furnace set to 0
12/16/2010	8:59:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	8:59:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	8:59:32 PM	Recipe started at 8:59 PM
12/16/2010	8:59:32 PM	H2 valve closed
12/16/2010	8:59:32 PM	BCl3 valve closed
12/16/2010	8:59:32 PM	PH3 valve closed
12/16/2010	8:59:32 PM	SiCl4 pre valve closed
12/16/2010	8:59:32 PM	SiCl4 post valve closed
12/16/2010	8:59:32 PM	Main Vac valve closed
12/16/2010	8:59:32 PM	Bypass valve closed
12/16/2010	8:59:32 PM	Bubbler valve closed
12/16/2010	8:59:32 PM	Helium valve opened
12/16/2010	8:59:32 PM	Helium MFC set to  500.000000
12/16/2010	8:59:32 PM	H2 MFC set to  0.000000
12/16/2010	8:59:32 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:32 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:59:32 PM	Tube furnace set to 0
12/16/2010	8:59:32 PM	Helium valve closed
12/16/2010	8:59:32 PM	H2 valve closed
12/16/2010	8:59:32 PM	BCl3 valve closed
12/16/2010	8:59:32 PM	PH3 valve closed
12/16/2010	8:59:32 PM	SiCl4 pre valve closed
12/16/2010	8:59:32 PM	SiCl4 post valve closed
12/16/2010	8:59:32 PM	Main Vac valve closed
12/16/2010	8:59:32 PM	Bypass valve closed
12/16/2010	8:59:32 PM	Bubbler valve closed
12/16/2010	8:59:32 PM	Helium MFC set to  0.000000
12/16/2010	8:59:32 PM	H2 MFC set to  0.000000
12/16/2010	8:59:32 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:32 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:59:32 PM	Tube furnace set to 0
12/16/2010	8:59:32 PM	Run finished at 8:59 PM
12/16/2010	8:59:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/16/2010	8:59:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	8:59:36 PM	Recipe started at 8:59 PM
12/16/2010	8:59:36 PM	Helium valve closed
12/16/2010	8:59:36 PM	H2 valve closed
12/16/2010	8:59:36 PM	BCl3 valve closed
12/16/2010	8:59:36 PM	PH3 valve closed
12/16/2010	8:59:36 PM	SiCl4 pre valve closed
12/16/2010	8:59:36 PM	SiCl4 post valve closed
12/16/2010	8:59:36 PM	Main Vac valve closed
12/16/2010	8:59:36 PM	Bubbler valve closed
12/16/2010	8:59:36 PM	Bypass valve opened
12/16/2010	8:59:36 PM	Helium MFC set to  0.000000
12/16/2010	8:59:36 PM	H2 MFC set to  0.000000
12/16/2010	8:59:36 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:36 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:36 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:36 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:59:36 PM	Tube furnace set to 0
12/16/2010	8:59:47 PM	Helium valve closed
12/16/2010	8:59:47 PM	H2 valve closed
12/16/2010	8:59:47 PM	BCl3 valve closed
12/16/2010	8:59:47 PM	PH3 valve closed
12/16/2010	8:59:47 PM	SiCl4 pre valve closed
12/16/2010	8:59:47 PM	SiCl4 post valve closed
12/16/2010	8:59:47 PM	Bubbler valve closed
12/16/2010	8:59:47 PM	Main Vac valve opened
12/16/2010	8:59:47 PM	Bypass valve opened
12/16/2010	8:59:47 PM	Helium MFC set to  0.000000
12/16/2010	8:59:47 PM	H2 MFC set to  0.000000
12/16/2010	8:59:47 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:47 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:47 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:47 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:59:47 PM	Tube furnace set to 0
12/16/2010	8:59:48 PM	Run finished at 8:59 PM
12/16/2010	8:59:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	8:59:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	8:59:57 PM	Recipe started at 8:59 PM
12/16/2010	8:59:57 PM	Helium valve closed
12/16/2010	8:59:57 PM	H2 valve closed
12/16/2010	8:59:57 PM	BCl3 valve closed
12/16/2010	8:59:57 PM	PH3 valve closed
12/16/2010	8:59:57 PM	SiCl4 pre valve closed
12/16/2010	8:59:57 PM	SiCl4 post valve closed
12/16/2010	8:59:57 PM	Main Vac valve closed
12/16/2010	8:59:57 PM	Bubbler valve closed
12/16/2010	8:59:57 PM	Bypass valve opened
12/16/2010	8:59:57 PM	Helium MFC set to  0.000000
12/16/2010	8:59:57 PM	H2 MFC set to  0.000000
12/16/2010	8:59:57 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:57 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:59:57 PM	Tube furnace set to 0
12/16/2010	8:59:57 PM	Helium valve closed
12/16/2010	8:59:57 PM	H2 valve closed
12/16/2010	8:59:57 PM	BCl3 valve closed
12/16/2010	8:59:57 PM	PH3 valve closed
12/16/2010	8:59:57 PM	SiCl4 pre valve closed
12/16/2010	8:59:57 PM	SiCl4 post valve closed
12/16/2010	8:59:57 PM	Bubbler valve closed
12/16/2010	8:59:57 PM	Main Vac valve opened
12/16/2010	8:59:57 PM	Bypass valve opened
12/16/2010	8:59:57 PM	Helium MFC set to  0.000000
12/16/2010	8:59:57 PM	H2 MFC set to  0.000000
12/16/2010	8:59:57 PM	BCl3 MFC set to  0.000000
12/16/2010	8:59:57 PM	PHl3 MFC set to  0.000000
12/16/2010	8:59:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	8:59:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	8:59:57 PM	Tube furnace set to 0
12/16/2010	8:59:57 PM	Run finished at 8:59 PM
12/16/2010	8:59:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	9:00:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:00:20 PM	Recipe started at 9:00 PM
12/16/2010	9:00:20 PM	Helium valve closed
12/16/2010	9:00:20 PM	H2 valve closed
12/16/2010	9:00:20 PM	BCl3 valve closed
12/16/2010	9:00:20 PM	PH3 valve closed
12/16/2010	9:00:20 PM	SiCl4 pre valve closed
12/16/2010	9:00:20 PM	SiCl4 post valve closed
12/16/2010	9:00:20 PM	Main Vac valve closed
12/16/2010	9:00:20 PM	Bubbler valve closed
12/16/2010	9:00:20 PM	Bypass valve opened
12/16/2010	9:00:20 PM	Helium MFC set to  0.000000
12/16/2010	9:00:20 PM	H2 MFC set to  0.000000
12/16/2010	9:00:20 PM	BCl3 MFC set to  0.000000
12/16/2010	9:00:20 PM	PHl3 MFC set to  0.000000
12/16/2010	9:00:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:00:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:00:20 PM	Tube furnace set to 0
12/16/2010	9:00:20 PM	Helium valve closed
12/16/2010	9:00:20 PM	H2 valve closed
12/16/2010	9:00:20 PM	BCl3 valve closed
12/16/2010	9:00:20 PM	PH3 valve closed
12/16/2010	9:00:20 PM	SiCl4 pre valve closed
12/16/2010	9:00:20 PM	SiCl4 post valve closed
12/16/2010	9:00:20 PM	Bubbler valve closed
12/16/2010	9:00:20 PM	Main Vac valve opened
12/16/2010	9:00:20 PM	Bypass valve opened
12/16/2010	9:00:20 PM	Helium MFC set to  0.000000
12/16/2010	9:00:20 PM	H2 MFC set to  0.000000
12/16/2010	9:00:20 PM	BCl3 MFC set to  0.000000
12/16/2010	9:00:20 PM	PHl3 MFC set to  0.000000
12/16/2010	9:00:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:00:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:00:20 PM	Tube furnace set to 0
12/16/2010	9:01:02 PM	Run aborted at 9:01 PM
12/16/2010	9:01:02 PM	Helium valve closed
12/16/2010	9:01:02 PM	H2 valve closed
12/16/2010	9:01:02 PM	BCl3 valve closed
12/16/2010	9:01:02 PM	PH3 valve closed
12/16/2010	9:01:02 PM	SiCl4 pre valve closed
12/16/2010	9:01:02 PM	SiCl4 post valve closed
12/16/2010	9:01:02 PM	Bypass valve closed
12/16/2010	9:01:02 PM	Main Vac valve closed
12/16/2010	9:01:02 PM	Bubbler valve closed
12/16/2010	9:01:02 PM	Helium MFC set to  0.000000
12/16/2010	9:01:02 PM	H2 MFC set to  0.000000
12/16/2010	9:01:02 PM	BCl3 MFC set to  0.000000
12/16/2010	9:01:02 PM	PHl3 MFC set to  0.000000
12/16/2010	9:01:02 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:01:02 PM	Tube furnace set to 0
12/16/2010	9:01:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:01:10 PM	Bypass valve opened
12/16/2010	9:01:11 PM	Main Vac valve opened
12/16/2010	9:03:22 PM	Program exited cleanly
12/16/2010	9:05:42 PM	Program started normally
12/16/2010	9:05:42 PM	Helium valve closed
12/16/2010	9:05:42 PM	H2 valve closed
12/16/2010	9:05:42 PM	BCl3 valve closed
12/16/2010	9:05:42 PM	PH3 valve closed
12/16/2010	9:05:42 PM	SiCl4 pre valve closed
12/16/2010	9:05:42 PM	SiCl4 post valve closed
12/16/2010	9:05:42 PM	Main Vac valve closed
12/16/2010	9:05:42 PM	Bypass valve closed
12/16/2010	9:05:42 PM	Bubbler valve closed
12/16/2010	9:05:42 PM	Helium MFC set to  0.000000
12/16/2010	9:05:42 PM	H2 MFC set to  0.000000
12/16/2010	9:05:42 PM	BCl3 MFC set to  0.000000
12/16/2010	9:05:42 PM	PHl3 MFC set to  0.000000
12/16/2010	9:05:42 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:05:42 PM	Bypass solenoid MFC set to  760.000000
12/16/2010	9:05:42 PM	Tube furnace set to 0
12/16/2010	9:05:43 PM	Bypass valve opened
12/16/2010	9:05:44 PM	Main Vac valve opened
12/16/2010	9:05:44 PM	Main Vac valve closed
12/16/2010	9:05:45 PM	Main Vac valve opened
12/16/2010	9:10:30 PM	Program exited cleanly
12/16/2010	9:12:49 PM	Program started normally
12/16/2010	9:12:49 PM	Helium valve closed
12/16/2010	9:12:49 PM	H2 valve closed
12/16/2010	9:12:49 PM	BCl3 valve closed
12/16/2010	9:12:49 PM	PH3 valve closed
12/16/2010	9:12:49 PM	SiCl4 pre valve closed
12/16/2010	9:12:49 PM	SiCl4 post valve closed
12/16/2010	9:12:49 PM	Main Vac valve closed
12/16/2010	9:12:49 PM	Bypass valve closed
12/16/2010	9:12:49 PM	Bubbler valve closed
12/16/2010	9:12:49 PM	Helium MFC set to  0.000000
12/16/2010	9:12:49 PM	H2 MFC set to  0.000000
12/16/2010	9:12:49 PM	BCl3 MFC set to  0.000000
12/16/2010	9:12:49 PM	PHl3 MFC set to  0.000000
12/16/2010	9:12:49 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:12:49 PM	Bypass solenoid MFC set to  760.000000
12/16/2010	9:12:49 PM	Tube furnace set to 0
12/16/2010	9:12:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\20x_he_purgepump.xml
12/16/2010	9:13:20 PM	Recipe started at 9:13 PM
12/16/2010	9:13:20 PM	Helium valve closed
12/16/2010	9:13:20 PM	H2 valve closed
12/16/2010	9:13:20 PM	BCl3 valve closed
12/16/2010	9:13:20 PM	PH3 valve closed
12/16/2010	9:13:20 PM	SiCl4 pre valve closed
12/16/2010	9:13:20 PM	SiCl4 post valve closed
12/16/2010	9:13:20 PM	Main Vac valve closed
12/16/2010	9:13:20 PM	Bubbler valve closed
12/16/2010	9:13:20 PM	Bypass valve opened
12/16/2010	9:13:20 PM	Helium MFC set to  0.000000
12/16/2010	9:13:20 PM	H2 MFC set to  0.000000
12/16/2010	9:13:20 PM	BCl3 MFC set to  0.000000
12/16/2010	9:13:20 PM	PHl3 MFC set to  0.000000
12/16/2010	9:13:20 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:13:20 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:13:21 PM	Tube furnace set to 0
12/16/2010	9:13:21 PM	Helium valve closed
12/16/2010	9:13:21 PM	H2 valve closed
12/16/2010	9:13:21 PM	BCl3 valve closed
12/16/2010	9:13:21 PM	PH3 valve closed
12/16/2010	9:13:21 PM	SiCl4 pre valve closed
12/16/2010	9:13:21 PM	SiCl4 post valve closed
12/16/2010	9:13:21 PM	Bubbler valve closed
12/16/2010	9:13:21 PM	Main Vac valve opened
12/16/2010	9:13:21 PM	Bypass valve opened
12/16/2010	9:13:21 PM	Helium MFC set to  0.000000
12/16/2010	9:13:21 PM	H2 MFC set to  0.000000
12/16/2010	9:13:21 PM	BCl3 MFC set to  0.000000
12/16/2010	9:13:21 PM	PHl3 MFC set to  0.000000
12/16/2010	9:13:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:13:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:13:21 PM	Tube furnace set to 0
12/16/2010	9:14:21 PM	H2 valve closed
12/16/2010	9:14:21 PM	BCl3 valve closed
12/16/2010	9:14:21 PM	PH3 valve closed
12/16/2010	9:14:21 PM	SiCl4 pre valve closed
12/16/2010	9:14:21 PM	SiCl4 post valve closed
12/16/2010	9:14:21 PM	Bubbler valve closed
12/16/2010	9:14:21 PM	Helium valve opened
12/16/2010	9:14:21 PM	Main Vac valve opened
12/16/2010	9:14:21 PM	Bypass valve opened
12/16/2010	9:14:21 PM	Helium MFC set to  100.000000
12/16/2010	9:14:21 PM	H2 MFC set to  0.000000
12/16/2010	9:14:21 PM	BCl3 MFC set to  0.000000
12/16/2010	9:14:21 PM	PHl3 MFC set to  0.000000
12/16/2010	9:14:21 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:14:21 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:14:21 PM	Tube furnace set to 0
12/16/2010	9:15:00 PM	Run aborted at 9:15 PM
12/16/2010	9:15:00 PM	Helium valve closed
12/16/2010	9:15:00 PM	H2 valve closed
12/16/2010	9:15:00 PM	BCl3 valve closed
12/16/2010	9:15:00 PM	PH3 valve closed
12/16/2010	9:15:00 PM	SiCl4 pre valve closed
12/16/2010	9:15:00 PM	SiCl4 post valve closed
12/16/2010	9:15:00 PM	Bypass valve closed
12/16/2010	9:15:00 PM	Main Vac valve closed
12/16/2010	9:15:00 PM	Bubbler valve closed
12/16/2010	9:15:00 PM	Helium MFC set to  0.000000
12/16/2010	9:15:00 PM	H2 MFC set to  0.000000
12/16/2010	9:15:00 PM	BCl3 MFC set to  0.000000
12/16/2010	9:15:00 PM	PHl3 MFC set to  0.000000
12/16/2010	9:15:00 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:15:00 PM	Tube furnace set to 0
12/16/2010	9:15:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\20x_he_purgepump.xml
12/16/2010	9:15:02 PM	Bypass valve opened
12/16/2010	9:15:02 PM	Main Vac valve opened
12/16/2010	9:15:09 PM	Helium MFC set to  100.000000
12/16/2010	9:15:10 PM	Helium valve opened
12/16/2010	9:15:14 PM	Helium valve closed
12/16/2010	9:15:19 PM	H2 MFC set to  100.000000
12/16/2010	9:15:21 PM	H2 valve opened
12/16/2010	9:15:24 PM	H2 valve closed
12/16/2010	9:15:29 PM	H2 MFC set to  0.000000
12/16/2010	9:15:37 PM	Helium MFC set to  0.000000
12/16/2010	9:15:41 PM	Helium valve opened
12/16/2010	9:15:42 PM	Helium valve closed
12/16/2010	9:16:03 PM	Helium MFC set to  100.000000
12/16/2010	9:16:04 PM	Helium valve opened
12/16/2010	9:16:08 PM	Helium valve closed
12/16/2010	9:16:14 PM	H2 MFC set to  100.000000
12/16/2010	9:16:16 PM	H2 valve opened
12/16/2010	9:16:21 PM	H2 valve closed
12/16/2010	9:16:26 PM	Helium MFC set to  100.000000
12/16/2010	9:16:30 PM	Helium valve opened
12/16/2010	9:16:33 PM	Helium valve closed
12/16/2010	9:16:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:17:10 PM	Recipe started at 9:17 PM
12/16/2010	9:17:10 PM	Helium valve closed
12/16/2010	9:17:10 PM	H2 valve closed
12/16/2010	9:17:10 PM	BCl3 valve closed
12/16/2010	9:17:10 PM	PH3 valve closed
12/16/2010	9:17:10 PM	SiCl4 pre valve closed
12/16/2010	9:17:10 PM	SiCl4 post valve closed
12/16/2010	9:17:10 PM	Main Vac valve closed
12/16/2010	9:17:10 PM	Bubbler valve closed
12/16/2010	9:17:10 PM	Bypass valve opened
12/16/2010	9:17:10 PM	Helium MFC set to  0.000000
12/16/2010	9:17:10 PM	H2 MFC set to  0.000000
12/16/2010	9:17:10 PM	BCl3 MFC set to  0.000000
12/16/2010	9:17:10 PM	PHl3 MFC set to  0.000000
12/16/2010	9:17:10 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:17:10 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:17:10 PM	Tube furnace set to 0
12/16/2010	9:17:11 PM	Helium valve closed
12/16/2010	9:17:11 PM	H2 valve closed
12/16/2010	9:17:11 PM	BCl3 valve closed
12/16/2010	9:17:11 PM	PH3 valve closed
12/16/2010	9:17:11 PM	SiCl4 pre valve closed
12/16/2010	9:17:11 PM	SiCl4 post valve closed
12/16/2010	9:17:11 PM	Bubbler valve closed
12/16/2010	9:17:11 PM	Main Vac valve opened
12/16/2010	9:17:11 PM	Bypass valve opened
12/16/2010	9:17:11 PM	Helium MFC set to  0.000000
12/16/2010	9:17:11 PM	H2 MFC set to  0.000000
12/16/2010	9:17:11 PM	BCl3 MFC set to  0.000000
12/16/2010	9:17:11 PM	PHl3 MFC set to  0.000000
12/16/2010	9:17:11 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:17:11 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:17:11 PM	Tube furnace set to 0
12/16/2010	9:17:16 PM	Run aborted at 9:17 PM
12/16/2010	9:17:16 PM	Helium valve closed
12/16/2010	9:17:16 PM	H2 valve closed
12/16/2010	9:17:16 PM	BCl3 valve closed
12/16/2010	9:17:16 PM	PH3 valve closed
12/16/2010	9:17:16 PM	SiCl4 pre valve closed
12/16/2010	9:17:16 PM	SiCl4 post valve closed
12/16/2010	9:17:16 PM	Bypass valve closed
12/16/2010	9:17:16 PM	Main Vac valve closed
12/16/2010	9:17:16 PM	Bubbler valve closed
12/16/2010	9:17:16 PM	Helium MFC set to  0.000000
12/16/2010	9:17:16 PM	H2 MFC set to  0.000000
12/16/2010	9:17:16 PM	BCl3 MFC set to  0.000000
12/16/2010	9:17:16 PM	PHl3 MFC set to  0.000000
12/16/2010	9:17:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:17:16 PM	Tube furnace set to 0
12/16/2010	9:17:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:17:18 PM	Bypass valve opened
12/16/2010	9:17:18 PM	Main Vac valve opened
12/16/2010	9:20:45 PM	Helium MFC set to  100.000000
12/16/2010	9:20:46 PM	Helium valve opened
12/16/2010	9:20:50 PM	Helium valve closed
12/16/2010	9:20:55 PM	Program exited cleanly
12/16/2010	9:21:07 PM	Program started normally
12/16/2010	9:21:07 PM	Helium valve closed
12/16/2010	9:21:07 PM	H2 valve closed
12/16/2010	9:21:07 PM	BCl3 valve closed
12/16/2010	9:21:07 PM	PH3 valve closed
12/16/2010	9:21:07 PM	SiCl4 pre valve closed
12/16/2010	9:21:07 PM	SiCl4 post valve closed
12/16/2010	9:21:07 PM	Main Vac valve closed
12/16/2010	9:21:07 PM	Bypass valve closed
12/16/2010	9:21:07 PM	Bubbler valve closed
12/16/2010	9:21:07 PM	Helium MFC set to  0.000000
12/16/2010	9:21:07 PM	H2 MFC set to  0.000000
12/16/2010	9:21:07 PM	BCl3 MFC set to  0.000000
12/16/2010	9:21:07 PM	PHl3 MFC set to  0.000000
12/16/2010	9:21:07 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:21:07 PM	Bypass solenoid MFC set to  760.000000
12/16/2010	9:21:07 PM	Tube furnace set to 0
12/16/2010	9:21:09 PM	Bypass valve opened
12/16/2010	9:21:09 PM	Main Vac valve opened
12/16/2010	9:21:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:21:30 PM	Recipe started at 9:21 PM
12/16/2010	9:21:30 PM	Helium valve closed
12/16/2010	9:21:30 PM	H2 valve closed
12/16/2010	9:21:30 PM	BCl3 valve closed
12/16/2010	9:21:30 PM	PH3 valve closed
12/16/2010	9:21:30 PM	SiCl4 pre valve closed
12/16/2010	9:21:30 PM	SiCl4 post valve closed
12/16/2010	9:21:30 PM	Main Vac valve closed
12/16/2010	9:21:30 PM	Bubbler valve closed
12/16/2010	9:21:30 PM	Bypass valve opened
12/16/2010	9:21:30 PM	Helium MFC set to  0.000000
12/16/2010	9:21:30 PM	H2 MFC set to  0.000000
12/16/2010	9:21:30 PM	BCl3 MFC set to  0.000000
12/16/2010	9:21:30 PM	PHl3 MFC set to  0.000000
12/16/2010	9:21:30 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:21:30 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:21:30 PM	Tube furnace set to 0
12/16/2010	9:21:31 PM	Run aborted at 9:21 PM
12/16/2010	9:21:31 PM	Helium valve closed
12/16/2010	9:21:31 PM	H2 valve closed
12/16/2010	9:21:31 PM	BCl3 valve closed
12/16/2010	9:21:31 PM	PH3 valve closed
12/16/2010	9:21:31 PM	SiCl4 pre valve closed
12/16/2010	9:21:31 PM	SiCl4 post valve closed
12/16/2010	9:21:31 PM	Bypass valve closed
12/16/2010	9:21:31 PM	Main Vac valve closed
12/16/2010	9:21:31 PM	Bubbler valve closed
12/16/2010	9:21:31 PM	Helium MFC set to  0.000000
12/16/2010	9:21:31 PM	H2 MFC set to  0.000000
12/16/2010	9:21:31 PM	BCl3 MFC set to  0.000000
12/16/2010	9:21:31 PM	PHl3 MFC set to  0.000000
12/16/2010	9:21:31 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:21:31 PM	Tube furnace set to 0
12/16/2010	9:21:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:21:39 PM	Bypass valve opened
12/16/2010	9:21:39 PM	Bypass valve closed
12/16/2010	9:21:40 PM	Bypass valve opened
12/16/2010	9:21:41 PM	Bypass valve closed
12/16/2010	9:21:42 PM	Bypass valve opened
12/16/2010	9:21:43 PM	Bypass valve closed
12/16/2010	9:21:43 PM	Bypass valve opened
12/16/2010	9:21:44 PM	Bypass valve closed
12/16/2010	9:22:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:22:19 PM	Recipe started at 9:22 PM
12/16/2010	9:22:19 PM	Helium valve closed
12/16/2010	9:22:19 PM	H2 valve closed
12/16/2010	9:22:19 PM	BCl3 valve closed
12/16/2010	9:22:19 PM	PH3 valve closed
12/16/2010	9:22:19 PM	SiCl4 pre valve closed
12/16/2010	9:22:19 PM	SiCl4 post valve closed
12/16/2010	9:22:19 PM	Main Vac valve closed
12/16/2010	9:22:19 PM	Bubbler valve closed
12/16/2010	9:22:19 PM	Bypass valve opened
12/16/2010	9:22:19 PM	Helium MFC set to  0.000000
12/16/2010	9:22:19 PM	H2 MFC set to  0.000000
12/16/2010	9:22:19 PM	BCl3 MFC set to  0.000000
12/16/2010	9:22:19 PM	PHl3 MFC set to  0.000000
12/16/2010	9:22:19 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:22:19 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:22:19 PM	Tube furnace set to 0
12/16/2010	9:22:19 PM	Helium valve closed
12/16/2010	9:22:19 PM	H2 valve closed
12/16/2010	9:22:19 PM	BCl3 valve closed
12/16/2010	9:22:19 PM	PH3 valve closed
12/16/2010	9:22:19 PM	SiCl4 pre valve closed
12/16/2010	9:22:19 PM	SiCl4 post valve closed
12/16/2010	9:22:19 PM	Bubbler valve closed
12/16/2010	9:22:19 PM	Main Vac valve opened
12/16/2010	9:22:19 PM	Bypass valve opened
12/16/2010	9:22:19 PM	Helium MFC set to  0.000000
12/16/2010	9:22:19 PM	H2 MFC set to  0.000000
12/16/2010	9:22:19 PM	BCl3 MFC set to  0.000000
12/16/2010	9:22:19 PM	PHl3 MFC set to  0.000000
12/16/2010	9:22:19 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:22:19 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:22:19 PM	Tube furnace set to 0
12/16/2010	9:22:55 PM	H2 valve closed
12/16/2010	9:22:55 PM	BCl3 valve closed
12/16/2010	9:22:55 PM	PH3 valve closed
12/16/2010	9:22:55 PM	SiCl4 pre valve closed
12/16/2010	9:22:55 PM	SiCl4 post valve closed
12/16/2010	9:22:55 PM	Bubbler valve closed
12/16/2010	9:22:55 PM	Helium valve opened
12/16/2010	9:22:55 PM	Main Vac valve opened
12/16/2010	9:22:55 PM	Bypass valve opened
12/16/2010	9:22:55 PM	Helium MFC set to  100.000000
12/16/2010	9:22:55 PM	H2 MFC set to  0.000000
12/16/2010	9:22:55 PM	BCl3 MFC set to  0.000000
12/16/2010	9:22:55 PM	PHl3 MFC set to  0.000000
12/16/2010	9:22:55 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:22:55 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:22:55 PM	Tube furnace set to 0
12/16/2010	9:23:55 PM	Helium valve closed
12/16/2010	9:23:55 PM	H2 valve closed
12/16/2010	9:23:55 PM	BCl3 valve closed
12/16/2010	9:23:55 PM	PH3 valve closed
12/16/2010	9:23:55 PM	SiCl4 pre valve closed
12/16/2010	9:23:55 PM	SiCl4 post valve closed
12/16/2010	9:23:55 PM	Bubbler valve closed
12/16/2010	9:23:55 PM	Main Vac valve opened
12/16/2010	9:23:55 PM	Bypass valve opened
12/16/2010	9:23:55 PM	Helium MFC set to  0.000000
12/16/2010	9:23:55 PM	H2 MFC set to  0.000000
12/16/2010	9:23:55 PM	BCl3 MFC set to  0.000000
12/16/2010	9:23:55 PM	PHl3 MFC set to  0.000000
12/16/2010	9:23:55 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:23:55 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:23:55 PM	Tube furnace set to 0
12/16/2010	9:24:55 PM	H2 valve closed
12/16/2010	9:24:55 PM	BCl3 valve closed
12/16/2010	9:24:55 PM	PH3 valve closed
12/16/2010	9:24:55 PM	SiCl4 pre valve closed
12/16/2010	9:24:55 PM	SiCl4 post valve closed
12/16/2010	9:24:55 PM	Bubbler valve closed
12/16/2010	9:24:55 PM	Helium valve opened
12/16/2010	9:24:55 PM	Main Vac valve opened
12/16/2010	9:24:55 PM	Bypass valve opened
12/16/2010	9:24:55 PM	Helium MFC set to  100.000000
12/16/2010	9:24:55 PM	H2 MFC set to  0.000000
12/16/2010	9:24:55 PM	BCl3 MFC set to  0.000000
12/16/2010	9:24:55 PM	PHl3 MFC set to  0.000000
12/16/2010	9:24:55 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:24:55 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:24:55 PM	Tube furnace set to 0
12/16/2010	9:25:55 PM	Helium valve closed
12/16/2010	9:25:55 PM	H2 valve closed
12/16/2010	9:25:55 PM	BCl3 valve closed
12/16/2010	9:25:55 PM	PH3 valve closed
12/16/2010	9:25:55 PM	SiCl4 pre valve closed
12/16/2010	9:25:55 PM	SiCl4 post valve closed
12/16/2010	9:25:55 PM	Bubbler valve closed
12/16/2010	9:25:55 PM	Main Vac valve opened
12/16/2010	9:25:55 PM	Bypass valve opened
12/16/2010	9:25:56 PM	Helium MFC set to  0.000000
12/16/2010	9:25:56 PM	H2 MFC set to  0.000000
12/16/2010	9:25:56 PM	BCl3 MFC set to  0.000000
12/16/2010	9:25:56 PM	PHl3 MFC set to  0.000000
12/16/2010	9:25:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:25:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:25:56 PM	Tube furnace set to 0
12/16/2010	9:26:56 PM	H2 valve closed
12/16/2010	9:26:56 PM	BCl3 valve closed
12/16/2010	9:26:56 PM	PH3 valve closed
12/16/2010	9:26:56 PM	SiCl4 pre valve closed
12/16/2010	9:26:56 PM	SiCl4 post valve closed
12/16/2010	9:26:56 PM	Bubbler valve closed
12/16/2010	9:26:56 PM	Helium valve opened
12/16/2010	9:26:56 PM	Main Vac valve opened
12/16/2010	9:26:56 PM	Bypass valve opened
12/16/2010	9:26:56 PM	Helium MFC set to  100.000000
12/16/2010	9:26:56 PM	H2 MFC set to  0.000000
12/16/2010	9:26:56 PM	BCl3 MFC set to  0.000000
12/16/2010	9:26:56 PM	PHl3 MFC set to  0.000000
12/16/2010	9:26:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:26:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:26:56 PM	Tube furnace set to 0
12/16/2010	9:27:56 PM	Helium valve closed
12/16/2010	9:27:56 PM	H2 valve closed
12/16/2010	9:27:56 PM	BCl3 valve closed
12/16/2010	9:27:56 PM	PH3 valve closed
12/16/2010	9:27:56 PM	SiCl4 pre valve closed
12/16/2010	9:27:56 PM	SiCl4 post valve closed
12/16/2010	9:27:56 PM	Bubbler valve closed
12/16/2010	9:27:56 PM	Main Vac valve opened
12/16/2010	9:27:56 PM	Bypass valve opened
12/16/2010	9:27:56 PM	Helium MFC set to  0.000000
12/16/2010	9:27:56 PM	H2 MFC set to  0.000000
12/16/2010	9:27:56 PM	BCl3 MFC set to  0.000000
12/16/2010	9:27:56 PM	PHl3 MFC set to  0.000000
12/16/2010	9:27:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:27:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:27:56 PM	Tube furnace set to 0
12/16/2010	9:28:56 PM	H2 valve closed
12/16/2010	9:28:56 PM	BCl3 valve closed
12/16/2010	9:28:56 PM	PH3 valve closed
12/16/2010	9:28:56 PM	SiCl4 pre valve closed
12/16/2010	9:28:56 PM	SiCl4 post valve closed
12/16/2010	9:28:56 PM	Bubbler valve closed
12/16/2010	9:28:56 PM	Helium valve opened
12/16/2010	9:28:56 PM	Main Vac valve opened
12/16/2010	9:28:56 PM	Bypass valve opened
12/16/2010	9:28:56 PM	Helium MFC set to  100.000000
12/16/2010	9:28:56 PM	H2 MFC set to  0.000000
12/16/2010	9:28:56 PM	BCl3 MFC set to  0.000000
12/16/2010	9:28:56 PM	PHl3 MFC set to  0.000000
12/16/2010	9:28:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:28:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:28:56 PM	Tube furnace set to 0
12/16/2010	9:29:56 PM	Helium valve closed
12/16/2010	9:29:56 PM	H2 valve closed
12/16/2010	9:29:56 PM	BCl3 valve closed
12/16/2010	9:29:56 PM	PH3 valve closed
12/16/2010	9:29:56 PM	SiCl4 pre valve closed
12/16/2010	9:29:56 PM	SiCl4 post valve closed
12/16/2010	9:29:56 PM	Bubbler valve closed
12/16/2010	9:29:56 PM	Main Vac valve opened
12/16/2010	9:29:56 PM	Bypass valve opened
12/16/2010	9:29:56 PM	Helium MFC set to  0.000000
12/16/2010	9:29:56 PM	H2 MFC set to  0.000000
12/16/2010	9:29:56 PM	BCl3 MFC set to  0.000000
12/16/2010	9:29:56 PM	PHl3 MFC set to  0.000000
12/16/2010	9:29:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:29:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:29:56 PM	Tube furnace set to 0
12/16/2010	9:30:56 PM	H2 valve closed
12/16/2010	9:30:56 PM	BCl3 valve closed
12/16/2010	9:30:56 PM	PH3 valve closed
12/16/2010	9:30:56 PM	SiCl4 pre valve closed
12/16/2010	9:30:56 PM	SiCl4 post valve closed
12/16/2010	9:30:56 PM	Bubbler valve closed
12/16/2010	9:30:56 PM	Helium valve opened
12/16/2010	9:30:56 PM	Main Vac valve opened
12/16/2010	9:30:56 PM	Bypass valve opened
12/16/2010	9:30:56 PM	Helium MFC set to  100.000000
12/16/2010	9:30:56 PM	H2 MFC set to  0.000000
12/16/2010	9:30:56 PM	BCl3 MFC set to  0.000000
12/16/2010	9:30:56 PM	PHl3 MFC set to  0.000000
12/16/2010	9:30:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:30:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:30:57 PM	Tube furnace set to 0
12/16/2010	9:31:57 PM	Helium valve closed
12/16/2010	9:31:57 PM	H2 valve closed
12/16/2010	9:31:57 PM	BCl3 valve closed
12/16/2010	9:31:57 PM	PH3 valve closed
12/16/2010	9:31:57 PM	SiCl4 pre valve closed
12/16/2010	9:31:57 PM	SiCl4 post valve closed
12/16/2010	9:31:57 PM	Bubbler valve closed
12/16/2010	9:31:57 PM	Main Vac valve opened
12/16/2010	9:31:57 PM	Bypass valve opened
12/16/2010	9:31:57 PM	Helium MFC set to  0.000000
12/16/2010	9:31:57 PM	H2 MFC set to  0.000000
12/16/2010	9:31:57 PM	BCl3 MFC set to  0.000000
12/16/2010	9:31:57 PM	PHl3 MFC set to  0.000000
12/16/2010	9:31:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:31:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:31:57 PM	Tube furnace set to 0
12/16/2010	9:32:57 PM	H2 valve closed
12/16/2010	9:32:57 PM	BCl3 valve closed
12/16/2010	9:32:57 PM	PH3 valve closed
12/16/2010	9:32:57 PM	SiCl4 pre valve closed
12/16/2010	9:32:57 PM	SiCl4 post valve closed
12/16/2010	9:32:57 PM	Bubbler valve closed
12/16/2010	9:32:57 PM	Helium valve opened
12/16/2010	9:32:57 PM	Main Vac valve opened
12/16/2010	9:32:57 PM	Bypass valve opened
12/16/2010	9:32:57 PM	Helium MFC set to  100.000000
12/16/2010	9:32:57 PM	H2 MFC set to  0.000000
12/16/2010	9:32:57 PM	BCl3 MFC set to  0.000000
12/16/2010	9:32:57 PM	PHl3 MFC set to  0.000000
12/16/2010	9:32:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:32:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:32:57 PM	Tube furnace set to 0
12/16/2010	9:33:57 PM	Helium valve closed
12/16/2010	9:33:57 PM	H2 valve closed
12/16/2010	9:33:57 PM	BCl3 valve closed
12/16/2010	9:33:57 PM	PH3 valve closed
12/16/2010	9:33:57 PM	SiCl4 pre valve closed
12/16/2010	9:33:57 PM	SiCl4 post valve closed
12/16/2010	9:33:57 PM	Bubbler valve closed
12/16/2010	9:33:57 PM	Main Vac valve opened
12/16/2010	9:33:57 PM	Bypass valve opened
12/16/2010	9:33:57 PM	Helium MFC set to  0.000000
12/16/2010	9:33:57 PM	H2 MFC set to  0.000000
12/16/2010	9:33:57 PM	BCl3 MFC set to  0.000000
12/16/2010	9:33:57 PM	PHl3 MFC set to  0.000000
12/16/2010	9:33:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:33:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:33:57 PM	Tube furnace set to 0
12/16/2010	9:34:57 PM	H2 valve closed
12/16/2010	9:34:57 PM	BCl3 valve closed
12/16/2010	9:34:57 PM	PH3 valve closed
12/16/2010	9:34:57 PM	SiCl4 pre valve closed
12/16/2010	9:34:57 PM	SiCl4 post valve closed
12/16/2010	9:34:57 PM	Bubbler valve closed
12/16/2010	9:34:57 PM	Helium valve opened
12/16/2010	9:34:57 PM	Main Vac valve opened
12/16/2010	9:34:57 PM	Bypass valve opened
12/16/2010	9:34:57 PM	Helium MFC set to  100.000000
12/16/2010	9:34:57 PM	H2 MFC set to  0.000000
12/16/2010	9:34:57 PM	BCl3 MFC set to  0.000000
12/16/2010	9:34:57 PM	PHl3 MFC set to  0.000000
12/16/2010	9:34:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:34:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:34:57 PM	Tube furnace set to 0
12/16/2010	9:35:57 PM	Helium valve closed
12/16/2010	9:35:57 PM	H2 valve closed
12/16/2010	9:35:57 PM	BCl3 valve closed
12/16/2010	9:35:57 PM	PH3 valve closed
12/16/2010	9:35:57 PM	SiCl4 pre valve closed
12/16/2010	9:35:57 PM	SiCl4 post valve closed
12/16/2010	9:35:57 PM	Bubbler valve closed
12/16/2010	9:35:57 PM	Main Vac valve opened
12/16/2010	9:35:57 PM	Bypass valve opened
12/16/2010	9:35:57 PM	Helium MFC set to  0.000000
12/16/2010	9:35:57 PM	H2 MFC set to  0.000000
12/16/2010	9:35:57 PM	BCl3 MFC set to  0.000000
12/16/2010	9:35:57 PM	PHl3 MFC set to  0.000000
12/16/2010	9:35:57 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:35:57 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:35:58 PM	Tube furnace set to 0
12/16/2010	9:36:58 PM	H2 valve closed
12/16/2010	9:36:58 PM	BCl3 valve closed
12/16/2010	9:36:58 PM	PH3 valve closed
12/16/2010	9:36:58 PM	SiCl4 pre valve closed
12/16/2010	9:36:58 PM	SiCl4 post valve closed
12/16/2010	9:36:58 PM	Bubbler valve closed
12/16/2010	9:36:58 PM	Helium valve opened
12/16/2010	9:36:58 PM	Main Vac valve opened
12/16/2010	9:36:58 PM	Bypass valve opened
12/16/2010	9:36:58 PM	Helium MFC set to  100.000000
12/16/2010	9:36:58 PM	H2 MFC set to  0.000000
12/16/2010	9:36:58 PM	BCl3 MFC set to  0.000000
12/16/2010	9:36:58 PM	PHl3 MFC set to  0.000000
12/16/2010	9:36:58 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:36:58 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:36:58 PM	Tube furnace set to 0
12/16/2010	9:37:58 PM	Helium valve closed
12/16/2010	9:37:58 PM	H2 valve closed
12/16/2010	9:37:58 PM	BCl3 valve closed
12/16/2010	9:37:58 PM	PH3 valve closed
12/16/2010	9:37:58 PM	SiCl4 pre valve closed
12/16/2010	9:37:58 PM	SiCl4 post valve closed
12/16/2010	9:37:58 PM	Bubbler valve closed
12/16/2010	9:37:58 PM	Main Vac valve opened
12/16/2010	9:37:58 PM	Bypass valve opened
12/16/2010	9:37:58 PM	Helium MFC set to  0.000000
12/16/2010	9:37:58 PM	H2 MFC set to  0.000000
12/16/2010	9:37:58 PM	BCl3 MFC set to  0.000000
12/16/2010	9:37:58 PM	PHl3 MFC set to  0.000000
12/16/2010	9:37:58 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:37:58 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:37:58 PM	Tube furnace set to 0
12/16/2010	9:38:58 PM	H2 valve closed
12/16/2010	9:38:58 PM	BCl3 valve closed
12/16/2010	9:38:58 PM	PH3 valve closed
12/16/2010	9:38:58 PM	SiCl4 pre valve closed
12/16/2010	9:38:58 PM	SiCl4 post valve closed
12/16/2010	9:38:58 PM	Bubbler valve closed
12/16/2010	9:38:58 PM	Helium valve opened
12/16/2010	9:38:58 PM	Main Vac valve opened
12/16/2010	9:38:58 PM	Bypass valve opened
12/16/2010	9:38:58 PM	Helium MFC set to  100.000000
12/16/2010	9:38:58 PM	H2 MFC set to  0.000000
12/16/2010	9:38:58 PM	BCl3 MFC set to  0.000000
12/16/2010	9:38:58 PM	PHl3 MFC set to  0.000000
12/16/2010	9:38:58 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:38:58 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:38:58 PM	Tube furnace set to 0
12/16/2010	9:39:58 PM	Helium valve closed
12/16/2010	9:39:58 PM	H2 valve closed
12/16/2010	9:39:58 PM	BCl3 valve closed
12/16/2010	9:39:58 PM	PH3 valve closed
12/16/2010	9:39:58 PM	SiCl4 pre valve closed
12/16/2010	9:39:58 PM	SiCl4 post valve closed
12/16/2010	9:39:58 PM	Bubbler valve closed
12/16/2010	9:39:58 PM	Main Vac valve opened
12/16/2010	9:39:58 PM	Bypass valve opened
12/16/2010	9:39:58 PM	Helium MFC set to  0.000000
12/16/2010	9:39:58 PM	H2 MFC set to  0.000000
12/16/2010	9:39:58 PM	BCl3 MFC set to  0.000000
12/16/2010	9:39:58 PM	PHl3 MFC set to  0.000000
12/16/2010	9:39:58 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:39:58 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:39:58 PM	Tube furnace set to 0
12/16/2010	9:40:58 PM	H2 valve closed
12/16/2010	9:40:58 PM	BCl3 valve closed
12/16/2010	9:40:58 PM	PH3 valve closed
12/16/2010	9:40:58 PM	SiCl4 pre valve closed
12/16/2010	9:40:58 PM	SiCl4 post valve closed
12/16/2010	9:40:58 PM	Bubbler valve closed
12/16/2010	9:40:58 PM	Helium valve opened
12/16/2010	9:40:58 PM	Main Vac valve opened
12/16/2010	9:40:58 PM	Bypass valve opened
12/16/2010	9:40:58 PM	Helium MFC set to  100.000000
12/16/2010	9:40:58 PM	H2 MFC set to  0.000000
12/16/2010	9:40:58 PM	BCl3 MFC set to  0.000000
12/16/2010	9:40:58 PM	PHl3 MFC set to  0.000000
12/16/2010	9:40:58 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:40:58 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:40:59 PM	Tube furnace set to 0
12/16/2010	9:41:59 PM	Helium valve closed
12/16/2010	9:41:59 PM	H2 valve closed
12/16/2010	9:41:59 PM	BCl3 valve closed
12/16/2010	9:41:59 PM	PH3 valve closed
12/16/2010	9:41:59 PM	SiCl4 pre valve closed
12/16/2010	9:41:59 PM	SiCl4 post valve closed
12/16/2010	9:41:59 PM	Bubbler valve closed
12/16/2010	9:41:59 PM	Main Vac valve opened
12/16/2010	9:41:59 PM	Bypass valve opened
12/16/2010	9:41:59 PM	Helium MFC set to  0.000000
12/16/2010	9:41:59 PM	H2 MFC set to  0.000000
12/16/2010	9:41:59 PM	BCl3 MFC set to  0.000000
12/16/2010	9:41:59 PM	PHl3 MFC set to  0.000000
12/16/2010	9:41:59 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:41:59 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:41:59 PM	Tube furnace set to 0
12/16/2010	9:42:00 PM	Run finished at 9:42 PM
12/16/2010	9:42:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	9:43:15 PM	Recipe started at 9:43 PM
12/16/2010	9:43:15 PM	Helium valve closed
12/16/2010	9:43:15 PM	BCl3 valve closed
12/16/2010	9:43:15 PM	PH3 valve closed
12/16/2010	9:43:15 PM	SiCl4 pre valve closed
12/16/2010	9:43:16 PM	SiCl4 post valve closed
12/16/2010	9:43:16 PM	Main Vac valve closed
12/16/2010	9:43:16 PM	Bypass valve closed
12/16/2010	9:43:16 PM	Bubbler valve closed
12/16/2010	9:43:16 PM	H2 valve opened
12/16/2010	9:43:16 PM	Helium MFC set to  0.000000
12/16/2010	9:43:16 PM	H2 MFC set to  500.000000
12/16/2010	9:43:16 PM	BCl3 MFC set to  0.000000
12/16/2010	9:43:16 PM	PHl3 MFC set to  0.000000
12/16/2010	9:43:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:43:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:43:16 PM	Tube furnace set to 0
12/16/2010	9:44:36 PM	Helium valve closed
12/16/2010	9:44:36 PM	BCl3 valve closed
12/16/2010	9:44:36 PM	PH3 valve closed
12/16/2010	9:44:36 PM	SiCl4 pre valve closed
12/16/2010	9:44:36 PM	SiCl4 post valve closed
12/16/2010	9:44:36 PM	Main Vac valve closed
12/16/2010	9:44:36 PM	Bypass valve closed
12/16/2010	9:44:36 PM	H2 valve opened
12/16/2010	9:44:36 PM	Bubbler valve opened
12/16/2010	9:44:36 PM	Helium MFC set to  0.000000
12/16/2010	9:44:36 PM	H2 MFC set to  500.000000
12/16/2010	9:44:36 PM	BCl3 MFC set to  0.000000
12/16/2010	9:44:36 PM	PHl3 MFC set to  0.000000
12/16/2010	9:44:36 PM	SiCl4 MFC set to  0.000000
12/16/2010	9:44:36 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	9:44:36 PM	Tube furnace set to 1000
12/16/2010	10:04:36 PM	Helium valve closed
12/16/2010	10:04:36 PM	PH3 valve closed
12/16/2010	10:04:36 PM	Main Vac valve closed
12/16/2010	10:04:36 PM	Bypass valve closed
12/16/2010	10:04:36 PM	H2 valve opened
12/16/2010	10:04:36 PM	BCl3 valve opened
12/16/2010	10:04:36 PM	SiCl4 pre valve opened
12/16/2010	10:04:36 PM	SiCl4 post valve opened
12/16/2010	10:04:36 PM	Bubbler valve opened
12/16/2010	10:04:36 PM	Helium MFC set to  0.000000
12/16/2010	10:04:36 PM	H2 MFC set to  500.000000
12/16/2010	10:04:36 PM	BCl3 MFC set to  12.000000
12/16/2010	10:04:36 PM	PHl3 MFC set to  0.000000
12/16/2010	10:04:36 PM	SiCl4 MFC set to  50.000000
12/16/2010	10:04:36 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:04:37 PM	Tube furnace set to 1000
12/16/2010	10:24:36 PM	H2 valve closed
12/16/2010	10:24:36 PM	BCl3 valve closed
12/16/2010	10:24:36 PM	PH3 valve closed
12/16/2010	10:24:36 PM	SiCl4 pre valve closed
12/16/2010	10:24:36 PM	SiCl4 post valve closed
12/16/2010	10:24:36 PM	Main Vac valve closed
12/16/2010	10:24:36 PM	Bypass valve closed
12/16/2010	10:24:37 PM	Helium valve opened
12/16/2010	10:24:37 PM	Bubbler valve opened
12/16/2010	10:24:37 PM	Helium MFC set to  500.000000
12/16/2010	10:24:37 PM	H2 MFC set to  0.000000
12/16/2010	10:24:37 PM	BCl3 MFC set to  0.000000
12/16/2010	10:24:37 PM	PHl3 MFC set to  0.000000
12/16/2010	10:24:37 PM	SiCl4 MFC set to  0.000000
12/16/2010	10:24:37 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:24:37 PM	Tube furnace set to 0
12/16/2010	10:44:37 PM	Helium valve closed
12/16/2010	10:44:37 PM	H2 valve closed
12/16/2010	10:44:37 PM	BCl3 valve closed
12/16/2010	10:44:37 PM	PH3 valve closed
12/16/2010	10:44:37 PM	SiCl4 pre valve closed
12/16/2010	10:44:37 PM	SiCl4 post valve closed
12/16/2010	10:44:37 PM	Main Vac valve closed
12/16/2010	10:44:37 PM	Bypass valve closed
12/16/2010	10:44:37 PM	Bubbler valve closed
12/16/2010	10:44:37 PM	Helium MFC set to  0.000000
12/16/2010	10:44:37 PM	H2 MFC set to  0.000000
12/16/2010	10:44:37 PM	BCl3 MFC set to  0.000000
12/16/2010	10:44:37 PM	PHl3 MFC set to  0.000000
12/16/2010	10:44:37 PM	SiCl4 MFC set to  0.000000
12/16/2010	10:44:37 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	10:44:37 PM	Tube furnace set to 0
12/16/2010	10:44:37 PM	Run finished at 10:44 PM
12/16/2010	11:00:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	11:00:12 PM	Recipe started at 11:00 PM
12/16/2010	11:00:12 PM	Helium valve closed
12/16/2010	11:00:12 PM	H2 valve closed
12/16/2010	11:00:12 PM	BCl3 valve closed
12/16/2010	11:00:12 PM	PH3 valve closed
12/16/2010	11:00:12 PM	SiCl4 pre valve closed
12/16/2010	11:00:12 PM	SiCl4 post valve closed
12/16/2010	11:00:12 PM	Main Vac valve closed
12/16/2010	11:00:12 PM	Bubbler valve closed
12/16/2010	11:00:12 PM	Bypass valve opened
12/16/2010	11:00:12 PM	Helium MFC set to  0.000000
12/16/2010	11:00:12 PM	H2 MFC set to  0.000000
12/16/2010	11:00:12 PM	BCl3 MFC set to  0.000000
12/16/2010	11:00:12 PM	PHl3 MFC set to  0.000000
12/16/2010	11:00:12 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:00:12 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:00:12 PM	Tube furnace set to 0
12/16/2010	11:01:10 PM	Helium valve closed
12/16/2010	11:01:10 PM	H2 valve closed
12/16/2010	11:01:10 PM	BCl3 valve closed
12/16/2010	11:01:10 PM	PH3 valve closed
12/16/2010	11:01:10 PM	SiCl4 pre valve closed
12/16/2010	11:01:10 PM	SiCl4 post valve closed
12/16/2010	11:01:10 PM	Bubbler valve closed
12/16/2010	11:01:10 PM	Main Vac valve opened
12/16/2010	11:01:10 PM	Bypass valve opened
12/16/2010	11:01:10 PM	Helium MFC set to  0.000000
12/16/2010	11:01:10 PM	H2 MFC set to  0.000000
12/16/2010	11:01:10 PM	BCl3 MFC set to  0.000000
12/16/2010	11:01:10 PM	PHl3 MFC set to  0.000000
12/16/2010	11:01:10 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:01:10 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:01:10 PM	Tube furnace set to 0
12/16/2010	11:01:10 PM	Run finished at 11:01 PM
12/16/2010	11:01:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/16/2010	11:01:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	11:01:29 PM	Recipe started at 11:01 PM
12/16/2010	11:01:29 PM	Helium valve closed
12/16/2010	11:01:29 PM	H2 valve closed
12/16/2010	11:01:29 PM	BCl3 valve closed
12/16/2010	11:01:29 PM	PH3 valve closed
12/16/2010	11:01:29 PM	SiCl4 pre valve closed
12/16/2010	11:01:29 PM	SiCl4 post valve closed
12/16/2010	11:01:29 PM	Main Vac valve closed
12/16/2010	11:01:29 PM	Bubbler valve closed
12/16/2010	11:01:29 PM	Bypass valve opened
12/16/2010	11:01:29 PM	Helium MFC set to  0.000000
12/16/2010	11:01:29 PM	H2 MFC set to  0.000000
12/16/2010	11:01:29 PM	BCl3 MFC set to  0.000000
12/16/2010	11:01:29 PM	PHl3 MFC set to  0.000000
12/16/2010	11:01:29 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:01:29 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:01:29 PM	Tube furnace set to 0
12/16/2010	11:01:30 PM	Helium valve closed
12/16/2010	11:01:30 PM	H2 valve closed
12/16/2010	11:01:30 PM	BCl3 valve closed
12/16/2010	11:01:30 PM	PH3 valve closed
12/16/2010	11:01:30 PM	SiCl4 pre valve closed
12/16/2010	11:01:30 PM	SiCl4 post valve closed
12/16/2010	11:01:30 PM	Bubbler valve closed
12/16/2010	11:01:30 PM	Main Vac valve opened
12/16/2010	11:01:30 PM	Bypass valve opened
12/16/2010	11:01:30 PM	Helium MFC set to  0.000000
12/16/2010	11:01:30 PM	H2 MFC set to  0.000000
12/16/2010	11:01:30 PM	BCl3 MFC set to  0.000000
12/16/2010	11:01:30 PM	PHl3 MFC set to  0.000000
12/16/2010	11:01:30 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:01:30 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:01:30 PM	Tube furnace set to 0
12/16/2010	11:02:30 PM	H2 valve closed
12/16/2010	11:02:30 PM	BCl3 valve closed
12/16/2010	11:02:30 PM	PH3 valve closed
12/16/2010	11:02:30 PM	SiCl4 pre valve closed
12/16/2010	11:02:30 PM	SiCl4 post valve closed
12/16/2010	11:02:30 PM	Bubbler valve closed
12/16/2010	11:02:30 PM	Helium valve opened
12/16/2010	11:02:30 PM	Main Vac valve opened
12/16/2010	11:02:30 PM	Bypass valve opened
12/16/2010	11:02:30 PM	Helium MFC set to  100.000000
12/16/2010	11:02:30 PM	H2 MFC set to  0.000000
12/16/2010	11:02:30 PM	BCl3 MFC set to  0.000000
12/16/2010	11:02:30 PM	PHl3 MFC set to  0.000000
12/16/2010	11:02:30 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:02:30 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:02:30 PM	Tube furnace set to 0
12/16/2010	11:03:30 PM	Helium valve closed
12/16/2010	11:03:30 PM	H2 valve closed
12/16/2010	11:03:30 PM	BCl3 valve closed
12/16/2010	11:03:30 PM	PH3 valve closed
12/16/2010	11:03:30 PM	SiCl4 pre valve closed
12/16/2010	11:03:30 PM	SiCl4 post valve closed
12/16/2010	11:03:30 PM	Bubbler valve closed
12/16/2010	11:03:30 PM	Main Vac valve opened
12/16/2010	11:03:30 PM	Bypass valve opened
12/16/2010	11:03:30 PM	Helium MFC set to  0.000000
12/16/2010	11:03:30 PM	H2 MFC set to  0.000000
12/16/2010	11:03:30 PM	BCl3 MFC set to  0.000000
12/16/2010	11:03:30 PM	PHl3 MFC set to  0.000000
12/16/2010	11:03:30 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:03:30 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:03:30 PM	Tube furnace set to 0
12/16/2010	11:04:30 PM	H2 valve closed
12/16/2010	11:04:30 PM	BCl3 valve closed
12/16/2010	11:04:30 PM	PH3 valve closed
12/16/2010	11:04:30 PM	SiCl4 pre valve closed
12/16/2010	11:04:30 PM	SiCl4 post valve closed
12/16/2010	11:04:30 PM	Bubbler valve closed
12/16/2010	11:04:30 PM	Helium valve opened
12/16/2010	11:04:30 PM	Main Vac valve opened
12/16/2010	11:04:30 PM	Bypass valve opened
12/16/2010	11:04:30 PM	Helium MFC set to  100.000000
12/16/2010	11:04:30 PM	H2 MFC set to  0.000000
12/16/2010	11:04:30 PM	BCl3 MFC set to  0.000000
12/16/2010	11:04:30 PM	PHl3 MFC set to  0.000000
12/16/2010	11:04:30 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:04:30 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:04:30 PM	Tube furnace set to 0
12/16/2010	11:05:30 PM	Helium valve closed
12/16/2010	11:05:30 PM	H2 valve closed
12/16/2010	11:05:30 PM	BCl3 valve closed
12/16/2010	11:05:30 PM	PH3 valve closed
12/16/2010	11:05:30 PM	SiCl4 pre valve closed
12/16/2010	11:05:30 PM	SiCl4 post valve closed
12/16/2010	11:05:30 PM	Bubbler valve closed
12/16/2010	11:05:30 PM	Main Vac valve opened
12/16/2010	11:05:30 PM	Bypass valve opened
12/16/2010	11:05:30 PM	Helium MFC set to  0.000000
12/16/2010	11:05:30 PM	H2 MFC set to  0.000000
12/16/2010	11:05:30 PM	BCl3 MFC set to  0.000000
12/16/2010	11:05:30 PM	PHl3 MFC set to  0.000000
12/16/2010	11:05:30 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:05:30 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:05:31 PM	Tube furnace set to 0
12/16/2010	11:06:31 PM	H2 valve closed
12/16/2010	11:06:31 PM	BCl3 valve closed
12/16/2010	11:06:31 PM	PH3 valve closed
12/16/2010	11:06:31 PM	SiCl4 pre valve closed
12/16/2010	11:06:31 PM	SiCl4 post valve closed
12/16/2010	11:06:31 PM	Bubbler valve closed
12/16/2010	11:06:31 PM	Helium valve opened
12/16/2010	11:06:31 PM	Main Vac valve opened
12/16/2010	11:06:31 PM	Bypass valve opened
12/16/2010	11:06:31 PM	Helium MFC set to  100.000000
12/16/2010	11:06:31 PM	H2 MFC set to  0.000000
12/16/2010	11:06:31 PM	BCl3 MFC set to  0.000000
12/16/2010	11:06:31 PM	PHl3 MFC set to  0.000000
12/16/2010	11:06:31 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:06:31 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:06:31 PM	Tube furnace set to 0
12/16/2010	11:07:31 PM	Helium valve closed
12/16/2010	11:07:31 PM	H2 valve closed
12/16/2010	11:07:31 PM	BCl3 valve closed
12/16/2010	11:07:31 PM	PH3 valve closed
12/16/2010	11:07:31 PM	SiCl4 pre valve closed
12/16/2010	11:07:31 PM	SiCl4 post valve closed
12/16/2010	11:07:31 PM	Bubbler valve closed
12/16/2010	11:07:31 PM	Main Vac valve opened
12/16/2010	11:07:31 PM	Bypass valve opened
12/16/2010	11:07:31 PM	Helium MFC set to  0.000000
12/16/2010	11:07:31 PM	H2 MFC set to  0.000000
12/16/2010	11:07:31 PM	BCl3 MFC set to  0.000000
12/16/2010	11:07:31 PM	PHl3 MFC set to  0.000000
12/16/2010	11:07:31 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:07:31 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:07:31 PM	Tube furnace set to 0
12/16/2010	11:08:31 PM	H2 valve closed
12/16/2010	11:08:31 PM	BCl3 valve closed
12/16/2010	11:08:31 PM	PH3 valve closed
12/16/2010	11:08:31 PM	SiCl4 pre valve closed
12/16/2010	11:08:31 PM	SiCl4 post valve closed
12/16/2010	11:08:31 PM	Bubbler valve closed
12/16/2010	11:08:31 PM	Helium valve opened
12/16/2010	11:08:31 PM	Main Vac valve opened
12/16/2010	11:08:31 PM	Bypass valve opened
12/16/2010	11:08:31 PM	Helium MFC set to  100.000000
12/16/2010	11:08:31 PM	H2 MFC set to  0.000000
12/16/2010	11:08:31 PM	BCl3 MFC set to  0.000000
12/16/2010	11:08:31 PM	PHl3 MFC set to  0.000000
12/16/2010	11:08:31 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:08:31 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:08:31 PM	Tube furnace set to 0
12/16/2010	11:09:31 PM	Helium valve closed
12/16/2010	11:09:31 PM	H2 valve closed
12/16/2010	11:09:31 PM	BCl3 valve closed
12/16/2010	11:09:31 PM	PH3 valve closed
12/16/2010	11:09:31 PM	SiCl4 pre valve closed
12/16/2010	11:09:31 PM	SiCl4 post valve closed
12/16/2010	11:09:31 PM	Bubbler valve closed
12/16/2010	11:09:31 PM	Main Vac valve opened
12/16/2010	11:09:31 PM	Bypass valve opened
12/16/2010	11:09:31 PM	Helium MFC set to  0.000000
12/16/2010	11:09:31 PM	H2 MFC set to  0.000000
12/16/2010	11:09:31 PM	BCl3 MFC set to  0.000000
12/16/2010	11:09:31 PM	PHl3 MFC set to  0.000000
12/16/2010	11:09:31 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:09:31 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:09:31 PM	Tube furnace set to 0
12/16/2010	11:10:31 PM	H2 valve closed
12/16/2010	11:10:31 PM	BCl3 valve closed
12/16/2010	11:10:31 PM	PH3 valve closed
12/16/2010	11:10:31 PM	SiCl4 pre valve closed
12/16/2010	11:10:31 PM	SiCl4 post valve closed
12/16/2010	11:10:31 PM	Bubbler valve closed
12/16/2010	11:10:31 PM	Helium valve opened
12/16/2010	11:10:31 PM	Main Vac valve opened
12/16/2010	11:10:31 PM	Bypass valve opened
12/16/2010	11:10:31 PM	Helium MFC set to  100.000000
12/16/2010	11:10:31 PM	H2 MFC set to  0.000000
12/16/2010	11:10:31 PM	BCl3 MFC set to  0.000000
12/16/2010	11:10:31 PM	PHl3 MFC set to  0.000000
12/16/2010	11:10:31 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:10:31 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:10:32 PM	Tube furnace set to 0
12/16/2010	11:11:32 PM	Helium valve closed
12/16/2010	11:11:32 PM	H2 valve closed
12/16/2010	11:11:32 PM	BCl3 valve closed
12/16/2010	11:11:32 PM	PH3 valve closed
12/16/2010	11:11:32 PM	SiCl4 pre valve closed
12/16/2010	11:11:32 PM	SiCl4 post valve closed
12/16/2010	11:11:32 PM	Bubbler valve closed
12/16/2010	11:11:32 PM	Main Vac valve opened
12/16/2010	11:11:32 PM	Bypass valve opened
12/16/2010	11:11:32 PM	Helium MFC set to  0.000000
12/16/2010	11:11:32 PM	H2 MFC set to  0.000000
12/16/2010	11:11:32 PM	BCl3 MFC set to  0.000000
12/16/2010	11:11:32 PM	PHl3 MFC set to  0.000000
12/16/2010	11:11:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:11:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:11:32 PM	Tube furnace set to 0
12/16/2010	11:12:32 PM	H2 valve closed
12/16/2010	11:12:32 PM	BCl3 valve closed
12/16/2010	11:12:32 PM	PH3 valve closed
12/16/2010	11:12:32 PM	SiCl4 pre valve closed
12/16/2010	11:12:32 PM	SiCl4 post valve closed
12/16/2010	11:12:32 PM	Bubbler valve closed
12/16/2010	11:12:32 PM	Helium valve opened
12/16/2010	11:12:32 PM	Main Vac valve opened
12/16/2010	11:12:32 PM	Bypass valve opened
12/16/2010	11:12:32 PM	Helium MFC set to  100.000000
12/16/2010	11:12:32 PM	H2 MFC set to  0.000000
12/16/2010	11:12:32 PM	BCl3 MFC set to  0.000000
12/16/2010	11:12:32 PM	PHl3 MFC set to  0.000000
12/16/2010	11:12:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:12:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:12:32 PM	Tube furnace set to 0
12/16/2010	11:13:32 PM	Helium valve closed
12/16/2010	11:13:32 PM	H2 valve closed
12/16/2010	11:13:32 PM	BCl3 valve closed
12/16/2010	11:13:32 PM	PH3 valve closed
12/16/2010	11:13:32 PM	SiCl4 pre valve closed
12/16/2010	11:13:32 PM	SiCl4 post valve closed
12/16/2010	11:13:32 PM	Bubbler valve closed
12/16/2010	11:13:32 PM	Main Vac valve opened
12/16/2010	11:13:32 PM	Bypass valve opened
12/16/2010	11:13:32 PM	Helium MFC set to  0.000000
12/16/2010	11:13:32 PM	H2 MFC set to  0.000000
12/16/2010	11:13:32 PM	BCl3 MFC set to  0.000000
12/16/2010	11:13:32 PM	PHl3 MFC set to  0.000000
12/16/2010	11:13:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:13:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:13:32 PM	Tube furnace set to 0
12/16/2010	11:14:32 PM	H2 valve closed
12/16/2010	11:14:32 PM	BCl3 valve closed
12/16/2010	11:14:32 PM	PH3 valve closed
12/16/2010	11:14:32 PM	SiCl4 pre valve closed
12/16/2010	11:14:32 PM	SiCl4 post valve closed
12/16/2010	11:14:32 PM	Bubbler valve closed
12/16/2010	11:14:32 PM	Helium valve opened
12/16/2010	11:14:32 PM	Main Vac valve opened
12/16/2010	11:14:32 PM	Bypass valve opened
12/16/2010	11:14:32 PM	Helium MFC set to  100.000000
12/16/2010	11:14:32 PM	H2 MFC set to  0.000000
12/16/2010	11:14:32 PM	BCl3 MFC set to  0.000000
12/16/2010	11:14:32 PM	PHl3 MFC set to  0.000000
12/16/2010	11:14:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:14:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:14:32 PM	Tube furnace set to 0
12/16/2010	11:15:32 PM	Helium valve closed
12/16/2010	11:15:32 PM	H2 valve closed
12/16/2010	11:15:32 PM	BCl3 valve closed
12/16/2010	11:15:32 PM	PH3 valve closed
12/16/2010	11:15:32 PM	SiCl4 pre valve closed
12/16/2010	11:15:32 PM	SiCl4 post valve closed
12/16/2010	11:15:32 PM	Bubbler valve closed
12/16/2010	11:15:32 PM	Main Vac valve opened
12/16/2010	11:15:32 PM	Bypass valve opened
12/16/2010	11:15:32 PM	Helium MFC set to  0.000000
12/16/2010	11:15:32 PM	H2 MFC set to  0.000000
12/16/2010	11:15:32 PM	BCl3 MFC set to  0.000000
12/16/2010	11:15:32 PM	PHl3 MFC set to  0.000000
12/16/2010	11:15:32 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:15:32 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:15:33 PM	Tube furnace set to 0
12/16/2010	11:16:33 PM	H2 valve closed
12/16/2010	11:16:33 PM	BCl3 valve closed
12/16/2010	11:16:33 PM	PH3 valve closed
12/16/2010	11:16:33 PM	SiCl4 pre valve closed
12/16/2010	11:16:33 PM	SiCl4 post valve closed
12/16/2010	11:16:33 PM	Bubbler valve closed
12/16/2010	11:16:33 PM	Helium valve opened
12/16/2010	11:16:33 PM	Main Vac valve opened
12/16/2010	11:16:33 PM	Bypass valve opened
12/16/2010	11:16:33 PM	Helium MFC set to  100.000000
12/16/2010	11:16:33 PM	H2 MFC set to  0.000000
12/16/2010	11:16:33 PM	BCl3 MFC set to  0.000000
12/16/2010	11:16:33 PM	PHl3 MFC set to  0.000000
12/16/2010	11:16:33 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:16:33 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:16:33 PM	Tube furnace set to 0
12/16/2010	11:17:33 PM	Helium valve closed
12/16/2010	11:17:33 PM	H2 valve closed
12/16/2010	11:17:33 PM	BCl3 valve closed
12/16/2010	11:17:33 PM	PH3 valve closed
12/16/2010	11:17:33 PM	SiCl4 pre valve closed
12/16/2010	11:17:33 PM	SiCl4 post valve closed
12/16/2010	11:17:33 PM	Bubbler valve closed
12/16/2010	11:17:33 PM	Main Vac valve opened
12/16/2010	11:17:33 PM	Bypass valve opened
12/16/2010	11:17:33 PM	Helium MFC set to  0.000000
12/16/2010	11:17:33 PM	H2 MFC set to  0.000000
12/16/2010	11:17:33 PM	BCl3 MFC set to  0.000000
12/16/2010	11:17:33 PM	PHl3 MFC set to  0.000000
12/16/2010	11:17:33 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:17:33 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:17:33 PM	Tube furnace set to 0
12/16/2010	11:18:33 PM	H2 valve closed
12/16/2010	11:18:33 PM	BCl3 valve closed
12/16/2010	11:18:33 PM	PH3 valve closed
12/16/2010	11:18:33 PM	SiCl4 pre valve closed
12/16/2010	11:18:33 PM	SiCl4 post valve closed
12/16/2010	11:18:33 PM	Bubbler valve closed
12/16/2010	11:18:33 PM	Helium valve opened
12/16/2010	11:18:33 PM	Main Vac valve opened
12/16/2010	11:18:33 PM	Bypass valve opened
12/16/2010	11:18:33 PM	Helium MFC set to  100.000000
12/16/2010	11:18:33 PM	H2 MFC set to  0.000000
12/16/2010	11:18:33 PM	BCl3 MFC set to  0.000000
12/16/2010	11:18:33 PM	PHl3 MFC set to  0.000000
12/16/2010	11:18:33 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:18:33 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:18:33 PM	Tube furnace set to 0
12/16/2010	11:19:33 PM	Helium valve closed
12/16/2010	11:19:33 PM	H2 valve closed
12/16/2010	11:19:33 PM	BCl3 valve closed
12/16/2010	11:19:33 PM	PH3 valve closed
12/16/2010	11:19:33 PM	SiCl4 pre valve closed
12/16/2010	11:19:33 PM	SiCl4 post valve closed
12/16/2010	11:19:33 PM	Bubbler valve closed
12/16/2010	11:19:33 PM	Main Vac valve opened
12/16/2010	11:19:33 PM	Bypass valve opened
12/16/2010	11:19:33 PM	Helium MFC set to  0.000000
12/16/2010	11:19:33 PM	H2 MFC set to  0.000000
12/16/2010	11:19:33 PM	BCl3 MFC set to  0.000000
12/16/2010	11:19:33 PM	PHl3 MFC set to  0.000000
12/16/2010	11:19:33 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:19:33 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:19:33 PM	Tube furnace set to 0
12/16/2010	11:20:33 PM	H2 valve closed
12/16/2010	11:20:33 PM	BCl3 valve closed
12/16/2010	11:20:33 PM	PH3 valve closed
12/16/2010	11:20:33 PM	SiCl4 pre valve closed
12/16/2010	11:20:33 PM	SiCl4 post valve closed
12/16/2010	11:20:33 PM	Bubbler valve closed
12/16/2010	11:20:33 PM	Helium valve opened
12/16/2010	11:20:33 PM	Main Vac valve opened
12/16/2010	11:20:33 PM	Bypass valve opened
12/16/2010	11:20:33 PM	Helium MFC set to  100.000000
12/16/2010	11:20:33 PM	H2 MFC set to  0.000000
12/16/2010	11:20:33 PM	BCl3 MFC set to  0.000000
12/16/2010	11:20:33 PM	PHl3 MFC set to  0.000000
12/16/2010	11:20:33 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:20:33 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:20:34 PM	Tube furnace set to 0
12/16/2010	11:21:34 PM	Helium valve closed
12/16/2010	11:21:34 PM	H2 valve closed
12/16/2010	11:21:34 PM	BCl3 valve closed
12/16/2010	11:21:34 PM	PH3 valve closed
12/16/2010	11:21:34 PM	SiCl4 pre valve closed
12/16/2010	11:21:34 PM	SiCl4 post valve closed
12/16/2010	11:21:34 PM	Bubbler valve closed
12/16/2010	11:21:34 PM	Main Vac valve opened
12/16/2010	11:21:34 PM	Bypass valve opened
12/16/2010	11:21:34 PM	Helium MFC set to  0.000000
12/16/2010	11:21:34 PM	H2 MFC set to  0.000000
12/16/2010	11:21:34 PM	BCl3 MFC set to  0.000000
12/16/2010	11:21:34 PM	PHl3 MFC set to  0.000000
12/16/2010	11:21:34 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:21:34 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:21:34 PM	Tube furnace set to 0
12/16/2010	11:21:35 PM	Run finished at 11:21 PM
12/16/2010	11:21:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	11:22:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	11:22:14 PM	Recipe started at 11:22 PM
12/16/2010	11:22:14 PM	Helium valve closed
12/16/2010	11:22:14 PM	H2 valve closed
12/16/2010	11:22:14 PM	BCl3 valve closed
12/16/2010	11:22:14 PM	PH3 valve closed
12/16/2010	11:22:14 PM	SiCl4 pre valve closed
12/16/2010	11:22:14 PM	SiCl4 post valve closed
12/16/2010	11:22:14 PM	Main Vac valve closed
12/16/2010	11:22:14 PM	Bubbler valve closed
12/16/2010	11:22:14 PM	Bypass valve opened
12/16/2010	11:22:14 PM	Helium MFC set to  0.000000
12/16/2010	11:22:14 PM	H2 MFC set to  0.000000
12/16/2010	11:22:14 PM	BCl3 MFC set to  0.000000
12/16/2010	11:22:14 PM	PHl3 MFC set to  0.000000
12/16/2010	11:22:14 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:22:14 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:22:15 PM	Tube furnace set to 0
12/16/2010	11:22:15 PM	Helium valve closed
12/16/2010	11:22:15 PM	H2 valve closed
12/16/2010	11:22:15 PM	BCl3 valve closed
12/16/2010	11:22:15 PM	PH3 valve closed
12/16/2010	11:22:15 PM	SiCl4 pre valve closed
12/16/2010	11:22:15 PM	SiCl4 post valve closed
12/16/2010	11:22:15 PM	Bubbler valve closed
12/16/2010	11:22:15 PM	Main Vac valve opened
12/16/2010	11:22:15 PM	Bypass valve opened
12/16/2010	11:22:15 PM	Helium MFC set to  0.000000
12/16/2010	11:22:15 PM	H2 MFC set to  0.000000
12/16/2010	11:22:15 PM	BCl3 MFC set to  0.000000
12/16/2010	11:22:15 PM	PHl3 MFC set to  0.000000
12/16/2010	11:22:15 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:22:15 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:22:15 PM	Tube furnace set to 0
12/16/2010	11:23:15 PM	H2 valve closed
12/16/2010	11:23:15 PM	BCl3 valve closed
12/16/2010	11:23:15 PM	PH3 valve closed
12/16/2010	11:23:15 PM	SiCl4 pre valve closed
12/16/2010	11:23:15 PM	SiCl4 post valve closed
12/16/2010	11:23:15 PM	Bubbler valve closed
12/16/2010	11:23:15 PM	Helium valve opened
12/16/2010	11:23:15 PM	Main Vac valve opened
12/16/2010	11:23:15 PM	Bypass valve opened
12/16/2010	11:23:15 PM	Helium MFC set to  100.000000
12/16/2010	11:23:15 PM	H2 MFC set to  0.000000
12/16/2010	11:23:15 PM	BCl3 MFC set to  0.000000
12/16/2010	11:23:15 PM	PHl3 MFC set to  0.000000
12/16/2010	11:23:15 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:23:15 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:23:15 PM	Tube furnace set to 0
12/16/2010	11:24:15 PM	Helium valve closed
12/16/2010	11:24:15 PM	H2 valve closed
12/16/2010	11:24:15 PM	BCl3 valve closed
12/16/2010	11:24:15 PM	PH3 valve closed
12/16/2010	11:24:15 PM	SiCl4 pre valve closed
12/16/2010	11:24:15 PM	SiCl4 post valve closed
12/16/2010	11:24:15 PM	Bubbler valve closed
12/16/2010	11:24:15 PM	Main Vac valve opened
12/16/2010	11:24:15 PM	Bypass valve opened
12/16/2010	11:24:15 PM	Helium MFC set to  0.000000
12/16/2010	11:24:15 PM	H2 MFC set to  0.000000
12/16/2010	11:24:15 PM	BCl3 MFC set to  0.000000
12/16/2010	11:24:15 PM	PHl3 MFC set to  0.000000
12/16/2010	11:24:15 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:24:15 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:24:15 PM	Tube furnace set to 0
12/16/2010	11:25:15 PM	H2 valve closed
12/16/2010	11:25:15 PM	BCl3 valve closed
12/16/2010	11:25:15 PM	PH3 valve closed
12/16/2010	11:25:15 PM	SiCl4 pre valve closed
12/16/2010	11:25:15 PM	SiCl4 post valve closed
12/16/2010	11:25:15 PM	Bubbler valve closed
12/16/2010	11:25:15 PM	Helium valve opened
12/16/2010	11:25:15 PM	Main Vac valve opened
12/16/2010	11:25:15 PM	Bypass valve opened
12/16/2010	11:25:15 PM	Helium MFC set to  100.000000
12/16/2010	11:25:15 PM	H2 MFC set to  0.000000
12/16/2010	11:25:16 PM	BCl3 MFC set to  0.000000
12/16/2010	11:25:16 PM	PHl3 MFC set to  0.000000
12/16/2010	11:25:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:25:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:25:16 PM	Tube furnace set to 0
12/16/2010	11:26:16 PM	Helium valve closed
12/16/2010	11:26:16 PM	H2 valve closed
12/16/2010	11:26:16 PM	BCl3 valve closed
12/16/2010	11:26:16 PM	PH3 valve closed
12/16/2010	11:26:16 PM	SiCl4 pre valve closed
12/16/2010	11:26:16 PM	SiCl4 post valve closed
12/16/2010	11:26:16 PM	Bubbler valve closed
12/16/2010	11:26:16 PM	Main Vac valve opened
12/16/2010	11:26:16 PM	Bypass valve opened
12/16/2010	11:26:16 PM	Helium MFC set to  0.000000
12/16/2010	11:26:16 PM	H2 MFC set to  0.000000
12/16/2010	11:26:16 PM	BCl3 MFC set to  0.000000
12/16/2010	11:26:16 PM	PHl3 MFC set to  0.000000
12/16/2010	11:26:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:26:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:26:16 PM	Tube furnace set to 0
12/16/2010	11:27:16 PM	H2 valve closed
12/16/2010	11:27:16 PM	BCl3 valve closed
12/16/2010	11:27:16 PM	PH3 valve closed
12/16/2010	11:27:16 PM	SiCl4 pre valve closed
12/16/2010	11:27:16 PM	SiCl4 post valve closed
12/16/2010	11:27:16 PM	Bubbler valve closed
12/16/2010	11:27:16 PM	Helium valve opened
12/16/2010	11:27:16 PM	Main Vac valve opened
12/16/2010	11:27:16 PM	Bypass valve opened
12/16/2010	11:27:16 PM	Helium MFC set to  100.000000
12/16/2010	11:27:16 PM	H2 MFC set to  0.000000
12/16/2010	11:27:16 PM	BCl3 MFC set to  0.000000
12/16/2010	11:27:16 PM	PHl3 MFC set to  0.000000
12/16/2010	11:27:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:27:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:27:16 PM	Tube furnace set to 0
12/16/2010	11:28:16 PM	Helium valve closed
12/16/2010	11:28:16 PM	H2 valve closed
12/16/2010	11:28:16 PM	BCl3 valve closed
12/16/2010	11:28:16 PM	PH3 valve closed
12/16/2010	11:28:16 PM	SiCl4 pre valve closed
12/16/2010	11:28:16 PM	SiCl4 post valve closed
12/16/2010	11:28:16 PM	Bubbler valve closed
12/16/2010	11:28:16 PM	Main Vac valve opened
12/16/2010	11:28:16 PM	Bypass valve opened
12/16/2010	11:28:16 PM	Helium MFC set to  0.000000
12/16/2010	11:28:16 PM	H2 MFC set to  0.000000
12/16/2010	11:28:16 PM	BCl3 MFC set to  0.000000
12/16/2010	11:28:16 PM	PHl3 MFC set to  0.000000
12/16/2010	11:28:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:28:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:28:16 PM	Tube furnace set to 0
12/16/2010	11:29:16 PM	H2 valve closed
12/16/2010	11:29:16 PM	BCl3 valve closed
12/16/2010	11:29:16 PM	PH3 valve closed
12/16/2010	11:29:16 PM	SiCl4 pre valve closed
12/16/2010	11:29:16 PM	SiCl4 post valve closed
12/16/2010	11:29:16 PM	Bubbler valve closed
12/16/2010	11:29:16 PM	Helium valve opened
12/16/2010	11:29:16 PM	Main Vac valve opened
12/16/2010	11:29:16 PM	Bypass valve opened
12/16/2010	11:29:16 PM	Helium MFC set to  100.000000
12/16/2010	11:29:16 PM	H2 MFC set to  0.000000
12/16/2010	11:29:16 PM	BCl3 MFC set to  0.000000
12/16/2010	11:29:16 PM	PHl3 MFC set to  0.000000
12/16/2010	11:29:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:29:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:29:16 PM	Tube furnace set to 0
12/16/2010	11:30:16 PM	Helium valve closed
12/16/2010	11:30:16 PM	H2 valve closed
12/16/2010	11:30:16 PM	BCl3 valve closed
12/16/2010	11:30:16 PM	PH3 valve closed
12/16/2010	11:30:16 PM	SiCl4 pre valve closed
12/16/2010	11:30:16 PM	SiCl4 post valve closed
12/16/2010	11:30:16 PM	Bubbler valve closed
12/16/2010	11:30:16 PM	Main Vac valve opened
12/16/2010	11:30:16 PM	Bypass valve opened
12/16/2010	11:30:16 PM	Helium MFC set to  0.000000
12/16/2010	11:30:16 PM	H2 MFC set to  0.000000
12/16/2010	11:30:16 PM	BCl3 MFC set to  0.000000
12/16/2010	11:30:16 PM	PHl3 MFC set to  0.000000
12/16/2010	11:30:16 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:30:16 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:30:17 PM	Tube furnace set to 0
12/16/2010	11:31:17 PM	H2 valve closed
12/16/2010	11:31:17 PM	BCl3 valve closed
12/16/2010	11:31:17 PM	PH3 valve closed
12/16/2010	11:31:17 PM	SiCl4 pre valve closed
12/16/2010	11:31:17 PM	SiCl4 post valve closed
12/16/2010	11:31:17 PM	Bubbler valve closed
12/16/2010	11:31:17 PM	Helium valve opened
12/16/2010	11:31:17 PM	Main Vac valve opened
12/16/2010	11:31:17 PM	Bypass valve opened
12/16/2010	11:31:17 PM	Helium MFC set to  100.000000
12/16/2010	11:31:17 PM	H2 MFC set to  0.000000
12/16/2010	11:31:17 PM	BCl3 MFC set to  0.000000
12/16/2010	11:31:17 PM	PHl3 MFC set to  0.000000
12/16/2010	11:31:17 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:31:17 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:31:17 PM	Tube furnace set to 0
12/16/2010	11:32:17 PM	Helium valve closed
12/16/2010	11:32:17 PM	H2 valve closed
12/16/2010	11:32:17 PM	BCl3 valve closed
12/16/2010	11:32:17 PM	PH3 valve closed
12/16/2010	11:32:17 PM	SiCl4 pre valve closed
12/16/2010	11:32:17 PM	SiCl4 post valve closed
12/16/2010	11:32:17 PM	Bubbler valve closed
12/16/2010	11:32:17 PM	Main Vac valve opened
12/16/2010	11:32:17 PM	Bypass valve opened
12/16/2010	11:32:17 PM	Helium MFC set to  0.000000
12/16/2010	11:32:17 PM	H2 MFC set to  0.000000
12/16/2010	11:32:17 PM	BCl3 MFC set to  0.000000
12/16/2010	11:32:17 PM	PHl3 MFC set to  0.000000
12/16/2010	11:32:17 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:32:17 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:32:17 PM	Tube furnace set to 0
12/16/2010	11:33:17 PM	H2 valve closed
12/16/2010	11:33:17 PM	BCl3 valve closed
12/16/2010	11:33:17 PM	PH3 valve closed
12/16/2010	11:33:17 PM	SiCl4 pre valve closed
12/16/2010	11:33:17 PM	SiCl4 post valve closed
12/16/2010	11:33:17 PM	Bubbler valve closed
12/16/2010	11:33:17 PM	Helium valve opened
12/16/2010	11:33:17 PM	Main Vac valve opened
12/16/2010	11:33:17 PM	Bypass valve opened
12/16/2010	11:33:17 PM	Helium MFC set to  100.000000
12/16/2010	11:33:17 PM	H2 MFC set to  0.000000
12/16/2010	11:33:17 PM	BCl3 MFC set to  0.000000
12/16/2010	11:33:17 PM	PHl3 MFC set to  0.000000
12/16/2010	11:33:17 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:33:17 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:33:17 PM	Tube furnace set to 0
12/16/2010	11:34:17 PM	Helium valve closed
12/16/2010	11:34:17 PM	H2 valve closed
12/16/2010	11:34:17 PM	BCl3 valve closed
12/16/2010	11:34:17 PM	PH3 valve closed
12/16/2010	11:34:17 PM	SiCl4 pre valve closed
12/16/2010	11:34:17 PM	SiCl4 post valve closed
12/16/2010	11:34:17 PM	Bubbler valve closed
12/16/2010	11:34:17 PM	Main Vac valve opened
12/16/2010	11:34:17 PM	Bypass valve opened
12/16/2010	11:34:17 PM	Helium MFC set to  0.000000
12/16/2010	11:34:17 PM	H2 MFC set to  0.000000
12/16/2010	11:34:17 PM	BCl3 MFC set to  0.000000
12/16/2010	11:34:17 PM	PHl3 MFC set to  0.000000
12/16/2010	11:34:17 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:34:17 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:34:17 PM	Tube furnace set to 0
12/16/2010	11:35:17 PM	H2 valve closed
12/16/2010	11:35:17 PM	BCl3 valve closed
12/16/2010	11:35:17 PM	PH3 valve closed
12/16/2010	11:35:17 PM	SiCl4 pre valve closed
12/16/2010	11:35:17 PM	SiCl4 post valve closed
12/16/2010	11:35:17 PM	Bubbler valve closed
12/16/2010	11:35:17 PM	Helium valve opened
12/16/2010	11:35:17 PM	Main Vac valve opened
12/16/2010	11:35:17 PM	Bypass valve opened
12/16/2010	11:35:17 PM	Helium MFC set to  100.000000
12/16/2010	11:35:17 PM	H2 MFC set to  0.000000
12/16/2010	11:35:17 PM	BCl3 MFC set to  0.000000
12/16/2010	11:35:17 PM	PHl3 MFC set to  0.000000
12/16/2010	11:35:17 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:35:17 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:35:18 PM	Tube furnace set to 0
12/16/2010	11:36:18 PM	Helium valve closed
12/16/2010	11:36:18 PM	H2 valve closed
12/16/2010	11:36:18 PM	BCl3 valve closed
12/16/2010	11:36:18 PM	PH3 valve closed
12/16/2010	11:36:18 PM	SiCl4 pre valve closed
12/16/2010	11:36:18 PM	SiCl4 post valve closed
12/16/2010	11:36:18 PM	Bubbler valve closed
12/16/2010	11:36:18 PM	Main Vac valve opened
12/16/2010	11:36:18 PM	Bypass valve opened
12/16/2010	11:36:18 PM	Helium MFC set to  0.000000
12/16/2010	11:36:18 PM	H2 MFC set to  0.000000
12/16/2010	11:36:18 PM	BCl3 MFC set to  0.000000
12/16/2010	11:36:18 PM	PHl3 MFC set to  0.000000
12/16/2010	11:36:18 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:36:18 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:36:18 PM	Tube furnace set to 0
12/16/2010	11:37:18 PM	H2 valve closed
12/16/2010	11:37:18 PM	BCl3 valve closed
12/16/2010	11:37:18 PM	PH3 valve closed
12/16/2010	11:37:18 PM	SiCl4 pre valve closed
12/16/2010	11:37:18 PM	SiCl4 post valve closed
12/16/2010	11:37:18 PM	Bubbler valve closed
12/16/2010	11:37:18 PM	Helium valve opened
12/16/2010	11:37:18 PM	Main Vac valve opened
12/16/2010	11:37:18 PM	Bypass valve opened
12/16/2010	11:37:18 PM	Helium MFC set to  100.000000
12/16/2010	11:37:18 PM	H2 MFC set to  0.000000
12/16/2010	11:37:18 PM	BCl3 MFC set to  0.000000
12/16/2010	11:37:18 PM	PHl3 MFC set to  0.000000
12/16/2010	11:37:18 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:37:18 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:37:18 PM	Tube furnace set to 0
12/16/2010	11:38:18 PM	Helium valve closed
12/16/2010	11:38:18 PM	H2 valve closed
12/16/2010	11:38:18 PM	BCl3 valve closed
12/16/2010	11:38:18 PM	PH3 valve closed
12/16/2010	11:38:18 PM	SiCl4 pre valve closed
12/16/2010	11:38:18 PM	SiCl4 post valve closed
12/16/2010	11:38:18 PM	Bubbler valve closed
12/16/2010	11:38:18 PM	Main Vac valve opened
12/16/2010	11:38:18 PM	Bypass valve opened
12/16/2010	11:38:18 PM	Helium MFC set to  0.000000
12/16/2010	11:38:18 PM	H2 MFC set to  0.000000
12/16/2010	11:38:18 PM	BCl3 MFC set to  0.000000
12/16/2010	11:38:18 PM	PHl3 MFC set to  0.000000
12/16/2010	11:38:18 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:38:18 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:38:18 PM	Tube furnace set to 0
12/16/2010	11:39:18 PM	H2 valve closed
12/16/2010	11:39:18 PM	BCl3 valve closed
12/16/2010	11:39:18 PM	PH3 valve closed
12/16/2010	11:39:18 PM	SiCl4 pre valve closed
12/16/2010	11:39:18 PM	SiCl4 post valve closed
12/16/2010	11:39:18 PM	Bubbler valve closed
12/16/2010	11:39:18 PM	Helium valve opened
12/16/2010	11:39:18 PM	Main Vac valve opened
12/16/2010	11:39:18 PM	Bypass valve opened
12/16/2010	11:39:18 PM	Helium MFC set to  100.000000
12/16/2010	11:39:18 PM	H2 MFC set to  0.000000
12/16/2010	11:39:18 PM	BCl3 MFC set to  0.000000
12/16/2010	11:39:18 PM	PHl3 MFC set to  0.000000
12/16/2010	11:39:18 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:39:18 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:39:18 PM	Tube furnace set to 0
12/16/2010	11:40:18 PM	Helium valve closed
12/16/2010	11:40:18 PM	H2 valve closed
12/16/2010	11:40:18 PM	BCl3 valve closed
12/16/2010	11:40:18 PM	PH3 valve closed
12/16/2010	11:40:18 PM	SiCl4 pre valve closed
12/16/2010	11:40:18 PM	SiCl4 post valve closed
12/16/2010	11:40:18 PM	Bubbler valve closed
12/16/2010	11:40:18 PM	Main Vac valve opened
12/16/2010	11:40:18 PM	Bypass valve opened
12/16/2010	11:40:18 PM	Helium MFC set to  0.000000
12/16/2010	11:40:18 PM	H2 MFC set to  0.000000
12/16/2010	11:40:18 PM	BCl3 MFC set to  0.000000
12/16/2010	11:40:18 PM	PHl3 MFC set to  0.000000
12/16/2010	11:40:18 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:40:18 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:40:19 PM	Tube furnace set to 0
12/16/2010	11:41:19 PM	H2 valve closed
12/16/2010	11:41:19 PM	BCl3 valve closed
12/16/2010	11:41:19 PM	PH3 valve closed
12/16/2010	11:41:19 PM	SiCl4 pre valve closed
12/16/2010	11:41:19 PM	SiCl4 post valve closed
12/16/2010	11:41:19 PM	Bubbler valve closed
12/16/2010	11:41:19 PM	Helium valve opened
12/16/2010	11:41:19 PM	Main Vac valve opened
12/16/2010	11:41:19 PM	Bypass valve opened
12/16/2010	11:41:19 PM	Helium MFC set to  100.000000
12/16/2010	11:41:19 PM	H2 MFC set to  0.000000
12/16/2010	11:41:19 PM	BCl3 MFC set to  0.000000
12/16/2010	11:41:19 PM	PHl3 MFC set to  0.000000
12/16/2010	11:41:19 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:41:19 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:41:19 PM	Tube furnace set to 0
12/16/2010	11:42:19 PM	Helium valve closed
12/16/2010	11:42:19 PM	H2 valve closed
12/16/2010	11:42:19 PM	BCl3 valve closed
12/16/2010	11:42:19 PM	PH3 valve closed
12/16/2010	11:42:19 PM	SiCl4 pre valve closed
12/16/2010	11:42:19 PM	SiCl4 post valve closed
12/16/2010	11:42:19 PM	Bubbler valve closed
12/16/2010	11:42:19 PM	Main Vac valve opened
12/16/2010	11:42:19 PM	Bypass valve opened
12/16/2010	11:42:19 PM	Helium MFC set to  0.000000
12/16/2010	11:42:19 PM	H2 MFC set to  0.000000
12/16/2010	11:42:19 PM	BCl3 MFC set to  0.000000
12/16/2010	11:42:19 PM	PHl3 MFC set to  0.000000
12/16/2010	11:42:19 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:42:19 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:42:19 PM	Tube furnace set to 0
12/16/2010	11:42:20 PM	Run finished at 11:42 PM
12/16/2010	11:42:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/16/2010	11:43:38 PM	Recipe started at 11:43 PM
12/16/2010	11:43:38 PM	Helium valve closed
12/16/2010	11:43:38 PM	BCl3 valve closed
12/16/2010	11:43:38 PM	PH3 valve closed
12/16/2010	11:43:38 PM	SiCl4 pre valve closed
12/16/2010	11:43:38 PM	SiCl4 post valve closed
12/16/2010	11:43:38 PM	Main Vac valve closed
12/16/2010	11:43:38 PM	Bypass valve closed
12/16/2010	11:43:38 PM	Bubbler valve closed
12/16/2010	11:43:38 PM	H2 valve opened
12/16/2010	11:43:38 PM	Helium MFC set to  0.000000
12/16/2010	11:43:38 PM	H2 MFC set to  500.000000
12/16/2010	11:43:38 PM	BCl3 MFC set to  0.000000
12/16/2010	11:43:38 PM	PHl3 MFC set to  0.000000
12/16/2010	11:43:38 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:43:38 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:43:38 PM	Tube furnace set to 0
12/16/2010	11:44:55 PM	Helium valve closed
12/16/2010	11:44:55 PM	BCl3 valve closed
12/16/2010	11:44:55 PM	PH3 valve closed
12/16/2010	11:44:55 PM	SiCl4 pre valve closed
12/16/2010	11:44:55 PM	SiCl4 post valve closed
12/16/2010	11:44:55 PM	Main Vac valve closed
12/16/2010	11:44:55 PM	Bypass valve closed
12/16/2010	11:44:55 PM	H2 valve opened
12/16/2010	11:44:55 PM	Bubbler valve opened
12/16/2010	11:44:56 PM	Helium MFC set to  0.000000
12/16/2010	11:44:56 PM	H2 MFC set to  500.000000
12/16/2010	11:44:56 PM	BCl3 MFC set to  0.000000
12/16/2010	11:44:56 PM	PHl3 MFC set to  0.000000
12/16/2010	11:44:56 PM	SiCl4 MFC set to  0.000000
12/16/2010	11:44:56 PM	Bypass solenoid MFC set to  0.000000
12/16/2010	11:44:56 PM	Tube furnace set to 1000
